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    REMOVAL OF METAL IONS FROM ONIUM HYDROXIDES AND ONIUM SALT SOLUTIONS
    5.
    发明授权
    REMOVAL OF METAL IONS FROM ONIUM HYDROXIDES AND ONIUM SALT SOLUTIONS 有权
    的金属离子鎓氢氧化物和ONIUMSALZLÖSUNGEN拆除

    公开(公告)号：EP1919853B1

    公开(公告)日：2010-10-27

    申请号：EP06790058.9

    申请日：2006-08-25

    申请人： Sachem, Inc.

    发明人： NIINOBE, Takao ,  WILSON, Wilfred Wayne

    IPC分类号： C07C209/84 ,  C07C211/63

    CPC分类号： C07C209/84 ,  B01J39/07 ,  C02F2101/20 ,  C02F2103/346 ,  C07C211/63

    摘要： The present invention relates to a process for removing dissolved metal ions from an onium hydroxide and/or salt solution, including providing a weak acid ion exchange medium; providing a solution comprising magnesium ions; forming a magnesium-loaded ion exchange medium by contacting the ion exchange medium with the solution comprising magnesium ions; contacting the magnesium-loaded ion exchange medium with an onium hydroxide and/or salt solution containing a first quantity of dissolved metal ions, wherein at least a portion of the dissolved metal ions are removed from the onium hydroxide and/or salt solution; and collecting the onium hydroxide and/or salt solution after the contacting, wherein the solution collected contains a second quantity of dissolved metal ions smaller than the first quantity. The onium hydroxide and/or salt may be tetramethylammonium hydroxide and/or salt, and the metal content may be reduced to about 1 part per billion or less by the process.

    CLEANING SOLUTIONS AND ETCHANTS AND METHODS FOR USING SAME
    9.
    发明公开
    CLEANING SOLUTIONS AND ETCHANTS AND METHODS FOR USING SAME 审中-公开
    清洁解决方案和蚀刻剂及其使用方法

    公开(公告)号：EP1680806A2

    公开(公告)日：2006-07-19

    申请号：EP04818297.6

    申请日：2004-10-27

    申请人： Sachem, Inc.

    发明人： WOJTCZAK, William, A. ,  DEWULF, Dean ,  COLLINS, Sian

    IPC分类号： H01L21/00

    CPC分类号： H01L21/31111 ,  C11D7/3218 ,  C11D7/3227 ,  C11D7/34 ,  C11D7/36 ,  C11D7/5004 ,  C11D11/0047 ,  H01L21/02063 ,  H01L21/02071 ,  H01L21/76814

    摘要： Composition for cleaning or etching a semiconductor substrate and method for using the same. The composition may include a fluorine-containing compound as an active agent such as a quaternary ammonium fluoride, a quaternary phosphonium fluoride, sulfonium fluoride, more generally an -onium fluoride or 'multi' quaternary -onium fluoride that includes two or more quaternary -onium groups linked together by one or more carbon-containing groups. The composition may further include a pH adjusting acid such as a mineral acid, carboxylic acid, dicarboxylic acid, sulfonic acid, or combination thereof to give a pH of about 2 to 9. The composition can be anhydrous and may further include an organic solvent such as an alcohol, amide, ether, or combination thereof. The composition are useful for obtaining improved etch rate, etch selectivity, etch uniformity and cleaning criteria on a variety of substrates.

    SYNTHESIS OF ONIUM HYDROXIDES FROM ONIUM SALTS
    10.
    发明公开
    SYNTHESIS OF ONIUM HYDROXIDES FROM ONIUM SALTS 失效
    合成喔ON ON。。。。。。。。。。。。。。。

    公开(公告)号：EP1025281A4

    公开(公告)日：2002-03-27

    申请号：EP98913361

    申请日：1998-03-31

    申请人： SACHEM INC

    发明人： SHARIFIAN HOSSEIN ,  HULME DAVID R

    IPC分类号： G03F7/029 ,  B01D61/44 ,  C07C209/00 ,  C07C209/68 ,  C07C211/63 ,  C07F9/54 ,  C25B3/00

    CPC分类号： C25B3/00 ,  B01D61/445 ,  C07C209/68 ,  C07F9/54 ,  C07C211/63

    摘要： The present invention provides a process for preparing onium hydroxide from a corresponding onium salt and for purifying onium hydroxide including providing an electrochemical cell containing a cathode, an anode, a divider and a bipolar membrane, the bipolar membrane having an anion selective side facing the anode and a cation selective side facing the cathode, wherein the divider is positioned between the cathode and the bipolar membrane, and the bipolar membrane is positioned between the divider and the anode, thereby defining a feed compartment between the divider and the bipolar membrane, a recovery compartment between the divider and the cathode, and a water compartment between the bipolar membrane and the anode, charging a solution containing at least one of the onium salt and the onium hydroxide to be purified to the feed compartment; charging a liquid electrolyte to the other compartments; passing a current through the electrochemical cell to produce the onium hydroxide in the recovery compartment; and recovering the onium hydroxide from the recovery compartment.

    摘要翻译： 本发明提供了一种从相应的鎓盐制备氢氧化鎓和纯化氢氧化鎓的方法，包括提供含有阴极，阳极，分隔器和双极膜的电化学电池，双极膜具有面向阳极的阴离子选择侧 以及面向阴极的阳离子选择侧，其中分隔器位于阴极和双极膜之间，并且双极膜位于分隔器和阳极之间，从而在分隔器和双极膜之间限定进料室，回收 分隔器和阴极之间的隔室，以及双极隔膜和阳极之间的水室; 将含有至少一种鎓盐和待纯化的氢氧化鎓的溶液装入进料室; 将液体电解质装入其它隔室; 使电流通过电化学电池以在回收室中产生氢氧化鎓; 并从回收室回收氢氧化鎓。