公开(公告)号：EP1336835A4

公开(公告)日：2005-03-16

申请号：EP01972624

申请日：2001-09-28

申请人： DAIKEN CHEMICAL CO LTD ,  SEIKO INSTR INC ,  NAKAYAMA YOSHIKAZU

发明人： NAKAYAMA YOSHIKAZU ,  AKITA SEIJI ,  HARADA AKIO ,  OKAWA TAKASHI ,  TAKANO YUICHI ,  YASUTAKE M ,  SHIRAKAWABE Y

IPC分类号： B82B1/00 ,  B82B3/00 ,  G01Q60/16 ,  G01Q60/38 ,  G01Q60/40 ,  G01Q70/00 ,  G01Q70/12 ,  G01N13/12 ,  G12B21/02 ,  G12B21/04

CPC分类号： G01Q60/16 ,  G01Q60/38 ,  G01Q60/54 ,  G01Q70/12

摘要： A conductive probe for a scanning microscope capable of applying a voltage between a conductive nanotube serving as a probe and a specimen or a current to them. A conductive probe (20) for a scanning microscope for collecting physical properties of the surface of a specimen by means of the tip (14a) of a conductive nanotube probe (12) fixed to a cantilever (4) is characterized in that the conductive probe (20) is composed of a conductive coating (17) provided on the surface of the cantilever (4), a conductive nanotube (12) the root part (16) of which is provided in contact with the surface of the necessary portion of the cantilever (4), and a conductive deposit (18) covering from the root part (16) to a part of the conductive coating (17) and fixing the conductive nanotube (12), and the conductive nanotube (12) is electrically connected to the conductive coating (17) through the conductive deposit (18).

摘要翻译： 一种用于扫描型显微镜的导电探针，其通过固定到悬臂的导电性纳米管探针的尖端捕获试样表面的物质信息，其中导电探针由形成在表面上的导电膜构成 所述悬臂是其基端部固定成导电的非导管，其中预定悬臂的表面是接触的，以及导电沉积物，其通过从非管形管的基端部分覆盖到导电的一部分 电影。 导电非导体和导电膜通过导电沉积物彼此电连接。