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    LASER OUTPUT LIGHT PULSE STRETCHER
    1.
    发明公开
    LASER OUTPUT LIGHT PULSE STRETCHER 有权
    激光输出光脉冲STRAIGHTENER

    公开(公告)号：EP1692750A4

    公开(公告)日：2007-07-11

    申请号：EP04800552

    申请日：2004-11-01

    申请人： CYMER INC

    发明人： SMITH SCOT T ,  ERSHOV ALEXANDER I ,  LUKASHEV ALEXEI

    IPC分类号： H01S3/223 ,  H01S3/00 ,  H01S3/225

    CPC分类号： G03F7/7055 ,  H01S3/0057 ,  H01S3/225

    摘要： An apparatus and method for providing a high peak power short pulse duration gas discharge laser comprising a pulse stretcher which may comprise a laser output pulse optical delay initiating optic diverting a portion of the output laser pulse into an optical delay having an optical delay path and comprising; a plurality of confocal resonators in series aligned to deliver an output of the optical delay to the laser output pulse optical delay initiating optic. The plurality of confocal resonators comprises four confocal resonators may comprise a first spherical having a radius of curvature a second concave spherical mirror having the same radius of curvature and separated from the first concave spherical mirror by the radius of curvature and receiving the first reflected beam at a first point on a face of the second concave spherical mirror and generating a second reflected beam incident on a second point on the face of the first concave spherical mirror, the second reflected beam being reflected by the first concave spherical mirror from the second point on the first mirror to form an output beam from the first confocal resonator cell; and, a second confocal resonator cell receiving the output beam of the first confocal resonator cell as an input beam of the second confocal resonator cell. The apparatus and method may comprise a plurality, e.g., two pulse stretchers in series and may include spatial coherency metrology.