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公开(公告)号：EP0797753B1
公开(公告)日：1999-03-24
申请号：EP95928925.7
申请日：1995-08-28
发明人： CAMM, David, Malcolm
CPC分类号： H01L21/67115 , C23C16/481 , F27B17/0016
摘要： An apparatus and method for rapidly and uniformly heating a workpiece (12) includes a plurality of walls defining a first chamber (20), a first source of radiation (44) for producing incident radiation on a first energy transfer surface of the workpiece (19), a holder for holding the workpiece in a workpiece plane in the chamber and a radiation absorbing surface on at least one wall of the chamber (22, 24, 26). The holder has an energy transfer surface, the energy surfaces of the holder and of the workpiece reflecting and emitting radiation in the chamber and the radiation absorbing surface absorbing non-incident radiation reflected and emitted from the energy transfer surfaces.
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公开(公告)号：EP0186879B1
公开(公告)日：1991-07-17
申请号：EP85116346.9
申请日：1985-12-20
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公开(公告)号：EP0375338A2
公开(公告)日：1990-06-27
申请号：EP89313247.2
申请日：1989-12-19
发明人： Camm, David Malcolm , Kjorvel, Arne , Housden, Anthony John Derek , Halpin, Nicholas Peter , Parfeniuk, Dean Allister , Frenz, Andy Joseph
摘要： An apparatus (10) for producing high intensity radiation has electrodes (15,17) positioned within an elongated cylindrical arc chamber (12) across which an arc discharge can be established. Liquid is injected into the arc chamber to produce a vortex motion therein to form a cylindrical liquid wall adjacent to the chamber, which constricts the arc by cooling an outer periphery thereof. Gas is injected into the arc chamber to produce a vortex motion adjacent the cylindrical liquid wall. An exhaust structure actively exhausts the liquid and gas from the arc chamber to reduce turbulence and restriction of fluid. This permits attainment of higher flux densities in the arc, and/or extension of electrode life. Preferably, the liquid and gas are exhausted actively by means of an ejector pump which ejects pressurized liquid into the gas and liquid leaving the arc chamber. The ejector pump pressurizes the exhausted gas and liquid sufficiently to permit the gas to be separated and recycled back to the arc chamber, without requiring an additional compressor to increase gas pressure.
摘要翻译： 用于生产高强度辐射的设备（10）具有电极（15,17）长圆柱形电弧室（12）的内定位可以建立横跨到电弧放电。 液体注入所述电弧室，以产生涡流运动的，以形成圆柱形液壁邻近该腔室，其通过在其外周冷却收缩电弧。 气体被注入到电弧室，以产生涡流运动。邻近圆柱形液壁。 排气结构积极排出液体和气体从电弧室，以减少流体的湍流和限制。 这允许更高的磁通密度的实现在电弧，和/或电极寿命的延长。 优选地，液体和气体通过其喷射加压液体进入气体和液体离开电弧室的喷射器泵的方式积极排出。 喷射器泵加压排出的气体和液体，足以允许被分离并循环回所述电弧室中的气体，而不会在附加压缩机需要增加气体压力。
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公开(公告)号：EP0375338B1
公开(公告)日：1997-04-23
申请号：EP89313247.2
申请日：1989-12-19
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公开(公告)号：EP0797753A1
公开(公告)日：1997-10-01
申请号：EP95928925.0
申请日：1995-08-28
发明人： CAMM, David, Malcolm
CPC分类号： H01L21/67115 , C23C16/481 , F27B17/0016
摘要： An apparatus and method for rapidly and uniformly heating a workpiece (12) includes a plurality of walls defining a first chamber (20), a first source of radiation (44) for producing incident radiation on a first energy transfer surface of the workpiece (19), a holder for holding the workpiece in a workpiece plane in the chamber and a radiation absorbing surface on at least one wall of the chamber (22, 24, 26). The holder has an energy transfer surface, the energy surfaces of the holder and of the workpiece reflecting and emitting radiation in the chamber and the radiation absorbing surface absorbing non-incident radiation reflected and emitted from the energy transfer surfaces.
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公开(公告)号：EP0375338A3
公开(公告)日：1990-12-12
申请号：EP89313247.2
申请日：1989-12-19
发明人： Camm, David Malcolm , Kjorvel, Arne , Housden, Anthony John Derek , Halpin, Nicholas Peter , Parfeniuk, Dean Allister , Frenz, Andy Joseph
摘要： An apparatus (10) for producing high intensity radiation has electrodes (15,17) positioned within an elongated cylindrical arc chamber (12) across which an arc discharge can be established. Liquid is injected into the arc chamber to produce a vortex motion therein to form a cylindrical liquid wall adjacent to the chamber, which constricts the arc by cooling an outer periphery thereof. Gas is injected into the arc chamber to produce a vortex motion adjacent the cylindrical liquid wall. An exhaust structure actively exhausts the liquid and gas from the arc chamber to reduce turbulence and restriction of fluid. This permits attainment of higher flux densities in the arc, and/or extension of electrode life. Preferably, the liquid and gas are exhausted actively by means of an ejector pump which ejects pressurized liquid into the gas and liquid leaving the arc chamber. The ejector pump pressurizes the exhausted gas and liquid sufficiently to permit the gas to be separated and recycled back to the arc chamber, without requiring an additional compressor to increase gas pressure.
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公开(公告)号：EP0186879A3
公开(公告)日：1988-11-17
申请号：EP85116346
申请日：1985-12-20
摘要： A high intensity radiation source. A liquid vortex wall is formed on the inside surface of an arc chamber to restrict the diameter of an arc generated between electrodes. The liquid vortex wall is obtained by utilizing a vortex generating means which includes an annular restriction through which the liquid must pass prior to entering the arc chamber. The annular restriction is of a dimension sufficient to allow adequate pressure and velocity throughout the arc chamber and to reduce or eliminate flow irregularities which could be transmitted to the liquid wall in the arc chamber. A nozzle may provide for establishment of the required axial vortex flow motion of both the liquid and gas while the liquid and gas are physically separated prior to their entrance to the arc chamber. A discharge chamber adjacent the arc chamber is tapered smoothly to prevent flow disruptions and fin means on the electrode is provided to reduce gas and liquid flow in the opposite direction to that normally occurring in the arc chamber.
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公开(公告)号：EP0186879A2
公开(公告)日：1986-07-09
申请号：EP85116346.9
申请日：1985-12-20
摘要： A high intensity radiation source. A liquid vortex wall is formed on the inside surface of an arc chamber to restrict the diameter of an arc generated between electrodes. The liquid vortex wall is obtained by utilizing a vortex generating means which includes an annular restriction through which the liquid must pass prior to entering the arc chamber. The annular restriction is of a dimension sufficient to allow adequate pressure and velocity throughout the arc chamber and to reduce or eliminate flow irregularities which could be transmitted to the liquid wall in the arc chamber. A nozzle may provide for establishment of the required axial vortex flow motion of both the liquid and gas while the liquid and gas are physically separated prior to their entrance to the arc chamber. A discharge chamber adjacent the arc chamber is tapered smoothly to prevent flow disruptions and fin means on the electrode is provided to reduce gas and liquid flow in the opposite direction to that normally occurring in the arc chamber.
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