公开(公告)号：EP1913450A4

公开(公告)日：2010-03-31

申请号：EP06760684

申请日：2006-06-05

申请人： BROOKS AUTOMATION INC

发明人： HOSEK MARTIN ,  BEALE STUART ,  BOTEV ROUMEN ,  COADY MATTHEW ,  HOFMEISER CHRISTOPHER ,  IVES MARK ,  MOURA JAIRO ,  CAVENEY ROBERT

IPC分类号： G05B19/418

CPC分类号： G05B19/4185 ,  G05B19/4148 ,  G05B2219/31207 ,  G05B2219/33277 ,  Y02P90/18

公开(公告)号：EP1904893A4

公开(公告)日：2009-08-19

申请号：EP06786953

申请日：2006-07-11

申请人： BROOKS AUTOMATION INC

发明人： HOFMEISER CHRISTOPHER ,  HOSEK MARTIN ,  BEALE STUART

IPC分类号： H01L21/00 ,  B25J9/16 ,  H01L21/677 ,  H01L21/68 ,  H01L21/687

CPC分类号： H01L21/681 ,  H01L21/67259 ,  H01L21/68 ,  H01L21/68707

摘要： A substrate processing apparatus is provided with a substrate transport apparatus. The transport apparatus is used for automating alignment of the processing apparatus. In one aspect, a through-beam sensor on the transport apparatus is used to level parts of the processing apparatus. In another aspect, a through-beam sensor on the transport apparatus is used to determine the locations and angular orientations of substrate stations within a plane. In another aspect, the transport apparatus teaches itself the accurate location of a substrate aligner by repeatedly placing the substrate on the aligner, recording positional data, constructing a cost function, and determining the location of the aligner by minimizing the cost function using a numerical technique.