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    Measurement method
    81.
    发明公开
    Measurement method 审中-公开
    测量方法

    公开(公告)号：EP1813988A2

    公开(公告)日：2007-08-01

    申请号：EP07001652.2

    申请日：2007-01-25

    Applicant: CANON KABUSHIKI KAISHA

    Inventor： Shiode, Yoshihiro

    IPC: G03F7/20 ,  G01M11/02

    CPC classification number: G03F7/706 ,  G01J4/00 ,  G01J2009/0261 ,  G03F7/70566

    Abstract: A method for irradiating onto a target optical system plural linearly polarized rays having different polarization directions, and for measuring a polarization characteristic of the target optical system including a birefringence amount R and a fast axis Φ includes the steps of irradiating linearly polarized ray having a polarization direction θ onto the target optical system and obtaining a centroid amount P of the ray that has transmitted through the target optical system, and obtaining the birefringence amount R and the fast axis Φ from P=-R•cos(2θ-Φ) or P=R•cos(2θ-Φ).

    Abstract translation: 向目标光学系统照射具有不同偏振方向的多个线偏振光并且测量包括双折射量R和快轴Φ的目标光学系统的偏振特性的方法包括以下步骤：照射具有偏振方向的线性偏振光 并且获得透射通过目标光学系统的射线的质心量P，并且从P = -R·cos（2θ-Φ）或者P获得双折射量R和快轴Φ = R•COS（2θ-Φ）。

    Near-field polarized-light measurement apparatus
    82.
    发明公开
    Near-field polarized-light measurement apparatus 审中-公开
    近场偏振光测量装置

    公开(公告)号：EP1715322A3

    公开(公告)日：2007-04-11

    申请号：EP06111974.9

    申请日：2006-03-30

    Applicant: JASCO CORPORATION

    Inventor： Inoue, Tsutomu ,  Sato, Fuminori ,  Narita, Yoshihito ,  Senuma, Mutsumi

    IPC: G01N13/14 ,  G12B21/06 ,  G01J4/02

    CPC classification number: G01J4/00 ,  G01N21/21 ,  G01Q30/02 ,  G01Q60/22

    Abstract: A near-field polarized-light measurement apparatus 10 comprises a near-field probe 14, an analyzer 18, a detector 22, and an analyzer-rotating unit 20. The near-field probe 14 has at a tip thereof an opening smaller than the wavelength of light used for measurement and generates linearly polarized near-field light from the opening and irradiates a sample with the near-field light. The detector 22 detects light transmitted through the sample via the analyzer 18. The analyzer-rotating unit 20 rotates the analyzer 18 about an optical axis to vary the angle of a transmission axis thereof. And optical rotation of the sample is measured by rotating the analyzer 18 with the analyzer-rotating unit 20.

    Abstract translation: 近场偏振光测量装置10包括近场探头14，分析器18，检测器22和分析器旋转单元20.近场探头14的尖端具有小于 用于测量的光的波长并且从开口产生线性偏振的近场光并且用近场光照射样本。 检测器22通过分析器18检测透过样本的光。分析器旋转单元20围绕光轴旋转分析器18以改变其透射轴的角度。 并且通过用分析器旋转单元20旋转分析器18来测量样品的旋光度。

    Method and apparatus for measuring birefringence
    84.
    发明公开
    Method and apparatus for measuring birefringence 审中-公开
    Verfahren und Vorrichtung zur Messung der Doppelbrechung

    公开(公告)号：EP1429128A1

    公开(公告)日：2004-06-16

    申请号：EP03028433.5

    申请日：2003-12-11

    Applicant: CANON KABUSHIKI KAISHA

    Inventor： Takeuchi, Seiji ,  Kishikawa, Yasuhiro

    IPC: G01J4/00

    CPC classification number: G01J4/00 ,  G01N21/23

    Abstract: Disclosed is a birefringence measuring apparatus and method for measuring birefringence of a sample in a reduced time and in a simple manner. The birefringence measuring apparatus includes a light projecting unit for projecting approximately circularly polarized light upon a sample, a Stokes meter for detecting a state of polarization of light from the sample, and a calculating system for calculating birefringence of the sample on the basis of a Stokes parameter from the Stokes meter.

    Abstract translation: 公开了一种双折射测量装置和方法，用于以缩短的时间和简单的方式测量样品的双折射。 双折射测量装置包括用于将近似圆偏振光投射在样品上的光投射单元，用于检测来自样品的光的偏振状态的斯托克斯计数器，以及用于基于斯托克斯计算样品的双折射的计算系统 参数从斯托克斯计。

    POLARIMETRE ET PROCEDE DE MESURE CORRESPONDANT
    85.
    发明授权
    POLARIMETRE ET PROCEDE DE MESURE CORRESPONDANT 有权
    旋光仪和相关测量方法

    公开(公告)号：EP0974042B1

    公开(公告)日：2004-04-28

    申请号：EP99901675.1

    申请日：1999-02-01

    Applicant: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE

    Inventor： COMPAIN, Eric ,  DREVILLON, Bernard

    IPC: G01J4/00

    CPC classification number: G01J4/00

    Abstract: The invention concerns a polarimeter (31) and a method for measuring a light beam polarisation states. Said polarimeter comprises a prism (32) for separating the incident light beam (21) having a Stokes vector (S) into a reflected beam (22) and a transmitted beam (23), the prism not inducing any interferential effect and the transmitted beam being subjected to at least a reflection internal to the prism. The polarimeter also comprises two final separators (3, 4) for separating respectively each of the reflected beam and the transmitted beam into at least two final beams (25-28), detecting means (5-8) for measuring the intensity levels of the final beams and a processing unit (9) producing the Stokes vector of the light to be measured. Preferably, the reflections internal to the prism (32) are either total reflections, or reflections on a thick absorbing layer.

    Polarization effect averaging
    87.
    发明公开
    Polarization effect averaging 有权
    Mittelwertbildung durch Polarisationseffekte

    公开(公告)号：EP1329702A1

    公开(公告)日：2003-07-23

    申请号：EP02018761.3

    申请日：2002-08-22

    Applicant: Agilent Technologies Inc. a Delaware Corporation

    Inventor： Witzel, Eckart ,  Haisch, Hansjörg

    IPC: G01M11/00 ,  G01J9/02

    CPC classification number: G01M11/33 ,  G01J4/00 ,  G01J9/02 ,  G01M11/331

    Abstract: In order to reduce polarization dependent error, the polarization state of incident light is set to at least two different states of polarization, and a first optical property is determined separately for each of said at least two states of polarization. Then, an averaging procedure is carried out in order to obtain a mean value of the first optical property or of a property derived therefrom. Alternatively, the averaging procedure can be performed with respect to a DUT property of a device under test that is determined as a function of said first optical property.

    Abstract translation: 为了减少偏振相关误差，将入射光的偏振状态设定为至少两种不同的偏振状态，并且对于所述至少两种极化状态中的每一种分别确定第一光学特性。 然后，进行平均化处理以获得第一光学特性的平均值或由其导出的性质的平均值。 或者，可以相对于作为所述第一光学性质的函数确定的被测设备的DUT属性执行平均过程。

    Polarimeter
    88.
    发明公开
    Polarimeter 审中-公开
    旋光仪

    公开(公告)号：EP1118847A3

    公开(公告)日：2003-04-02

    申请号：EP01100646.7

    申请日：2001-01-11

    Applicant: A. Krüss Optronic GmbH

    Inventor： Pannhoff, Helge

    IPC: G01J4/04

    CPC classification number: G01N21/21 ,  G01J4/00

    Abstract: Die Erfindung bezieht sich auf ein Polarimeter zur Ermittlung von Eigenschaften einer Probe über Phasenauflösung und Fourieranalyse mit einer Quelle (1, 2, 3, 4, 5) für linear polarisierte Strahlung, einer Probenkammer zur Aufnahme der Polarimeterröhre (6) für die Probe, einen Analysator (7), der am Ausgang der Probenkammer (6) angeordnet ist, der das von der Probe optisch beeinflusste Licht erhält und der kontinuierlich drehbar ist, einen Motor mit Inkrementalgeber (10) als Antrieb für den Analysator (7), einen Detektor (9) mit Linse (8), der das vom Analysator (7) ausgegebene Signal hinsichtlich Analysatorstellung und Intensitätssignal erfasst und an einen Analog-Digitalwandler (11) abgibt, der von dem Inkrementalgeber (19) getriggert wird, und einen Rechner (12), der das Ausgangssignal vom Analog-Digitalwandler (11) erhält und über eine Fourieranalyse eine Aussage über die Eigenschaften der Probe macht.

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