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    TWO-STAGE CHEMICAL MIXING SYSTEM
    1.
    发明公开
    TWO-STAGE CHEMICAL MIXING SYSTEM 失效
    ZWEISTUFIGE CHEMISCHE MISCHVORRICHTUNG

    公开(公告)号：EP0864123A4

    公开(公告)日：1999-01-20

    申请号：EP96939567

    申请日：1996-11-07

    申请人： APPLIED CHEMICAL SOLUTIONS

    发明人： FERRI EDWARD T JR ,  GEATZ J TOBIN ,  GREEN RANDALL L

    IPC分类号： B01F15/04 ,  G05D11/13 ,  G05D9/00

    CPC分类号： G05D11/138 ,  G05D11/133

    摘要： A chemical mixing system (10) for mixing ultra pure water (18) and concentrated HF (16) to a desired concentration within a qualification range. Batches of the mixed chemical are mixed in a relatively small mix vessel (12) and transferred to a relatively large mix drum (14). The concentration of the chemical within the mix drum is measured by a concentration monitor (56). If the measured concentration of the chemical in the mix drum is within the qualification range, the batches of chemical in the mix vessel are mixed to the desired concentration. If the measured concentration of the chemical in the mix drum is below the qualification range, the batches of chemical in the mix vessel are mixed to a high concentration which is greater than the desired concentration. If the measured concentration of the chemical in the mix drum is above the qualification range, the batches of chemical in the mix vessel are mixed to a low concentration which is less than the desired concentration. Batch averaging is thereby performed to maintain the concentration of chemical in the mix drum within the desired qualification range.

    摘要翻译： 用于将超纯水和浓缩HF混合至合格范围内所需浓度的化学混合系统。 将混合化学品的批料在相对小的混合容器中混合并转移到相对较大的混合鼓中。 通过浓度监测器测量混合鼓中化学品的浓度。 如果混合桶中化学品的测量浓度在合格范围内，则将混合容器中的化学品批次混合至所需浓度。 如果混合桶中化学品的测量浓度低于限定范围，则将混合容器中的化学品批次混合至高于所需浓度的高浓度。 如果混合鼓中化学品的测量浓度高于限定范围，则将混合容器中的化学品批次混合至低于所需浓度的低浓度。 从而进行批量平均，以将混合鼓中的化学品浓度保持在所需的限定范围内。