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    ACTUATION MECHANISM, OPTICAL APPARATUS, LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTURING DEVICES
    2.
    发明公开
    ACTUATION MECHANISM, OPTICAL APPARATUS, LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTURING DEVICES 审中-公开
    控制机制的光学设备，光刻设备和方法的设备生产

    公开(公告)号：EP2906994A1

    公开(公告)日：2015-08-19

    申请号：EP13770854.1

    申请日：2013-09-17

    申请人： ASML Netherlands B.V.

    发明人： VAN SCHOOT, Jan ,  HOL, Sven ,  BUIS, Edwin ,  REKKERS, Erik ,  DE VRIES, Gosse ,  BOTMA, Hako ,  VAN DAM, Marinus ,  VAN GORKOM, Ramon

    IPC分类号： G03F7/20 ,  G02B7/182 ,  G02B26/08

    摘要： An actuator to displace, for example a mirror, provides movement with at least two degrees of freedom by varying the currents in two electromagnets. A moving part includes a permanent magnet with a magnetic face constrained to move over a working area lying substantially in a first plane perpendicular to a direction of magnetization of the magnet. The electromagnets have pole faces lying substantially in a second plane closely parallel to the first plane, each pole face substantially filling a quadrant of the area traversed by the face of the moving magnet. An optical position sensor may direct a beam of radiation at the moving magnet through a central space between the electromagnets. The sizes of facets in a pupil mirror device may be made smaller in a peripheral region, but larger in a central region, thereby relaxing focusing requirements.

    摘要翻译： 的致动器以替换，对于实施例的反射镜，通过在两个电磁体不同的电流提供具有至少两个自由度的运动。 移动部分包括具有约束移动超过在第一基本上位于同一平面的工作区域的磁面的永久磁铁在垂直于磁体的磁化方向。 电磁铁具有极面在第二平面中基本上位于密切平行于所述第一平面中，每个极面基本上填充通过移动磁铁的面横穿的区域的一个象限。 光学位置传感器可以通过电磁体之间的中央空间直接在移动磁体的辐射束。 在光瞳反射镜装置刻面的尺寸可以在中央区域制成在外围区域中较小，但较大的，从而缓和聚焦的要求。

    LITHOGRAPHIC APPARATUS AND METHOD
    3.
    发明公开
    LITHOGRAPHIC APPARATUS AND METHOD 审中-公开
    平版印刷设备和方法

    公开(公告)号：EP2443514A1

    公开(公告)日：2012-04-25

    申请号：EP10722114.5

    申请日：2010-06-07

    申请人： ASML Netherlands B.V.

    发明人： VAN SCHOOT, Jan ,  DE VRIES, Gosse

    IPC分类号： G03F7/20

    CPC分类号： G03F7/702 ,  G03F7/70075 ,  G03F7/70116

    摘要： An illumination system having a plurality of reflective elements, the reflective elements being movable between different orientations which direct radiation towards different locations in a pupil plane, thereby forming different illumination modes, is described. Each reflective element is moveable to a first orientation in which it directs radiation to a location in an inner illumination location group, to a second orientation in which it directs radiation to a location in an intermediate illumination location group, and to a third orientation in which it directs radiation to a location in an outer illumination location group. The reflective elements are configured to be oriented such that they can direct equal amounts of radiation towards the inner, intermediate and outer illumination location groups, and are configured to be oriented such that they can direct substantially no radiation into the outer illumination location group and direct substantially equal amounts of radiation towards the inner and intermediate illumination location groups.