METHOD TO FORM A PATTERN OF FUNCTIONAL MATERIAL ON A SUBSTRATE USING A STAMP HAVING A SURFACE MODIFYING MATERIAL
    1.
    发明公开
    METHOD TO FORM A PATTERN OF FUNCTIONAL MATERIAL ON A SUBSTRATE USING A STAMP HAVING A SURFACE MODIFYING MATERIAL 审中-公开
    用于形成功能材料结构在基底上使用的印章WITH A面变材料

    公开(公告)号:EP2126631A1

    公开(公告)日:2009-12-02

    申请号:EP08727035.1

    申请日:2008-03-20

    IPC分类号: G03F7/00

    摘要: The invention provides a method to form a pattern of functional material on a substrate. The method uses an elastomeric stamp having a relief structure with a raised surface and having a modulus of elasticity of at least 10 MegaPascal. A surface modifying material is applied to the relief structure and forms a layer at least on the raised surface. A composition of the functional material and a liquid is applied to the layer of the surface modifying material on the relief structure and the liquid is removed to form a film. The elastomeric stamp transfers the functional material from the raised surface to the substrate to form a pattern of the functional material on the substrate. The method is suitable for the fabrication of microcircuitry for electronic devices and components.

    METHOD TO FORM A PATTERN OF FUNCTIONAL MATERIAL ON A SUBSTRATE INCLUDING THE TREATMENT OF A SURFACE OF A STAMP
    6.
    发明公开
    METHOD TO FORM A PATTERN OF FUNCTIONAL MATERIAL ON A SUBSTRATE INCLUDING THE TREATMENT OF A SURFACE OF A STAMP 审中-公开
    用于生产印面功能性材料处理的模式印象深刻KEEP

    公开(公告)号:EP2126630A2

    公开(公告)日:2009-12-02

    申请号:EP08727034.4

    申请日:2008-03-20

    IPC分类号: G03F7/00

    摘要: The invention provides a method to form a pattern of functional material on a substrate. The method uses an elastomeric stamp having a relief structure with a raised surface and having a modulus of elasticity of at least 10 MegaPascal. At least the raised surface of the stamp is treated by exposing the stamp to heat, radiation, electrons, a stream of charged gas, chemical fluids, chemical vapors, and combinations thereof, to enhance wettability of the surface. A composition of the functional material and a liquid is applied to the relief structure and the liquid is removed to form a film on the raised surface. The elastomeric stamp transfers the functional material from the raised surface to the substrate to form a pattern of the functional material on the substrate. The method is suitable for the fabrication of microcircuitry for electronic devices and components.