公开(公告)号：EP3867702A1

公开(公告)日：2021-08-25

申请号：EP19783476.5

申请日：2019-10-02

申请人： ASML Netherlands B.V.

发明人： VAN ZWOL, Pieter-Jan ,  BALTUSSEN, Sander ,  DE GRAAF, Dennis ,  FRANKEN, Johannes Christiaan Leonardus ,  GIESBERS, Adrianus Johannes Maria ,  KLEIN, Alexander Ludwig ,  KLOOTWIJK, Johan Hendrik ,  KNAPEN, Peter Simon Antonius ,  KURGANOVA, Evgenia ,  KUZNETSOV, Alexey Sergeevich ,  NOTENBOOM, Arnoud Willem ,  VALEFI, Mahdiar ,  VAN DE KERKHOF, Marcus Adrianus ,  VAN DEN EINDEN, Wilhelmus Theodorus Anthonius Johannes ,  VAN DER WOORD, Ties Wouter ,  WONDERGEM, Hendrikus Jan ,  ZDRAVKOV, Aleksandar Nikolov

IPC分类号： G03F1/00 ,  G03F1/62 ,  G03F1/64 ,  G03F7/20

公开(公告)号：EP3391151A1

公开(公告)日：2018-10-24

申请号：EP16805433.6

申请日：2016-12-02

申请人： ASML Netherlands B.V.

发明人： JANSSEN, Paul ,  KLOOTWIJK, Johan Hendrik ,  VAN DEN EINDEN, Wilhelmus Theodorus Anthonius Johannes ,  ZDRAVKOV, Alexandar Nikolov

IPC分类号： G03F7/20 ,  G03F1/62 ,  G03F1/64

CPC分类号： G03F7/70983 ,  G03F1/62 ,  G03F1/64 ,  G03F7/70033 ,  G03F7/70916

摘要： Methods of manufacturing a membrane assembly are disclosed. In one arrangement, a stack comprises a planar substrate and at least one membrane layer. The planar substrate comprises an inner region, a border region around the inner region, a bridge region around the border region and an edge region around the bridge region. The inner region and a first portion of the bridge region are selectively removed. The membrane assembly after removal comprises: a membrane formed from the at least one membrane layer, a border holding the membrane, the border formed from the border region of the planar substrate, an edge section around the border, the edge section formed from the edge region of the planar substrate, a bridge between the border and the edge section, the bridge formed from the at least one membrane layer and a second portion of the bridge region of the planar substrate. The method further comprises separating the edge section from the border by cutting or breaking the bridge.

公开(公告)号：EP3365730A2

公开(公告)日：2018-08-29

申请号：EP16788043.4

申请日：2016-10-11

申请人： ASML Netherlands B.V.

发明人： PÉTER, Mária ,  ABEGG, Erik Achilles ,  GIESBERS, Adrianus Johannes Maria ,  KLOOTWIJK, Johan Hendrik ,  NASALEVICH, Maxim Aleksandrovich ,  VAN DEN EINDEN, Wilhelmus Theodorus Anthonius Johannes ,  VAN DER ZANDE, Willem Joan ,  VAN ZWOL, Pieter-Jan ,  VERMEULEN, Johannes Petrus Martinus Bernardus ,  VLES, David, Ferdinand ,  VOORTHUIJZEN, Willem-Pieter

IPC分类号： G03F7/20 ,  B01D67/00 ,  G03F1/62 ,  G21K1/06

CPC分类号： G03F7/70958 ,  G03F1/62 ,  G03F7/70983 ,  G21K2201/067

摘要： Methods of manufacturing a pellicle for a lithographic apparatus are disclosed. In one arrangement the method comprises depositing at least one graphene layer on a planar surface of a substrate. The substrate comprises a first substrate portion and a second substrate portion. The method further comprises removing the first substrate portion to form a freestanding membrane from the at least one graphene layer. The freestanding membrane is supported by the second substrate portion.