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公开(公告)号：EP3196919A1
公开(公告)日：2017-07-26
申请号：EP16194724.7
申请日：2016-10-20
申请人： FEI Company
IPC分类号： H01J37/18
CPC分类号： H01J37/261 , G01N1/42 , H01J37/18 , H01J37/185 , H01J37/20 , H01J2237/022 , H01J2237/2001 , H01J2237/2602 , H01J2237/28 , H01J2237/317
摘要： A method of performing surface modification of a cryogenic specimen using a charged particle microscope comprising:
- A vacuum chamber, with a port for loading the specimen into the vacuum chamber;
- A specimen holder, for holding a specimen in an irradiation position;
- A particle-optical column, for producing a charged-particle beam and directing it so as to irradiate the specimen,
which method comprises the steps of:
- Introducing the specimen into the vacuum chamber, providing it on the specimen holder and maintaining it at a cryogenic temperature;
- Employing at least one vacuum pump to evacuate the vacuum chamber;
- Activating said beam and directing it onto a portion of the specimen so as to modify a surface thereof,
additionally comprising the following steps:
- Providing a thin film monitor in the vacuum chamber and maintaining at least a detection surface thereof at a cryogenic temperature;
- Using said monitor to measure a precipitation rate value of frozen condensate in the chamber, and using this value as a trigger to perform at least one of the following actions:
- Initiating said surface modification, when said value falls below a first pre-defined threshold;
- Interrupting said surface modification, if said value rises above a second pre-defined threshold.摘要翻译： 一种使用带电粒子显微镜对低温试样进行表面改性的方法，包括： - 真空室，其具有用于将试样装载到真空室中的端口; - 用于将样本保持在照射位置的样本保持器; - 粒子光学柱，用于产生带电粒子束并引导它照射样品，该方法包括以下步骤： - 将样品引入真空室中，将样品提供到样品架上并将其保持在 低温; - 使用至少一个真空泵来抽空真空室; - 激活所述束并将其引导到样本的一部分上以便修改其表面，另外包括以下步骤： - 在真空室中提供薄膜监视器并将其至少一个检测表面维持在低温; - 使用所述监测器来测量室中冻结冷凝物的沉淀速率值，并且使用该值作为触发以执行以下动作中的至少一个： - 当所述值低于第一预定义时，发起所述表面修改 阈; - 如果所述值上升到第二预定义阈值以上，则中断所述表面修改。
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公开(公告)号：EP3196919B1
公开(公告)日：2018-09-19
申请号：EP16194724.7
申请日：2016-10-20
申请人： FEI Company
IPC分类号： H01J37/18
CPC分类号： H01J37/261 , G01N1/42 , H01J37/18 , H01J37/185 , H01J37/20 , H01J2237/022 , H01J2237/2001 , H01J2237/2602 , H01J2237/28 , H01J2237/317
摘要： A method of performing surface modification of a cryogenic specimen using a charged particle microscope comprising: - A vacuum chamber, with a port for loading the specimen into the vacuum chamber; - A specimen holder, for holding a specimen in an irradiation position; - A particle-optical column, for producing a charged-particle beam and directing it so as to irradiate the specimen, which method comprises the steps of: - Introducing the specimen into the vacuum chamber, providing it on the specimen holder and maintaining it at a cryogenic temperature; - Employing at least one vacuum pump to evacuate the vacuum chamber; - Activating said beam and directing it onto a portion of the specimen so as to modify a surface thereof, additionally comprising the following steps: - Providing a thin film monitor in the vacuum chamber and maintaining at least a detection surface thereof at a cryogenic temperature; - Using said monitor to measure a precipitation rate value of frozen condensate in the chamber, and using this value as a trigger to perform at least one of the following actions: - Initiating said surface modification, when said value falls below a first pre-defined threshold; - Interrupting said surface modification, if said value rises above a second pre-defined threshold.
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