摘要:
The invention relates to a process for producing a structure with porous silicon in which the silicon is rendered porous at the surface of a silicon substrate (1) by means of an etching solution (4). A non-insulating layer (3) is applied to regions of the substrate surface not to be rendered porous and an electric voltage (UM) is applied between it and the substrate during the porosity producing process. The voltage (UM) can preferably be applied at intervals in time and/or at separate points to form regions of differing porosity.
摘要:
A layered system with an electrically activatable layer has at least one contact electrode which extends over at least part of the surface of the first side of the layer and is connected thereto. The object of the invention is to create a layered system of this type in which the electrically activatable lateral layer is controllable to a limited extent. For that purpose, a plurality of transistor functions is provided on the second side of the electrically activatable layer at least in the area of the first contact electrode. One end of the current channels which supply the controllable current to the corresponding transistor functions is connected to the layer. It is advantageous that the transistor function extends over an as wide as possible part of said layer surface, so as to even completely cover said first side of the layer.
摘要:
The invention relates to a process for producing a structure with porous silicon in which the silicon is rendered porous at the surface of a silicon substrate (1) by means of an etching solution (4). A non-insulating layer (3) is applied to regions of the substrate surface not to be rendered porous and an electric voltage (UM) is applied between it and the substrate during the porosity producing process. The voltage (UM) can preferably be applied at intervals in time and/or at separate points to form regions of differing porosity.
摘要:
The invention relates to an optical component consisting of transparent thin layers of differing thickness and refractive indices. Such optical components are used, for example, as interference filters and mirrors. Optical components made of layers with gradually changing refractive indices are also known as waveguides or anti-reflective coatings. The invention achieves the aim of using, instead of layers of ordinary materials, another material by means of a component in which the layers consist of porous silicon. The special advantages of porous silicon as a coating material arise not only from the ease and economy of manufacture but also inthe facility for obtaining gradual refractive index transitions. It is therefore very easily possible to make waveguides on a silicon chip.
摘要:
The invention relates to an optical component consisting of transparent thin layers of differing thickness and refractive indices. Such optical components are used, for example, as interference filters and mirrors. Optical components made of layers with gradually changing refractive indices are also known as waveguides or anti-reflective coatings. The invention achieves the aim of using, instead of layers of ordinary materials, another material by means of a component in which the layers consist of porous silicon. The special advantages of porous silicon as a coating material arise not only from the ease and economy of manufacture but also inthe facility for obtaining gradual refractive index transitions. It is therefore very easily possible to make waveguides on a silicon chip.