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8 条记录 (耗时 0.014 秒)

    Electrostatic chuck member and a method of producing the same
    5.
    发明公开
    Electrostatic chuck member and a method of producing the same 失效
    Elektrostatische Haltevorrichtung und Herstellungsverfahren derselben

    公开(公告)号：EP0762491A2

    公开(公告)日：1997-03-12

    申请号：EP96306130.4

    申请日：1996-08-22

    申请人： TOCALO CO. LTD.

    发明人： Harada, Yoshio ,  Takeuchi, Junichi

    IPC分类号： H01L21/68 ,  B23Q3/15

    CPC分类号： B23Q3/15 ,  H01L21/6833 ,  Y10T279/23

    摘要： An electrostatic chuck member comprises a metal substrate, an undercoat of a metallic spray-coated layer and a topcoat of Al 2 O 3 ·TiO 2 based spray-coated layer containing a Ti n O 2n-1 (n=1-9) type compound, and has a large volume resistivity and a less scattering thereof and a stable quality.

    摘要翻译： 静电吸盘构件包括金属基底，金属喷涂层的底涂层和含有TinO2n-1（n = 1-9）型化合物的Al 2 O 3·TiO 2基喷涂层的顶涂层，并且具有大体积 电阻率和较少的散射性和稳定的质量。

    Method of forming carbide-base composite coatings, the composite coatings formed by that method, and members having thermally sprayed chromium carbide coatings
    8.
    发明公开
    Method of forming carbide-base composite coatings, the composite coatings formed by that method, and members having thermally sprayed chromium carbide coatings 失效
    一种制备碳化硅的基础上的复合涂层工艺; 复合涂层产生和体碳化铬的基础上热gespritlen层

    公开(公告)号：EP0690144A1

    公开(公告)日：1996-01-03

    申请号：EP95110026.2

    申请日：1995-06-27

    申请人： EBARA CORPORATION ,  TOCALO CO. LTD.

    发明人： Nakahama, Syuhei ,  Nagahara, Hisamichi ,  Kawasaki, Masamichi ,  Harada, Yoshio ,  Takeuchi, Junichi

    IPC分类号： C23C10/02 ,  C23C4/18

    CPC分类号： C23C4/18 ,  C23C10/02 ,  Y10T428/265 ,  Y10T428/31678

    摘要： Thermally sprayed coatings made from carbides of metals having greater carbon affinity than Cr in the presence of free carbon, or thermally sprayed coatings made from carbides of metals having smaller carbon affinity than Cr are heat treated in a chromium halide containing atmosphere which also contains hydrogen gas, whereby activated metallic Cr is precipitated in a fine particulate form, which is allowed to act on the thermally sprayed coatings, whereupon a Cr₂₃C₆-form carbide is created not only on the coating surface but also in its interior, particularly within pores, to form a modified layer, thereby compositing the thermally sprayed coatings.
    Members coated with thermally sprayed Cr₃C₂, Cr₇C₂ coatings or thermally sprayed chromium carbide coatings further containing free carbon or carbides of metals having smaller carbon affinity than Cr are heat treated in a chromium halide generating atmosphere which also contains hydrogen gas, whereby activated metallic Cr is precipitated in a fine particulate form, which is allowed to act on the thermally sprayed coatings, whereupon a Cr₂₃C₆-form carbide is created not only on the coatings surface but also in its interior, particularly within pores, to form modified, thermally sprayed chromium carbide coatings.

    摘要翻译： 从具有游离碳，或者由具有比铬更小的碳亲和金属的碳化物制成的热喷涂层的存在比的Cr更大的碳亲和金属的碳化物制成热喷涂涂层是在一个铬卤化物含气氛中热处理其因此包含氢气 由此活化的金属Cr以细颗粒形式析出，即，所有被允许作用于热喷涂涂层，其中一旦一个Cr23C6型碳化物创建不仅在涂层表面上，而是在其内部，特别是在孔中，以形成 的改性层，从而合成所述热喷涂涂层。 涂有热构件喷洒Cr3C2复合，Cr7C2涂层或热喷涂碳化铬涂层还含有游离碳或具有比铬更小的碳亲和金属的碳化物在其因此包含氢气，由此活化金属Cr析出铬卤化物生成气氛中热处理 在被允许作用于热喷涂涂层，其中一旦一个Cr23C6型碳化物创建不仅在涂层表面，但也就是，在其内部，特别是在孔中，以形成修改的细颗粒形式，所有，热喷涂碳化铬涂层 ，