-
公开(公告)号：EP1418468A3
公开(公告)日：2004-08-04
申请号：EP03025300.9
申请日：2003-11-06
CPC分类号： G03F7/70233 , G02B17/0657
摘要： A catoptric projection optical system for projecting a reduced size of a pattern on an object plane onto an image plane includes first, second, third and fourth mirrors from the image plane along an optical path, wherein the third and fourth mirrors are located between the first mirror and second mirror.
-
2.发明公开Projection optical system, projection type image display apparatus, and image display system 审中-公开投影光学系统，投影型图像显示装置和图像显示系统
公开(公告)号：EP1387207A2
公开(公告)日：2004-02-04
申请号：EP03254754.9
申请日：2003-07-29
IPC分类号： G02B27/18
CPC分类号： G02B17/0852 , G02B17/0848 , G03B21/10 , G03B21/28
摘要： A projection optical system which can project a bright image with less distortion and a small projection distance without causing aberration or an increase in size of reflective surfaces is disclosed. The projection optical system projects luminous flux from an original image onto a projection surface which is oblique to a central principal ray which is a principal ray of luminous flux traveling from the center of the original image to the center of a projected image. The projection optical system comprises a refractive optical system which includes a plurality of refractive optical elements through which the luminous flux from the original image passes through, and a reflective optical system which includes a plurality of reflective surfaces each having an optical power and guides the luminous flux emerging from the refractive optical system to the projection surface.
摘要翻译： 公开了一种投影光学系统，其能够在不引起像差或反射表面的尺寸增大的情况下投射具有较小失真和较小投影距离的亮图像。 投影光学系统将来自原始图像的光通量投射到投射表面，该投射表面相对于作为从原始图像的中心行进到投影图像的中心的光通量的主光线的中央主光线倾斜。 投影光学系统包括折射光学系统和反射光学系统，所述折射光学系统包括多个折射光学元件，来自原始图像的光通量穿过所述折射光学元件，所述反射光学系统包括多个反射表面，每个反射表面具有光焦度并且引导发光 从折射光学系统出射到投影表面的光通量。
-
3.发明公开Optical system and optical apparatus having the same 审中-公开Optisches System und dieses aufweisendes optischesGerät
公开(公告)号：EP0989433A2
公开(公告)日：2000-03-29
申请号：EP99118557.0
申请日：1999-09-20
CPC分类号： G02B17/086 , G02B15/14 , G02B17/0848 , G02B17/0896
摘要： This specification discloses an optical system provided with a first optical part disposed most adjacent to the object side, the optical part having three or more optical surfaces, of which at least one is a reflecting surface, and an aperture stop disposed more adjacent to the image side than the first optical part, wherein when the spacing from the first optical surface to the third optical surface as counted from the object side of the first optical part is defined as D and the spacing from the first optical surface to the entrance pupil at an azimuth ξ degrees is defined as X(ξ), the following condition is satisfied: (X(0) + X(90))/2 The specification also discloses an optical apparatus provided with such optical system.
摘要翻译： 本说明书公开了一种光学系统，其具有设置在物体侧最邻近的第一光学部件，光学部件具有三个或更多个光学表面，其中至少一个是反射表面，并且孔径光阑设置成更靠近图像 其中当从第一光学部件的物体侧开始计数从第一光学表面到第三光学表面的间隔被定义为D时，以及在第一光学表面到第三光学表面的距离从第一光学表面到入射光瞳的间隔 方位xi度被定义为X（xi），满足以下条件：该规范还公开了一种具有这种光学系统的光学装置。
-
公开(公告)号：EP1584964A2
公开(公告)日：2005-10-12
申请号：EP05251879.2
申请日：2005-03-24
发明人： Sunaga, Toshihiro
CPC分类号： G02B17/086 , G02B17/0832 , G02B17/0848
摘要： Provided is an optical element that is compact, capable of securing an optical path length, and allows an improvement in manufacturing precision without inviting cost increases. An optical element of the present invention includes a transparent member having a first refracting surface, a second refracting surface, and a plurality of reflecting surfaces. The transparent member is capable of causing light, which enters the transparent member from the first refracting surface, to be reflected by the plurality of reflecting surfaces and guided to the second refracting surface. An optical path from the first refracting surface leading to the second refracting surface crosses itself inside the transparent member when seen from a direction that is substantially perpendicular to both incident light on the first refracting surface and light exiting from the second refracting surface. The transparent member is capable of guiding the incident light from the first refracting surface to the second refracting surface while reflecting the incident light alternately by at least one first reflecting surface and at least one second reflecting surface, the at least one first reflecting surface being at least one reflecting surface of the plurality of reflecting surfaces which is disposed within a first region, the at least one second reflecting surface being at least one reflecting surface of the plurality of reflecting, surfaces which is disposed within a second region, the first region and the second region being regions on one and the other sides, respectively, of a first plane passing through the transparent member which is taken as a boundary.
摘要翻译： 提供一种紧凑的光学元件，其能够确保光路长度，并且能够在不增加成本的情况下提高制造精度。 本发明的光学元件包括具有第一折射表面，第二折射表面和多个反射表面的透明构件。 透明构件能够使从第一折射表面进入透明构件的光被多个反射表面反射并被引导至第二折射表面。 当从基本上垂直于第一折射表面上的入射光和从第二折射表面出射的光的方向看时，从第一折射表面通向第二折射表面的光路在透明构件内部交叉。 透明构件能够将来自第一折射表面的入射光引导至第二折射表面，同时通过至少一个第一反射表面和至少一个第二反射表面交替地反射入射光，所述至少一个第一反射表面处于 所述多个反射面中的至少一个反射面设置在第一区域内，所述至少一个第二反射面是所述多个反射面中的至少一个反射面，所述反射面设置在第二区域内，所述第一区域和 第二区域分别是以穿过透明构件的第一平面的一侧和另一侧作为边界的区域。
-
5.发明公开Catoptric projection optical system and exposure apparatus 审中-公开Katoptrisches Projektionssystem und Belichtungsvorrichtung
公开(公告)号：EP1450196A1
公开(公告)日：2004-08-25
申请号：EP04250867.1
申请日：2004-02-18
CPC分类号： G03F7/70233 , G02B17/0657 , G03F7/70275
摘要： A catoptric projection optical system that projects a reduced size of a pattern on an object surface onto an image surface and for serving as an imaging system that forms an intermediate image between the object surface and image surface, and includes six or more mirrors, wherein a position of an exit pupil with respect to the intermediate image is located between the object surface and image surface, and wherein the largest angle between principal rays and an optical axis for angles of view at the position of the exit pupil is sin -1 NA or smaller, where NA is a numerical aperture at the side of the image surface.
摘要翻译： 一种投影光学系统，其将物体表面上的图案的尺寸减小到图像表面上，并且用作在物体表面和图像表面之间形成中间图像的成像系统，并且包括六个或更多个反射镜，其中 出射光瞳相对于中间图像的位置位于物体表面和图像表面之间，并且其中主光线和出射光瞳位置处的视角的光轴之间的最大角度为sin < NA或更小，其中NA是图像表面侧面的数值孔径。
-
公开(公告)号：EP0989433A3
公开(公告)日：2000-05-31
申请号：EP99118557.0
申请日：1999-09-20
CPC分类号： G02B17/086 , G02B15/14 , G02B17/0848 , G02B17/0896
摘要： This specification discloses an optical system provided with a first optical part (B1) disposed most adjacent to the object side, the optical part (B1) having three or more optical surfaces, of which at least one is a reflecting surface, and an aperture stop (R14) disposed more adjacent to the image side than the first optical part (B1), wherein when the spacing from the first optical surface (R1) to the third optical surface (R3) as counted from the object side of the first optical part (B1) is defined as D and the spacing from the first optical surface (R1) to the entrance pupil at an azimuth ξ degrees is defined as X(ξ), the following condition is satisfied:(X(0) + X(90))/2 The specification also discloses an optical apparatus provided with such optical system.
-
公开(公告)号：EP1291681B1
公开(公告)日：2005-12-21
申请号：EP02256065.0
申请日：2002-09-02
发明人： Sunaga, Toshihiro
CPC分类号： G02B17/0852 , G02B17/0663 , G02B17/0848 , H04N5/74 , H04N9/3129
-
公开(公告)号：EP1450209A1
公开(公告)日：2004-08-25
申请号：EP04250866.3
申请日：2004-02-18
CPC分类号： G03F7/70233 , G02B17/0657
摘要： A catoptric projection optical system for projecting a pattern on an object surface onto an image surface includes plural mirrors, wherein a second mirror from the image surface through the optical path receives convergent pencil of rays, and has a paraxial magnification of -0.14 or smaller.
摘要翻译： 用于将物体表面上的图案投影到图像表面上的反射投影光学系统包括多个反射镜，其中来自图像表面的通过光路的第二反射镜接收会聚的光线，并且具有-0.14或更小的近轴倍率。
-
9.发明公开Projection optical system and exposure apparatus 审中-公开Optisches Projektionssystem und Belichtungsapparat
公开(公告)号：EP1418468A2
公开(公告)日：2004-05-12
申请号：EP03025300.9
申请日：2003-11-06
CPC分类号： G03F7/70233 , G02B17/0657
摘要： A catoptric projection optical system for projecting a reduced size of a pattern on an object plane onto an image plane includes first, second, third and fourth mirrors from the image plane along an optical path, wherein the third and fourth mirrors are located between the first mirror and second mirror.
摘要翻译： 用于将物体平面上的图案的尺寸减小到图像平面上的反射投影光学系统包括沿着光路从图像平面的第一，第二，第三和第四反射镜，其中第三和第四反射镜位于第一 镜子和第二个镜子。
-
10.发明公开Projection optical system and projection type displaying apparatus using the same 有权使用该投影光学系统和投影型显示装置
公开(公告)号：EP1139145A3
公开(公告)日：2004-03-10
申请号：EP01302180.3
申请日：2001-03-09
发明人： Sunaga, Toshihiro
CPC分类号： G02B17/0663 , H04N5/74 , H04N5/7408
摘要： With a view to provide a projection optical system using an oblique projection method which contrives the downsizing of an apparatus and yet secures a ratio of quantity of marginal light and which is high in the enlarging rate, and a projection type displaying apparatus using the same, a projection optical system for guiding a beam from an image display panel onto a screen surface inclined relative to a reference axis, and forming image information on the screen surface has a reflecting optical system which has a plurality of rotation-asymmetrical reflecting surfaces having curvatures, and in which the beam from the image display panel is reflected by the plurality of rotation-asymmetrical reflecting surfaces and is guided onto the screen surface, and a stop is provided between the plurality of rotation-asymmetrical reflecting surfaces of the reflecting optical system or between the reflecting optical system and the image display panel, and the stop is set so as to be imaged at a negative magnification by an optical member disposed more adjacent to the screen than the stop position.
-
-
-
-
-
-
-
-
-
搜索结果
28 条记录 (耗时 0.012 秒)
