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    ROBOTIC MANIPULATORS BASED ON PRE-DEFINED TIME-OPTIMUM TRAJECTORY SHAPE
    1.
    发明公开
    ROBOTIC MANIPULATORS BASED ON PRE-DEFINED TIME-OPTIMUM TRAJECTORY SHAPE 审中-公开
    Robotor机械臂它用特殊时间之前最优轨道形态将被执行

    公开(公告)号：EP1232464A4

    公开(公告)日：2007-12-26

    申请号：EP00932457

    申请日：2000-05-15

    申请人： BROOKS AUTOMATION INC

    发明人： HOSEK MARTIN ,  ELMALI HAKAN

    IPC分类号： B25J9/10 ,  B25J9/16 ,  B25J9/18 ,  G06F17/13 ,  G06F19/00

    CPC分类号： B25J9/1664 ,  G05B2219/40395 ,  G05B2219/40454 ,  G05B2219/40519 ,  Y10S414/135 ,  Y10S414/136 ,  Y10S414/137

    摘要： A system for providing the reliable and numerically efficient generation of time-optimum trajectories with easy-to-track or continuous acceleration profiles for simple and blended moves of single and multi-arm robotic manipulators, such as an extension and retraction move along a straight line or a rotary move following a circular arc, with velocity, acceleration, jerk, and jerk rate constraints, wherein the generic trajectory for shape for moves along a straight line for a single-arm robot between points (2 and 3) in the figure. A time-optimum trajectory is the set of the position, velocity and acceleration profiles which describe the move of selected end effector along a given path in the shortest time possible without violating given constraints, with a special case being an optimum abort trajectory, which brings the moving arm into complete rest in the shortest time. The system also involves the blending of simple moves into a single trajectory by decomposing trajectories of the individual moves into their orthogonal components and overlapping them for a given time interval, which results in a non-stop move along as mooth transfer path.

    OBSERVER-CORRECTOR CONTROL SYSTEM FOR SYSTEMS WITH UNMODELED DYNAMICS
    4.
    发明公开
    OBSERVER-CORRECTOR CONTROL SYSTEM FOR SYSTEMS WITH UNMODELED DYNAMICS 有权
    观察校正控制系统与非MODELIERIENDYNAMISHE EIGENSHAFFEN系统

    公开(公告)号：EP1319201A4

    公开(公告)日：2004-12-29

    申请号：EP01954890

    申请日：2001-07-23

    申请人： BROOKS AUTOMATION INC

    发明人： HOSEK MARTIN ,  MOURA JAIRO TERRA ,  ELMALI HAKAN

    IPC分类号： G05B13/02

    CPC分类号： G05B13/021

    摘要： A system (10) having a state observer (16) and a corrector filter(18), wherein the system is used for extracting a signal component from an output signal of a dynamic system (12). The state observer is adapted to track a signal component that represents dominant dynamics in the output signal of the dynamic system and provide an estimation signal representing an estimated signal component in the output signal of the dynamic system. The corrector filter is adapted to compensate for a mismatch between the estimation signal and the actual signal component that represents the dominant dynamics in the output signal. A combination of the estimation signal with an output signal of the corrector filter can provide a synthesized signal including the signal component that represents the dominant dynamics in the output signal.

    HIGH SPEED SUBSTRATE ALIGNER APPARATUS
    5.
    发明公开
    HIGH SPEED SUBSTRATE ALIGNER APPARATUS 审中-公开
    高速设备FOR衬底对准

    公开(公告)号：EP1902460A4

    公开(公告)日：2010-12-29

    申请号：EP06786787

    申请日：2006-07-07

    申请人： BROOKS AUTOMATION INC

    发明人： MAURA JAIRO T ,  HOSEK MARTIN ,  BOTTOMLEY TODD ,  GILCHRIST ULYSSES

    IPC分类号： H01L21/00 ,  H01L21/68

    CPC分类号： H01L21/681 ,  H01L21/67748 ,  H01L21/68 ,  H01L21/682 ,  H01L21/68707 ,  H01L21/68728 ,  H01L21/68785 ,  H01L21/68792

    摘要： A substrate aligner providing minimal substrate transporter extend and retract motions to quickly align substrate without back side damage while increasing the throughput of substrate processing. In one embodiment, the aligner having an inverted chuck connected to a frame with a substrate transfer system capable of transferring substrate from chuck to transporter without rotationally repositioning substrate. The inverted chuck eliminates aligner obstruction of substrate fiducials and along with the transfer system, allows transporter to remain within the frame during alignment. In another embodiment, the aligner has a rotatable sensor head connected to a frame and a substrate support with transparent rest pads for supporting the substrate during alignment so transporter can remain within the frame during alignment. Substrate alignment is performed independent of fiducial placement on support pads. In other embodiments the substrate support employs a buffer system for buffering substrate inside the apparatus allowing for fast swapping of substrates.

    SUBSTRATE TRANSPORT APPARATUS WITH AUTOMATED ALIGNMENT
    7.
    发明公开
    SUBSTRATE TRANSPORT APPARATUS WITH AUTOMATED ALIGNMENT 有权
    具有自动校准基片运输

    公开(公告)号：EP1904893A4

    公开(公告)日：2009-08-19

    申请号：EP06786953

    申请日：2006-07-11

    申请人： BROOKS AUTOMATION INC

    发明人： HOFMEISER CHRISTOPHER ,  HOSEK MARTIN ,  BEALE STUART

    IPC分类号： H01L21/00 ,  B25J9/16 ,  H01L21/677 ,  H01L21/68 ,  H01L21/687

    CPC分类号： H01L21/681 ,  H01L21/67259 ,  H01L21/68 ,  H01L21/68707

    摘要： A substrate processing apparatus is provided with a substrate transport apparatus. The transport apparatus is used for automating alignment of the processing apparatus. In one aspect, a through-beam sensor on the transport apparatus is used to level parts of the processing apparatus. In another aspect, a through-beam sensor on the transport apparatus is used to determine the locations and angular orientations of substrate stations within a plane. In another aspect, the transport apparatus teaches itself the accurate location of a substrate aligner by repeatedly placing the substrate on the aligner, recording positional data, constructing a cost function, and determining the location of the aligner by minimizing the cost function using a numerical technique.