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公开(公告)号:EP1748846A2
公开(公告)日:2007-02-07
申请号:EP05779157.6
申请日:2005-04-29
发明人: HENDERSON, Eric, R. , XU, Juntao , LYNCH, Michael, P. , MOSHER, Curtis, L. , HUFF, Janice, Lillian , NETTIKADAN, Saju, Rappai
CPC分类号: B01L3/0244 , B01J2219/00387 , B01J2219/00659 , B01L3/0248 , B01L2200/12 , B01L2200/143 , B01L2300/0816 , B01L2300/0838 , B01L2300/10 , B01L2400/02 , B01L2400/0406
摘要: Some embodiments of the present invention provide an apparatus and method in which material is deposited upon a surface from an elongated beam (102) having an aperture (104) defined therein through which the material is moved by passive adsorption. The elongated beam can be substantially planar along substantially its entire length, can be oriented at an acute angle with respect to the surface during deposition processes, and can have a length no greater than about 2mm. In some embodiments, the aperture can be elongated, can extend from a material reservoir (106) to a location short of the terminal end of the elongated beam or through the terminal end of the elongated beam, and can have a portion extending through the thickness of the elongated beam.
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公开(公告)号:EP1748846B1
公开(公告)日:2015-04-01
申请号:EP05779157.6
申请日:2005-04-29
发明人: HENDERSON, Eric, R. , XU, Juntao , LYNCH, Michael, P. , MOSHER, Curtis, L. , HUFF, Janice, Lillian , NETTIKADAN, Saju, Rappai
CPC分类号: B01L3/0244 , B01J2219/00387 , B01J2219/00659 , B01L3/0248 , B01L2200/12 , B01L2200/143 , B01L2300/0816 , B01L2300/0838 , B01L2300/10 , B01L2400/02 , B01L2400/0406
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公开(公告)号:EP1846249A2
公开(公告)日:2007-10-24
申请号:EP06717793.1
申请日:2006-01-10
发明人: XU, Juntao , MOSHER, Curtis , LYNCH, Michael
CPC分类号: H01L23/544 , B01J2219/00527 , B01J2219/00536 , B01J2219/00542 , B01J2219/00554 , B01J2219/0056 , B01J2219/00563 , B01L3/5085 , B01L9/50 , B01L2300/0819 , B82Y30/00 , H01L2924/0002 , H01L2924/09701 , H01L2924/00
摘要: The present invention provides an indexed support substrate. The support substrate comprises at least one set of indexing features that are distinguishable from one another and from the surrounding substrate. The support substrate also comprises a set of useful domains. The indexing features are positioned on the substrate in such a way as to correspond to the useful domains in an identifying fashion.
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