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    METHOD AND MATERIALS FOR REVERSE PATTERNING
    4.
    发明公开
    METHOD AND MATERIALS FOR REVERSE PATTERNING 审中-公开
    反向构图的方法和材料

    公开(公告)号：EP2456811A2

    公开(公告)日：2012-05-30

    申请号：EP10802609.7

    申请日：2010-06-22

    申请人： Dow Corning Corporation

    发明人： BRADFORD, Michael, L. ,  MOYER, Eric, Scott ,  TAKEUCHI, Kasumi ,  WANG, Sheng ,  YEAKLE, Craig

    IPC分类号： C08G77/18 ,  C08L83/04 ,  C09D183/04 ,  G03F7/20 ,  G03F7/075

    CPC分类号： C08G77/18 ,  C08L83/04 ,  C09D183/04 ,  H01L21/02137 ,  H01L21/02282 ,  H01L21/0337

    摘要： A silsesquioxane resin is applied on top of the patterned photo-resist and cured to produce a cured silsesquioxane resin on top of the pattern surface. Subsequently, an aqueous base stripper or a reactive ion etch recipe containing CF
    4 is used to "etch back" the silicon resin to the top of the photoresist material, exposing the entire top surface of the photoresist. Then, a second reactive ion etch recipe containing O
    2 to etch away the photoresist. The result is a silicon resin film with via holes with the size and shape of the post that were patterned into the photoresist. Optionally, the new pattern can be transferred into the underlying layer(s).

    摘要翻译： 将倍半硅氧烷树脂施加在图案化的光致抗蚀剂上并固化以在图案表面的顶部上产生固化的倍半硅氧烷树脂。 随后，使用包含CF 4的碱性汽提剂或反应性离子蚀刻配方将硅树脂“回蚀”到光致抗蚀剂材料的顶部，从而暴露光致抗蚀剂的整个顶表面。 然后，包含O 2的第二反应离子蚀刻配方蚀刻掉光刻胶。 其结果是具有过孔的硅树脂膜，其具有图案化到光刻胶中的柱的尺寸和形状。 或者，可以将新模式传送到底层。

    ARYL GROUP-CONTAINING SILOXANE COMPOSITIONS INCLUDING ALKALINE EARTH METAL
    6.
    发明公开
    ARYL GROUP-CONTAINING SILOXANE COMPOSITIONS INCLUDING ALKALINE EARTH METAL 有权
    包含碱土金属的含芳基组的硅氧烷组合物

    公开(公告)号：EP2970666A2

    公开(公告)日：2016-01-20

    申请号：EP14720722.9

    申请日：2014-03-04

    申请人： Dow Corning Corporation

    发明人： SCHMIDT, Randall ,  TAKEUCHI, Kasumi ,  XU, Shengqing

    IPC分类号： C08L83/04 ,  C08K3/20 ,  C08G77/12 ,  C08K9/06

    CPC分类号： C08G77/58 ,  C08G77/06 ,  C08G77/12 ,  C08G77/20 ,  C08G77/22 ,  C08G77/70 ,  C08G77/80 ,  C08K3/20 ,  C08K9/06 ,  C08L83/04 ,  H01L23/296 ,  H01L33/56

    摘要： An aryl group-containing siloxane composition is formed by introducing an alkaline earth- metal as a part of the reaction product of an organopolysiloxane having at least two alkenyl groups per molecule and an organopolysiloxane having at least two silicon-bonded hydrogen atoms per molecule in the presence of a hydrosilylation catalyst, wherein at least one of the organopolysiloxanes includes an aryl group. The alkaline earth metal may be introduced via a heat stability composition or may alternatively be pre -reacted with the organopolysiloxane having at least two alkenyl groups per molecule. The aryl group-containing siloxane compositions may be utilized as an encapsulating layer for a light emitting device.

    摘要翻译： 含芳基的硅氧烷组合物是通过将碱土金属作为每分子具有至少两个链烯基的有机聚硅氧烷和每个分子中具有至少两个与硅键合的氢原子的有机聚硅氧烷的反应产物的一部分而形成的 其中至少一种有机聚硅氧烷包括芳基。 碱土金属可以通过热稳定性组合物引入，或者可以可选地与每分子具有至少两个链烯基的有机聚硅氧烷预反应。 含芳基的硅氧烷组合物可以用作发光器件的封装层。