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    Excimer laser oscillation apparatus and method, excimer laser exposure apparatus, and laser tube
    1.
    发明公开
    Excimer laser oscillation apparatus and method, excimer laser exposure apparatus, and laser tube 失效
    准分子激光振荡装置和方法，准分子激光曝光装置和激光管

    公开(公告)号：EP0820132A2

    公开(公告)日：1998-01-21

    申请号：EP97305404.2

    申请日：1997-07-18

    申请人： CANON KABUSHIKI KAISHA ,  Ohmi, Tadahiro

    发明人： Ohmi, Tadahiro ,  Tanaka, Nobuyoshi, c/o Canon Kabushiki Kaisha ,  Hirayama, Masaki

    IPC分类号： H01S3/0975 ,  H01S3/225 ,  H01S3/08

    CPC分类号： H01S3/0975 ,  H01S3/08 ,  H01S3/225

    摘要： This invention relates to an excimer laser oscillation apparatus which has a laser chamber (20) which stores a laser gas containing a gas mixture of at least one inert gas selected from the group consisting of Kr, Ar, and Ne, and F 2 gas, and in which an inner surface thereof has a reflection-free surface (3) with respect to light of a desired wavelength of 248 nm, 193 nm, or 157 nm, and the uppermost surface of the inner surface consists of a fluoride, an optical resonator which is made up of a pair of reflection mirrors (5,6) arranged to sandwich the laser chamber (20) therebetween, and in which the reflectance of the reflection mirror (6) on the output side is 90% or more and microwave introduction means (300,303,302), arranged on the laser chamber (20), for continuously exciting the laser gas in the laser chamber (20).

    摘要翻译： 准分子激光振荡装置本发明涉及一种准分子激光振荡装置，其具有存储包含选自Kr，Ar和Ne以及F 2气体中的至少一种惰性气体的气体混合物的激光气体的激光室（20），以及 其中内表面相对于所需波长为248nm，193nm或157nm的光具有无反射表面（3），并且内表面的最上表面由氟化物，光学谐振器 其由一对反射镜（5,6）构成，该反射镜（5,6）布置成将激光室（20）夹在其间，并且其中输出侧上的反射镜（6）的反射率为90％或更高，并且引入微波 装置（300,303,302）布置在激光室（20）上，用于连续激励激光室（20）中的激光气体。

    Contact type image sensor
    5.
    发明公开
    Contact type image sensor 失效
    接触式图像传感器

    公开(公告)号：EP0596715A1

    公开(公告)日：1994-05-11

    申请号：EP93308776.9

    申请日：1993-11-03

    申请人： CANON KABUSHIKI KAISHA

    发明人： Tabata, Masami, c/o Canon Kabushiki Kaisha ,  Kaihotsu, Takahiro, c/o Canon Kabushiki Kaisha ,  Tanaka, Nobuyoshi, c/o Canon Kabushiki Kaisha

    IPC分类号： H04N1/028

    CPC分类号： H04N1/0312 ,  H04N1/0315 ,  H04N1/0318 ,  H04N2201/03112 ,  H04N2201/0312 ,  H04N2201/03129 ,  H04N2201/03133 ,  H04N2201/03141 ,  H04N2201/03145 ,  H04N2201/03175

    摘要： A contact type image sensor comprises: a light source 3 to emit a light with a predetermined inclination angle for the direction of the normal line of the surface of an original at the position of a read line 9 in order to irradiate the light from both sides to the read line by one light source; an original supporting member 6 to support the original in order to lead the light from the light source 3 to the read line 9; and a photoelectric converting device section 5 to receive the light from the original surface. At least a part of the original supporting member 6 locating on the side opposite to the arrangement side of the light source 3 with respect to the read line 9 has a reflecting surface for reflecting a part of the light from the light source 3 and leading to the read line 9.

    摘要翻译： 一种接触式图像传感器包括：光源3，用于在读取线9的位置处以原始表面的法线方向发射具有预定倾斜角的光，以便从两侧照射光 通过一个光源到读取线; 支撑原件以便将来自光源3的光引导到读取线9的原稿支撑构件6; 以及接收来自原稿表面的光的光电转换装置部分5。 位于读取线9的与光源3的配置侧相反的一侧的原稿支承部件6的至少一部分具有反射面，该反射面用于反射来自光源3的光的一部分， 读取线9。

    Excimer laser oscillation apparatus and method, excimer laser exposure apparatus, and laser tube
    7.
    发明公开
    Excimer laser oscillation apparatus and method, excimer laser exposure apparatus, and laser tube 失效
    准分子激光器振荡设备和方法，受激准分子激光曝光设备和激光管

    公开(公告)号：EP0820132A3

    公开(公告)日：1998-04-08

    申请号：EP97305404.2

    申请日：1997-07-18

    申请人： CANON KABUSHIKI KAISHA ,  Ohmi, Tadahiro

    发明人： Ohmi, Tadahiro ,  Tanaka, Nobuyoshi, c/o Canon Kabushiki Kaisha ,  Hirayama, Masaki

    IPC分类号： H01S3/0975 ,  H01S3/225 ,  H01S3/08

    CPC分类号： H01S3/0975 ,  H01S3/08 ,  H01S3/225

    摘要： This invention relates to an excimer laser oscillation apparatus which has a laser chamber (20) which stores a laser gas containing a gas mixture of at least one inert gas selected from the group consisting of Kr, Ar, and Ne, and F 2 gas, and in which an inner surface thereof has a reflection-free surface (3) with respect to light of a desired wavelength of 248 nm, 193 nm, or 157 nm, and the uppermost surface of the inner surface consists of a fluoride, an optical resonator which is made up of a pair of reflection mirrors (5,6) arranged to sandwich the laser chamber (20) therebetween, and in which the reflectance of the reflection mirror (6) on the output side is 90% or more and microwave introduction means (300,303,302), arranged on the laser chamber (20), for continuously exciting the laser gas in the laser chamber (20).