摘要:
A motion control system that includes a base, a stage supported by the base and movable with respect to the base, and a motor coupled to the base and operable to move the stage. The motor includes a mounting base arranged to connect the motor to the base, a friction pad engageable with the stage, and a coupling portion including a first end connected to the mounting base and a second end. The friction pad is connected to the coupling portion between the first end and the second end. A piezoelectric element is disposed between the mounting base and the second end and is operable in response to an electrical signal to move the friction pad and the stage. A mounting screw is accessible from an exterior of the base and engages the coupling portion. The mounting screw is the sole attachment mechanism between the motor and the base.
摘要:
The invention relates to a method and to an arrangement for operating a dynamic nano focusing system for use thereof in the field of microscopy, interferometry or similar applications, wherein the nano focusing system comprises a lever-transmission piezo actuator and a frictionless guide based on a resiliently deformable solid body joint which is connected to a mounting unit, in particular for a lens, in order to implement the desired adjustment paths for the focusing. According to the invention, in order to increase the dynamics during the focusing process, a secondary fine adjustment movement is superimposed on the primary adjustment movement, said secondary fine adjustment movement having a smaller adjustment path but higher frequency than the primary adjustment movement, wherein, when the fine adjustment is carried out, a determination is made as to whether the focusing result changes, in order to specify according thereto the amount and/or the direction of the primary adjustment movement.
摘要:
The invention relates to a high-resolution positioning device having a stator and a rotor, a coil array, arranged on the stator, having at least three groups of flat coils, wherein each group has at least two single coils and the coil array encloses a free space on the stator, also having circuits that are situated on, against or in the rotor, are excited by permanent magnet and form a magnet array which likewise encloses a free space, wherein the free spaces hold a position measuring system which has a measuring head having sensors and has an area scale. According to the invention, the device is in the form of a freely suspended, magnetically controlled six-dimensional drive, wherein the measuring head is situated in the coil array free space and the area scale is situated in the magnet array free space, and the rotor is free of drive-related electrical or electronic and, in this regard, live parts.
摘要:
The invention relates to a drive apparatus comprising a housing, a transmitter, a drive element in the form of a piezoelectric or electrostrictive actuator and an element which is intended to be driven, wherein the transmitter is in frictional contact with the element which is intended to be driven and makes contact with the drive element by means of at least one first end face and is in contact with a sprung element by means of at least one second end face, wherein both the drive element and the sprung element are supported on the housing in a direction which is substantially parallel to the direction of extent of the element which is intended to be driven, and the transmitter is surrounded at least in sections by a prestressing element in such a way that the prestressing element is at a distance from the housing, wherein the element which is intended to be driven projects through the sprung element and through the transmitter and through the drive element.
摘要:
The invention relates to a piezoelectric actuator, particularly for an ultrasonic motor, comprising an acoustic oscillation resonator, in which the acoustic oscillation resonator has, in essence, the shape of a rectangular piezoelectric plate with two main, two lateral and two front surfaces and has a multilayer structure inside that depicts a layer of excitation electrodes, which alternate with the layers of the shared electrodes and with the layers of polarized ceramic located therebetween. The polarization vector runs perpendicular to the surface of the electrodes, and all excitation electrodes are divided into two groups, which are not connected to one another and which are arranged symmetrically to symmetry surface of said plate. This symmetry surface runs perpendicular to the main and lateral surfaces of the plate and, to be precise, through the middle, and each group of the excitation electrodes, together with the shared electrodes and the piezo ceramic therebetween, form a multilayer generator, which is asymmetrically arranged with regard to the symmetry surface of the piezoelectric plate, for an acoustic wave.
摘要:
The invention relates to a high-precision ultrasonic motor, having a housing and at least one oscillator arranged in the housing, preferably in the form of a piezoelectric plate, on which at least one friction element is arranged, the friction element provided for the purpose of contacting a friction surface of an element intended to be driven thereby, and a pressing device for pressing the friction element on the friction surface, wherein the housing has at least two support means for contacting respective end faces of the oscillator that are assigned to said means. According to the invention, the support means are arranged to be able to move relative to each other, such that during installation of the ultrasonic motor, said support means can be transferred independently of each other from a position in which the support means are distanced from their respective assigned end faces, into a resting position, wherein they at least partially rest against the respective assigned end faces.
摘要:
The invention relates to an ultrasound drive (1) with at least two ultrasound oscillators (2), which are arranged opposite one another and have piezoelectric plates with friction elements (3) arranged on them, a friction rail (4) with two friction layers on it, a movable holding apparatus (11), a base plate (8) for the drive and an excitation apparatus (12) of the ultrasound oscillators. According to the invention, the friction rail is in the form of a multilayer bar or ring with an uneven number of layers, wherein the central layer forms a carrier plate or disc and two outer layers form the friction layers, and wherein viscous layers and elastic layers are arranged between the central layer and the outer layers, and the carrier plate or disc has fastening points, with which the friction rail is fitted on the movable holding apparatus or the base plate.