公开(公告)号：EP1082271A4

公开(公告)日：2005-02-16

申请号：EP99926113

申请日：1999-06-02

申请人： MATTSON TECHNOLOGY IP INC

发明人： VERHAVERBEKE STEVEN

IPC分类号： C03C23/00 ,  H01L21/304 ,  H01L21/306 ,  B08B3/08 ,  H01L21/00

CPC分类号： H01L21/02052

摘要： The present invention is directed to wet processing methods for the manufacture of electronic component precursors, such as semiconductor wafers used in integrated circuits. More specifically, this invention relates to methods of manufacturing electronic component precursors using liquids of varying temperature.

公开(公告)号：EP0989962A4

公开(公告)日：2005-03-09

申请号：EP98929046

申请日：1998-06-12

申请人： MATTSON TECHNOLOGY IP INC

发明人： VERHAVERBEKE STEVEN

IPC分类号： C03C15/00 ,  C03C23/00 ,  C11D7/06 ,  C11D7/10 ,  C11D11/00 ,  H01L21/304 ,  H01L21/306 ,  H01L21/308 ,  H01L21/311 ,  H01L21/00

CPC分类号： H01L21/02052 ,  C03C15/00 ,  C03C23/0075 ,  C11D7/06 ,  C11D7/10 ,  C11D11/0047 ,  H01L21/02019 ,  H01L21/30604 ,  H01L21/31111

摘要： The present invention presents methods for, inter alia, cleaning and etching semiconductor wafers with a solution containing ammonium fluoride and control of the process used for preparing such a solution at its point of use.

公开(公告)号：EP1198620A4

公开(公告)日：2004-12-22

申请号：EP00936165

申请日：2000-05-19

申请人： MATTSON TECHNOLOGY IP INC

发明人： VERHAVERBEKE STEVEN

IPC分类号： C23F3/00 ,  C11D3/39 ,  C11D11/00 ,  C23F1/18 ,  H01L21/306 ,  H01L21/3213 ,  B08B3/00 ,  C23C22/63 ,  C23G1/10

CPC分类号： C23F1/18 ,  C11D3/3947 ,  C11D11/0047 ,  H01L21/02052 ,  H01L21/32134

摘要： The present invention provides methods of wet processing electronic components having surfaces containing copper. In the methods of the present invention, copper containing electronic components are contacted with a copper oxidizing solution containing an oxidizing agent, and subsequently contacted with an etching solution. The methods of the present invention are particularly useful for cleaning copper containing components.

摘要翻译： 本发明提供了具有含有铜表面的湿法处理的电子元件的方法。 在本发明的方法中，含有铜的电子元件与在含氧化剂的铜氧化性溶液接触，并在蚀刻溶液随后接触。 本发明的方法可用于清洁铜含有组分是特别有用的。