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8 条记录 (耗时 0.011 秒)

    DEVICE AND METHOD FOR FILTERING MULTIPLE PULSE SIGNALS
    3.
    发明公开
    DEVICE AND METHOD FOR FILTERING MULTIPLE PULSE SIGNALS 审中-公开

    公开(公告)号：EP3771100A1

    公开(公告)日：2021-01-27

    申请号：EP19187829.7

    申请日：2019-07-23

    申请人： Comet AG

    发明人： vor dem Brocke, Manuel ,  Schlierf, Roland

    IPC分类号： H03K5/1534

    摘要： The invention relates to a filter unit for filtering multiple pulse signals comprising a number of filter circuits, which are connected in parallel. Each filter circuit comprises an input and an output, wherein the input is configured to receive an amplitude of an input signal and the output is configured to activate an output signal. Each filter circuit has an allocated filter level and further comprises a pulse level detection circuit configured to detect a change of state of a pulse level of the input signal. The change of state comprises a transition from a first pulse level to a second pulse level and if the pulse level corresponds to the allocated filter level of the filter circuit the output of said filter circuit is activated.

    A METHOD FOR IMPROVING DIGITAL SIGNAL PROCESSING IN A RADIO-FREQUENCY SYSTEM
    4.
    发明公开
    A METHOD FOR IMPROVING DIGITAL SIGNAL PROCESSING IN A RADIO-FREQUENCY SYSTEM 审中-公开

    公开(公告)号：EP4113352A1

    公开(公告)日：2023-01-04

    申请号：EP21183476.7

    申请日：2021-07-02

    申请人： Comet AG

    发明人： Schwerg, Nikolai ,  Schlierf, Roland ,  Grede, André ,  Gruner, Daniel ,  Labanc, Anton ,  Fink, Thomas ,  vor dem Brocke, Manuel

    IPC分类号： G06F30/34 ,  G06F30/36

    摘要： The invention relates to a method for improving digital signal processing in a radio-frequency system (1), in particular a radio-frequency power delivery system (1), comprising:
    - Providing (101) at least one input signal (210), preferably related to a radio-frequency signal of the radio-frequency system (1),
    - Performing (102) a processing procedure (310) wherein the at least one input signal (210) is repeatedly processed by a programmable circuit (10) using at least one configurable parameter of the processing, wherein a configuration of the at least one parameter is varied for each processing of the at least one input signal (210) to obtain respective processing results (220),
    - Determining (103) at least one parameter result (240) for an optimization of the configuration based on the processing results (220),
    - Providing (104) the at least one determined parameter result for the improved digital signal processing.

    METHOD FOR MACHINE LEARNING A DETECTION OF AT LEAST ONE IRREGULARITY IN A PLASMA SYSTEM
    6.
    发明公开
    METHOD FOR MACHINE LEARNING A DETECTION OF AT LEAST ONE IRREGULARITY IN A PLASMA SYSTEM 审中-公开

    公开(公告)号：EP4242904A2

    公开(公告)日：2023-09-13

    申请号：EP23184108.1

    申请日：2021-10-06

    申请人： Comet AG

    发明人： vor dem Brocke, Manuel ,  Schlierf, Roland ,  Grede, André ,  Gruner, Daniel ,  Schwerg, Nikolai ,  Labanc, Anton ,  Fink, Thomas

    IPC分类号： G06F30/36

    摘要： The invention relates to a method for machine learning a detection of at least one irregularity in a plasma system, particularly an RF powered plasma processing system, comprising:
    - Providing at least one input signal (210) each related to an analog signal of a power delivery system (1) for the plasma system and/or to another characteristic of the power delivery system (1) and/or of the plasma system, the at least one input signal (210) having at least one irregularity feature indicative of the irregularity in the plasma system,
    - Performing a machine learning procedure (310) wherein the at least one input signal (210) having the at least one irregularity feature is processed by a programmable circuit (10) to train the detection of the irregularity in the plasma system.

    CONTROL UNIT, RADIO FREQUENCY POWER GENERATOR, AND METHOD FOR GENERATING SYNCHRONIZED RADIO FREQUENCY OUTPUT SIGNALS
    7.
    发明公开
    CONTROL UNIT, RADIO FREQUENCY POWER GENERATOR, AND METHOD FOR GENERATING SYNCHRONIZED RADIO FREQUENCY OUTPUT SIGNALS 审中-公开

    公开(公告)号：EP3952113A1

    公开(公告)日：2022-02-09

    申请号：EP20190074.3

    申请日：2020-08-07

    申请人： Comet AG

    发明人： vor dem Brocke, Manuel ,  Schlierf, Roland ,  Grede, André ,  Gruner, Daniel ,  Labanc, Anton

    IPC分类号： H03L7/099 ,  H03L7/18 ,  H03L7/10

    摘要： The invention describes a control unit (2, 21) for generating a plurality of synchronized radio frequency (RF) output signals (RF out,i ) each having a respective output frequency (f i ), phase (Φ i ), and amplitude (A i ), comprising:
    a signal comparator (3) configured to compare a reference signal (4) having a reference frequency (f ref ) and a reference phase (Φ ref ) with a feedback signal (5) having a feedback frequency (f PLL ) and a feedback phase (Φ PLL ), and configured to generate an error signal (6, 6') representative of a difference between the reference signal (4) and the feedback signal (5); and
    a data processing unit (7) receiving as an input signal the error signal (6, 6') generated by the signal comparator (3), and outputting a plurality of waveform tuning signals (FTW PLL , FTW i ) as a function of the error signal (6, 6');
    wherein a plurality of waveform generators (DDS PLL , DDS i ) each receiving at least one of the plurality of waveform tuning signals (FTW PLL , FTW i ) output by the data processing unit (7), wherein each waveform generator (DDS PLL , DDS i ) generates a time-dependent amplitude signal (A PLL (t), A i (t)) as a function of the received respective waveform tuning signal (FTW PLL , FTW i ),
    wherein one predetermined amplitude signal (A PLL (t)) of the generated plurality of amplitude signals (A PLL (t), A i (t)) represents the feedback signal (5) input to the signal comparator (3), and the other amplitude signals (A i (t)) represent the respective radio frequency (RF) output signals (RF out,i ) to be generated, and
    wherein the data processing unit (7) is configured to adjust both the waveform tuning signal (FTW PLL ) corresponding to the one predetermined amplitude signal (A PLL (t)) representing the feedback signal (5) such as to minimize the error signal (6, 6'), and the other waveform tuning signals (FTW i ) corresponding to the other amplitude signals (A i (t)) representing the radio frequency (RF) output signals (RF out,i ) based on the adjusted waveform tuning signal (FTW PLL ) of the predetermined amplitude signal (A PLL (t)) representing the feedback signal (5).
    The invention further describes a radio frequency (RF) power generator (1, 20, 30), an arrangement (35, 40, 45, 50, 55) of at least two such radio frequency (RF) power generators (1, 20, 30), and a method each for generating a plurality of synchronized radio frequency (RF) output signals (RF out,i ).

    Frequency tuning of a RF-generator within a plasma process
    8.
    发明公开
    Frequency tuning of a RF-generator within a plasma process 审中-公开
    RF发生器的频率调整到等离子体处理

    公开(公告)号：EP3029711A8

    公开(公告)日：2016-07-27

    申请号：EP14196158.1

    申请日：2014-12-03

    申请人： Comet AG

    发明人： Schlierf, Roland

    IPC分类号： H01J37/32

    摘要： The invention describes a method of frequency tuning an electrical generator (100) for supplying electrical power to a plasma, wherein the method comprises a pulsed mode, the pulse mode comprising at least a high power pulse (314) comprising a high power level (304) and a low power pulse (312) comprising a low power level (302) different to zero power, the method comprising the steps of:
    - providing RF-power with a high power starting frequency set comprising at least one high power starting frequency (502, 504, 506) at the high power pulse (314) with a predefined high power pulse shape;
    - providing RF-power with a low power starting frequency set comprising at least one low power starting frequency (512, 514) at the low power pulse (312) with a predefined low power pulse shape;
    - determining a reflected high power at the high power starting frequency (502, 504, 506);
    - tuning the high power starting frequency (502, 504, 506) to a different first high power frequency if the reflected high power exceeds a high power threshold value such that the reflected high power decreases below the high power threshold value;
    - determining a reflected low power at the low power starting frequency (512, 514);
    - tuning the low power starting frequency (512, 514) to a different first low power frequency if the reflected low power exceeds a low power threshold value such that the reflected low power decreases below the low power threshold value.
    The invention further describes a corresponding electrical generator (100), plasma processing system and computer program product. The method, the electrical generator, the plasma processing system and the computer program product may have the advantage that the stability of the plasma with respect to repeated and essentially identical high and low power pulses is used to reduce the controlling effort and to check the stability of the plasma process.