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    VERFAHREN UND VORRICHTUNG ZUR DICKENMESSUNG
    4.
    发明公开
    VERFAHREN UND VORRICHTUNG ZUR DICKENMESSUNG 有权

    公开(公告)号：EP2089670A1

    公开(公告)日：2009-08-19

    申请号：EP07856418.4

    申请日：2007-12-06

    申请人： Fraunhofer-Gesellschaft zur Förderung der Angewandten Forschung e.V.

    发明人： SCHMITT, Peter ,  KOSTKA, Günther

    IPC分类号： G01B11/06 ,  G01B11/245

    CPC分类号： G01B11/0691 ,  G01B11/245 ,  G01B15/025

    摘要： The material thickness of extended objects can be efficiently determined using two distance measuring devices which project a strip of measuring light onto the object to be measured and operate as light section measuring devices. The first distance measuring device determines the distance from the first main surface of the object, and the second distance measuring device determines the distance from the second main surface of the object, opposite to the first main surface. Potential measuring errors caused by variations of the distance between the two distance measuring devices, resulting from vibrations or thermal deformations, are avoided by the fact that the strip of measuring light of the two distance measuring devices also sweeps a reference object with a pre-determined thickness, such that the thickness of the object between the first main surface and the second main surface can be determined with a high level of precision and speed, on the basis of the measured distances from the main surfaces of the object and from the reference object, and the pre-determined thickness of the reference object.

    摘要翻译： 扩展物体的材料厚度可以通过两个距离测量装置有效地确定，这两个距离测量装置将一条测量光线投射到待测物体上并作为轻型部分测量装置工作。 第一距离测量装置确定与物体的第一主表面的距离，第二距离测量装置确定物体的第二主表面与第一主表面相对的距离。 由于两个距离测量装置的测量光带也以预先确定的方式扫掠参考物体，避免了由两个距离测量装置之间的距离变化引起的由振动或热变形导致的潜在测量误差 厚度，使得可以基于从物体的主表面和从参考物体测量的距离以高水平的精度和速度来确定物体在第一主表面和第二主表面之间的厚度 ，以及参考物体的预定厚度。