公开(公告)号：EP2024732A4

公开(公告)日：2011-03-30

申请号：EP07798251

申请日：2007-06-07

Applicant: FEI CO

Inventor： BIERHOFF MART PETRUS MARIA ,  BUIJSSE BART ,  KOOIJMAN CORNELIS SANDER ,  VAN LEEUWEN HUGO ,  TAPPEL HENDRIK GEZINUS ,  SANFORD COLIN AUGUST ,  STOKS SANDER RICHARD MARIE ,  BERGER STEVEN ,  BORMANS BEN JACOBUS MARIE ,  DRIESSEN KOEN ARNOLDUS WILHELMUS ,  PERSOON JOHANNES ANTONIUS HENDRICUS WILHELMUS G

IPC: H01J37/28 ,  F16J15/50

CPC classification number: H01J37/26 ,  H01J37/16 ,  H01J37/18 ,  H01J37/185 ,  H01J37/20 ,  H01J37/21 ,  H01J37/226 ,  H01J37/244 ,  H01J37/261 ,  H01J37/28 ,  H01J37/302 ,  H01J2237/1405 ,  H01J2237/162 ,  H01J2237/1825 ,  H01J2237/188 ,  H01J2237/2003 ,  H01J2237/2006

Abstract: A compact electron microscope uses a removable sample holder having walls that form a part of the vacuum region in which the sample resides. By using the removable sample holder to contain the vacuum, the volume of air requiring evacuation before imaging is greatly reduced and the microscope can be evacuated rapidly. In a preferred embodiment, a sliding vacuum seal allows the sample holder to be positioned under the electron column, and the sample holder is first passed under a vacuum buffer to remove air in the sample holder.

公开(公告)号：EP2024733A4

公开(公告)日：2011-04-06

申请号：EP07798253

申请日：2007-06-07

Applicant: FEI CO

Inventor： BIERHOFF MART PETRUS MARIA ,  BUIJSSE BART ,  KOOIJMAN CORNELIS SANDER ,  VAN LEEUWEN HUGO ,  TAPPEL HENDRIK GEZINUS ,  SANFORD COLIN AUGUST ,  STOKS SANDER RICHARD MARIE ,  BERGER STEVEN ,  BORMANS BEN JACOBUS MARIE ,  DRIESSEN KOEN ARNOLDUS WILHELMUS ,  PERSOON JOHANNES ANTONIUS HENDRICUS W G

IPC: H01J37/28 ,  F16J15/50

CPC classification number: H01J37/26 ,  H01J37/16 ,  H01J37/18 ,  H01J37/185 ,  H01J37/20 ,  H01J37/21 ,  H01J37/226 ,  H01J37/244 ,  H01J37/261 ,  H01J37/28 ,  H01J37/302 ,  H01J2237/1405 ,  H01J2237/162 ,  H01J2237/1825 ,  H01J2237/188 ,  H01J2237/2003 ,  H01J2237/2006

Abstract: A compact electron microscope uses a removable sample holder having walls that form a part of the vacuum region in which the sample resides. By using the removable sample holder to contain the vacuum, the volume of air requiring evacuation before imaging is greatly reduced and the microscope can be evacuated rapidly. In a preferred embodiment, a sliding vacuum seal allows the sample holder to be positioned under the electron column, and the sample holder is first passed under a vacuum buffer to remove air in the sample holder.

公开(公告)号：EP2024750A4

公开(公告)日：2011-04-06

申请号：EP07798254

申请日：2007-06-07

Applicant: FEI CO

Inventor： BIERHOFF MART PETRUS MARIA ,  BUIJSSE BART ,  KOOIJMAN CORNELIS SANDER ,  VAN LEEUWEN HUGO ,  TAPPEL HENDRIK GEZINUS ,  SANFORD COLIN AUGUST ,  STOKS SANDER RICHARD MARIE ,  BERGER STEVEN ,  BORMANS BEN JACOBUS MARIE ,  DRIESSEN KOEN ARNOLDUS WILHELMUS ,  PERSOON JOHANNES A H W G

IPC: H01J37/28 ,  F16J15/50

CPC classification number: H01J37/26 ,  H01J37/16 ,  H01J37/18 ,  H01J37/185 ,  H01J37/20 ,  H01J37/21 ,  H01J37/226 ,  H01J37/244 ,  H01J37/261 ,  H01J37/28 ,  H01J37/302 ,  H01J2237/1405 ,  H01J2237/162 ,  H01J2237/1825 ,  H01J2237/188 ,  H01J2237/2003 ,  H01J2237/2006

Abstract: A compact electron microscope uses a removable sample holder having walls that form a part of the vacuum region in which the sample resides. By using the removable sample holder to contain the vacuum, the volume of air requiring evacuation before imaging is greatly reduced and the microscope can be evacuated rapidly. In a preferred embodiment, a sliding vacuum seal allows the sample holder to be positioned under the electron column, and the sample holder is first passed under a vacuum buffer to remove air in the sample holder.