-
公开(公告)号:EP1846249A2
公开(公告)日:2007-10-24
申请号:EP06717793.1
申请日:2006-01-10
发明人: XU, Juntao , MOSHER, Curtis , LYNCH, Michael
CPC分类号: H01L23/544 , B01J2219/00527 , B01J2219/00536 , B01J2219/00542 , B01J2219/00554 , B01J2219/0056 , B01J2219/00563 , B01L3/5085 , B01L9/50 , B01L2300/0819 , B82Y30/00 , H01L2924/0002 , H01L2924/09701 , H01L2924/00
摘要: The present invention provides an indexed support substrate. The support substrate comprises at least one set of indexing features that are distinguishable from one another and from the surrounding substrate. The support substrate also comprises a set of useful domains. The indexing features are positioned on the substrate in such a way as to correspond to the useful domains in an identifying fashion.