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公开(公告)号：EP0775314A1
公开(公告)日：1997-05-28
申请号：EP95928414.0
申请日：1995-08-04
发明人： SCHÖNING, Michael, Josef , THUST, Marion , FROHNHOFF, Stephan , BERGER, Michael, Götz , ARENS-FISCHER, Rüdiger , KORDOS, Peter , LÜTH, Hans
CPC分类号： C12Q1/003 , C12Q1/001 , G01N33/5438
摘要： A three-dimensional structure of porous silicon considerably improves the anchorage of sensor-active material such as, for example, enzymes, antibodies, etc., on or in the substrate surface of chemical sensors, in particular silicon-based biosensors. This structure is produced by means of suitable etching which forms pore apertures adapted to the penetrability of the sensor-active material. The pore walls advantageously receive a non-conductive boundary layer which consists of oxides of Si and/or Al or Ta or silicon nitride and are preferably 1 - 100 nm thick. The porous layer is advantageously between 10 nm and 100 νm thick and the pores are preferably in the form of branched ducts whose average diameter is 1 nm - 10 νm and in particular 10 - 1000 nm. The sensor-active material can optionally be distributed in a glass, solid, plastics or polymer membrane.
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公开(公告)号：EP0775314B1
公开(公告)日：2004-07-14
申请号：EP95928414.2
申请日：1995-08-04
发明人： SCHÖNING, Michael, Josef , THUST, Marion , FROHNHOFF, Stephan , BERGER, Michael, Götz , ARENS-FISCHER, Rüdiger , KORDOS, Peter , LÜTH, Hans
IPC分类号： G01N33/543 , C12Q1/00 , C12N11/00 , G01N27/403
CPC分类号： C12Q1/003 , C12Q1/001 , G01N33/5438
摘要： A three-dimensional structure of porous silicon considerably improves the anchorage of sensor-active material such as, for example, enzymes, antibodies, etc., on or in the substrate surface of chemical sensors, in particular silicon-based biosensors. This structure is produced by means of suitable etching which forms pore apertures adapted to the penetrability of the sensor-active material. The pore walls advantageously receive a non-conductive boundary layer which consists of oxides of Si and/or Al or Ta or silicon nitride and are preferably 1 - 100 nm thick. The porous layer is advantageously between 10 nm and 100 mu m thick and the pores are preferably in the form of branched ducts whose average diameter is 1 nm - 10 mu m and in particular 10 - 1000 nm. The sensor-active material can optionally be distributed in a glass, solid, plastics or polymer membrane.
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公开(公告)号：EP0704068B1
公开(公告)日：2000-09-13
申请号：EP94916885.0
申请日：1994-06-08
CPC分类号： H01L33/44 , H01L31/02165 , H01L31/103 , H01L33/346 , H01S5/183 , H01S5/3227
摘要： The invention relates to an optical component consisting of transparent thin layers of differing thickness and refractive indices. Such optical components are used, for example, as interference filters and mirrors. Optical components made of layers with gradually changing refractive indices are also known as waveguides or anti-reflective coatings. The invention achieves the aim of using, instead of layers of ordinary materials, another material by means of a component in which the layers consist of porous silicon. The special advantages of porous silicon as a coating material arise not only from the ease and economy of manufacture but also inthe facility for obtaining gradual refractive index transitions. It is therefore very easily possible to make waveguides on a silicon chip.
摘要翻译： 本发明涉及由不同厚度和折射率的透明薄层组成的光学部件。 这种光学部件例如用作干涉滤光片和反射镜。 由具有逐渐变化的折射率的层制成的光学部件也被称为波导或抗反射涂层。 本发明通过其中层由多孔硅构成的部件来实现使用另一种材料代替普通材料层的目的。 多孔硅作为涂层材料的特殊优点不仅来自于制造的简易性和经济性，而且也是获得逐渐折射率转变的设施。 因此很容易在硅芯片上制作波导。
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公开(公告)号：EP0704068A1
公开(公告)日：1996-04-03
申请号：EP94916885.0
申请日：1994-06-08
CPC分类号： H01L33/44 , H01L31/02165 , H01L31/103 , H01L33/346 , H01S5/183 , H01S5/3227
摘要： The invention relates to an optical component consisting of transparent thin layers of differing thickness and refractive indices. Such optical components are used, for example, as interference filters and mirrors. Optical components made of layers with gradually changing refractive indices are also known as waveguides or anti-reflective coatings. The invention achieves the aim of using, instead of layers of ordinary materials, another material by means of a component in which the layers consist of porous silicon. The special advantages of porous silicon as a coating material arise not only from the ease and economy of manufacture but also inthe facility for obtaining gradual refractive index transitions. It is therefore very easily possible to make waveguides on a silicon chip.
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