公开(公告)号：EP2024733A4

公开(公告)日：2011-04-06

申请号：EP07798253

申请日：2007-06-07

申请人： FEI CO

发明人： BIERHOFF MART PETRUS MARIA ,  BUIJSSE BART ,  KOOIJMAN CORNELIS SANDER ,  VAN LEEUWEN HUGO ,  TAPPEL HENDRIK GEZINUS ,  SANFORD COLIN AUGUST ,  STOKS SANDER RICHARD MARIE ,  BERGER STEVEN ,  BORMANS BEN JACOBUS MARIE ,  DRIESSEN KOEN ARNOLDUS WILHELMUS ,  PERSOON JOHANNES ANTONIUS HENDRICUS W G

IPC分类号： H01J37/28 ,  F16J15/50

CPC分类号： H01J37/26 ,  H01J37/16 ,  H01J37/18 ,  H01J37/185 ,  H01J37/20 ,  H01J37/21 ,  H01J37/226 ,  H01J37/244 ,  H01J37/261 ,  H01J37/28 ,  H01J37/302 ,  H01J2237/1405 ,  H01J2237/162 ,  H01J2237/1825 ,  H01J2237/188 ,  H01J2237/2003 ,  H01J2237/2006

摘要： A compact electron microscope uses a removable sample holder having walls that form a part of the vacuum region in which the sample resides. By using the removable sample holder to contain the vacuum, the volume of air requiring evacuation before imaging is greatly reduced and the microscope can be evacuated rapidly. In a preferred embodiment, a sliding vacuum seal allows the sample holder to be positioned under the electron column, and the sample holder is first passed under a vacuum buffer to remove air in the sample holder.