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公开(公告)号：EP2881970A1
公开(公告)日：2015-06-10
申请号：EP13195596.5
申请日：2013-12-04
发明人： Buijsse, Bart , Danev, Radostin , Sader, Kasim
摘要： The invention relates to a method of producing a freestanding thin film of nano-crystalline graphite, the method comprising the steps of:
• providing a freestanding thin film of amorphous carbon,
• heating the freestanding thin film to a high temperature in an inert atmosphere or in a vacuum; and
• allowing the freestanding thin film to cool down,
as a result of which a freestanding thin film of nano-crystalline graphite is formed.
Thin films of amorphous carbon are well known and are used in, for example, phase plates in a Transmission Electron Microscope, or as specimen carrier (figure 5A). A disadvantage is that exposure of the film to the electron beam may result in electronic changes in the film, resulting in so-called foot-prints (504). Using crystalline graphitic films overcomes this problem, but the size of the crystals, typically in the order of micrometers, interferes with high quality imaging. There is thus a need for nano-crystalline graphitic carbon film. The invention discloses how these films can be prepared, and discloses some uses for such films. As seen in figure 5B, no footprints occur.摘要翻译： 本发明涉及一种生产纳米结晶石墨独立薄膜的方法，该方法包括以下步骤：提供独立的无定形碳薄膜，将惰性薄膜在惰性气氛中加热至高温 气氛或真空; 并且允许独立的薄膜冷却，结果形成了独立的纳米晶体石墨薄膜。 非晶碳薄膜是众所周知的，并且用于例如透射电子显微镜中的相板或作为试样载体（图5A）。 缺点是膜对电子束的曝光可能导致膜的电子变化，导致所谓的脚印（504）。 使用结晶石墨膜克服了这个问题，但是晶体的尺寸通常在几微米的数量级，这干扰了高质量的成像。 因此需要纳米晶石墨碳膜。 本发明公开了如何制备这些膜，并公开了这些膜的一些用途。 如图5B所示，不会发生足迹。
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2.发明授权Preparation of cryogenic sample for charged-particle microscopy 有权用于低温Ladungsteilchenmikroskopie样品的制备
公开(公告)号：EP2853847B1
公开(公告)日：2016-02-03
申请号：EP13186632.9
申请日：2013-09-30
申请人： FEI COMPANY
CPC分类号： G01N1/42 , G01N1/2813 , H01J37/20 , H01J37/26 , H01J2237/002
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公开(公告)号：EP2866245A1
公开(公告)日：2015-04-29
申请号：EP15156053.9
申请日：2015-02-23
申请人： FEI COMPANY
发明人： Lazic, Ivan , Bosch, Eric , Boughorbel, Faysal , Buijsse, Bart , Sader, Kasim , Lazar, Sorin
IPC分类号： H01J37/244 , H01J37/26
CPC分类号： H01J37/244 , H01J37/26 , H01J37/265 , H01J37/28 , H01J2237/2446 , H01J2237/24465 , H01J2237/2802
摘要： A method of examining a sample in a charged-particle microscope of a scanning transmission type, comprising the following steps:
- Providing a beam of charged particles that is directed from a source through an illuminator so as to irradiate the sample;
- Providing a detector for detecting a flux of charged particles traversing the sample;
- Causing said beam to scan across a surface of the sample, and recording an output of the detector as a function of scan position, resulting in accumulation of a charged-particle image of the sample,
which method further comprises the following steps:
- Embodying the detector to comprise a plurality of detection segments;
- Combining signals from different segments of the detector so as to produce a vector output from the detector at each scan position, and compiling this data to yield a vector field;
- Mathematically processing said vector field by subjecting it to a two-dimensional integration operation, thereby producing an integrated vector field image.摘要翻译： 一种检查扫描透射类型的带电粒子显微镜中的样品的方法，包括以下步骤： - 提供从源通过照射器引导的带电粒子束以照射样品; - 提供用于检测穿过样本的带电粒子通量的检测器; - 使所述光束扫描穿过样品的表面，并且将检测器的输出记录为扫描位置的函数，导致样品的带电粒子图像的积聚，该方法还包括以下步骤： - 实现 该检测器包括多个检测段; - 组合来自检测器不同部分的信号，以便在每个扫描位置产生来自检测器的矢量输出，并编译该数据以产生矢量场; - 通过对所述矢量场进行二维积分运算来对所述矢量场进行数学处理，由此产生积分矢量场图像。
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4.发明公开Method of producing a freestanding thin film of nano-crystalline graphite 有权Verfahren zur Herstellung eines freistehendenDünnfilmsaus nanokristallinem Graphit
公开(公告)号：EP2881971A1
公开(公告)日：2015-06-10
申请号：EP14195297.8
申请日：2014-11-28
发明人： Buijsse, Bart , Danev, Radostin , Sader, Kasim
摘要： The invention relates to a method of producing a freestanding thin film of nano-crystalline graphite, the method comprising the steps of:
• providing a freestanding thin film of amorphous carbon,
• heating the freestanding thin film to a high temperature in an inert atmosphere or in a vacuum; and
• allowing the freestanding thin film to cool down,
as a result of which a freestanding thin film of nano-crystalline graphite is formed.
Thin films of amorphous carbon are well known and are used in, for example, phase plates in a Transmission Electron Microscope, or as specimen carrier (figure 5A). A disadvantage is that exposure of the film to the electron beam may result in electronic changes in the film, resulting in so-called foot-prints (504). Using crystalline graphitic films overcomes this problem, but the size of the crystals, typically in the order of micrometers, interferes with high quality imaging. There is thus a need for nano-crystalline graphitic carbon film. The invention discloses how these films can be prepared, and discloses some uses for such films. As seen in figure 5B, no footprints occur.摘要翻译： 本发明涉及一种生产纳米结晶石墨独立薄膜的方法，该方法包括以下步骤：提供独立的无定形碳薄膜，将惰性薄膜在惰性气氛中加热至高温 气氛或真空; 并且允许独立的薄膜冷却，结果形成了独立的纳米晶体石墨薄膜。 非晶碳薄膜是众所周知的，并且用于例如透射电子显微镜中的相板或作为试样载体（图5A）。 缺点是膜对电子束的曝光可能导致膜的电子变化，导致所谓的脚印（504）。 使用结晶石墨膜克服了这个问题，但是晶体的尺寸通常在几微米的数量级，这干扰了高质量的成像。 因此需要纳米晶石墨碳膜。 本发明公开了如何制备这些膜，并公开了这些膜的一些用途。 如图5B所示，不会发生足迹。
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5.发明公开Preparation of cryogenic sample for charged-particle microscopy 有权Herstellung einer kryogenen ProbefürLadungsteilchenmikroskopie
公开(公告)号：EP2853847A1
公开(公告)日：2015-04-01
申请号：EP13186632.9
申请日：2013-09-30
申请人： FEI COMPANY
CPC分类号： G01N1/42 , G01N1/2813 , H01J37/20 , H01J37/26 , H01J2237/002
摘要： A method of preparing a sample for study in a charged-particle microscope, comprising the following steps:
- Providing a substantially plate-like sample holder having opposed first and second major surfaces substantially parallel to one another, comprising at least one aperture that connects said major surfaces and across which a membrane has been spanned upon said first major surface, which membrane comprises at least one perforation;
- Spanning a film of aqueous liquid across said perforation, which liquid comprises at least one study specimen suspended therein;
- Plunging the sample holder onto a bath of cryogen, whereby the sample holder is held with said first major surface pointing toward the cryogen and arranged substantially parallel to an exposed surface of the cryogen,
further comprising the following step:
- Applying a blast of cryogenic fluid to said film from a nozzle pointing toward said second major surface, immediately prior to the film making contact with said cryogen.摘要翻译： 一种制备用于在带电粒子显微镜中研究的样品的方法，包括以下步骤： - 提供基本上为板状的样品保持器，其具有彼此大致平行的相对的第一和第二主表面，包括至少一个孔，所述孔连接所述 主表面，膜跨越所述第一主表面，所述膜包括至少一个穿孔; - 穿过所述穿孔跨越水性液体膜，所述液体包括悬浮在其中的至少一个研究试样; - 将样品架浸入冷冻剂浴中，由此样品架保持着所述第一主表面指向冷冻剂并且大致平行于冷冻剂的暴露表面布置，还包括以下步骤： - 应用低温 在与所述冷冻剂接触之前，从指向所述第二主表面的喷嘴向所述膜流动。
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6.发明授权
公开(公告)号：EP2881971B1
公开(公告)日：2017-01-04
申请号：EP14195297.8
申请日：2014-11-28
发明人： Buijsse, Bart , Danev, Radostin , Sader, Kasim
摘要： The invention relates to a method of producing a freestanding thin film of nano-crystalline graphite, the method comprising the steps of: €¢ providing a freestanding thin film of amorphous carbon, €¢ heating the freestanding thin film to a high temperature in an inert atmosphere or in a vacuum; and €¢ allowing the freestanding thin film to cool down, as a result of which a freestanding thin film of nano-crystalline graphite is formed. Thin films of amorphous carbon are well known and are used in, for example, phase plates in a Transmission Electron Microscope, or as specimen carrier (figure 5A). A disadvantage is that exposure of the film to the electron beam may result in electronic changes in the film, resulting in so-called foot-prints (504). Using crystalline graphitic films overcomes this problem, but the size of the crystals, typically in the order of micrometers, interferes with high quality imaging. There is thus a need for nano-crystalline graphitic carbon film. The invention discloses how these films can be prepared, and discloses some uses for such films. As seen in figure 5B, no footprints occur.
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公开(公告)号：EP2866245B1
公开(公告)日：2016-11-02
申请号：EP15156053.9
申请日：2015-02-23
申请人： FEI COMPANY
发明人： Lazic, Ivan , Bosch, Eric , Boughorbel, Faysal , Buijsse, Bart , Sader, Kasim , Lazar, Sorin
IPC分类号： H01J37/244 , H01J37/26
CPC分类号： H01J37/244 , H01J37/26 , H01J37/265 , H01J37/28 , H01J2237/2446 , H01J2237/24465 , H01J2237/2802
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8.发明公开Method of examining a sample in a charged-particle microscope 审中-公开Verfahren zur Untersuchung einer Probe in einemLadungsträger-Mikroskop
公开(公告)号：EP2911180A1
公开(公告)日：2015-08-26
申请号：EP14156356.9
申请日：2014-02-24
申请人： FEI Company
发明人： Lazic, Ivan , Bosch, Eric , Boughorbel, Faysal , Buijsse, Bart , Sader, Kasim , Lazar, Sorin
IPC分类号： H01J37/244 , H01J37/26
CPC分类号： H01J37/244 , H01J37/26 , H01J37/265 , H01J37/28 , H01J2237/2446 , H01J2237/24465 , H01J2237/2802
摘要： A method of examining a sample in a charged-particle microscope of a scanning transmission type, comprising the following steps:
- Providing a beam of charged particles that is directed from a source through an illuminator so as to irradiate the sample;
- Providing a detector for detecting a flux of charged particles traversing the sample;
- Causing said beam to scan across a surface of the sample, and recording an output of the detector as a function of scan position, resulting in accumulation of a charged-particle image of the sample,
which method further comprises the following steps:
- Embodying the detector to comprise a plurality of detection segments;
- Combining signals from different segments of the detector so as to produce a vector output from the detector at each scan position, and compiling this data to yield a vector field;
- Mathematically processing said vector field by subjecting it to a two-dimensional integration operation, thereby producing an integrated vector field image.摘要翻译： 一种检查扫描透射型的带电粒子显微镜中的样品的方法，包括以下步骤： - 提供从源通过照射器引导以照射样品的带电粒子束; - 提供检测器，用于检测穿过样品的带电粒子的通量; - 使所述光束扫过样品的表面，并记录检测器的输出作为扫描位置的函数，导致样品的带电粒子图像的累积，该方法还包括以下步骤： - 实现 所述检测器包括多个检测段; - 组合来自检测器的不同段的信号，以便在每个扫描位置产生来自检测器的矢量输出，并且编译该数据以产生矢量场; - 通过使其进行二维积分操作来数字处理所述矢量场，由此产生积分矢量场图像。
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