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公开(公告)号：EP2484815B1
公开(公告)日：2014-12-24
申请号：EP10820359.7
申请日：2010-09-15
发明人： RYO, Mina , YONEZAWA, Yoshiyuki , SUZUKI, Takeshi
摘要： An object of the present invention is to obtain stable growth of SiC single crystals, particularly 4H-SiC single crystals with an effective crystal growth rate for a prolonged time even at a low temperature range of 2000°C or lower. A raw material containing Si, Ti and Ni is charged into a crucible 1 made of graphite and heat-melted to obtain a solvent. At the same time, C is dissolved out from the crucible 1 into the solvent to obtain a melt 6. A SiC seed crystal substrate 8 is then brought into contact with the melt 6 such that SiC is supersaturated in the melt 6 in the vicinity of the surface of the SiC seed crystal substrate 8, thereby allowing growth and production of an SiC single crystal on the SiC seed crystal substrate 8.
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公开(公告)号：EP2688204A1
公开(公告)日：2014-01-22
申请号：EP11875909.1
申请日：2011-11-14
CPC分类号： H03G1/0023 , G01D5/24 , G01L9/08 , G01L9/12 , G01P15/125 , G01R27/025 , G01R29/24 , G01R31/2829 , H03F3/45183 , H03F3/45286 , H03F3/45475 , H03F3/70 , H03F2203/45521 , H03F2203/45526
摘要： Provided is an electric charge detection circuit that enables easily performing gain adjustment on the input side of a differential amplifier circuit. Ends on one side of physical quantity detection sensors 21, 22 formed of any of an electric charge generation-type sensor and a capacitance change-type sensor are connected to negative electrode input terminals of a differential amplifier circuit 1, and ends on the other side are connected to positive electrode input terminals of the differential amplifier circuit 1. A feedback resistor Rf and a feedback capacitor Cf are connected in parallel between the negative electrode input terminal and an output terminal of the differential amplifier circuit 1, and a cancel resistor Rc and a cancel capacitor Cc are connected in parallel between a reference voltage and the positive electrode input terminal of the differential amplifier circuit 1. Drain voltage adjustment circuits 12, 13 are provided that adjust the drain voltage of at least one of two field effect transistors FET 1, FET 2 to which positive and negative differential inputs of the differential amplifier circuit 1 are individually inputted. Gain adjustment of at least one of the positive and negative differential inputs is thus enabled.
摘要翻译： 提供了一种电荷检测电路，其能够容易地在差分放大器电路的输入侧执行增益调整。 由电荷产生型传感器和电容变化型传感器中的任何一个形成的物理量检测传感器21,22的一侧连接到差分放大器电路1的负极输入端，并且在另一侧 连接到差分放大器电路1的正极输入端子。反馈电阻器Rf和反馈电容器Cf并联连接在负极输入端子和差分放大器电路1的输出端子之间，并且消除电阻器Rc和 取消电容器Cc并联连接在基准电压和差分放大器电路1的正极输入端子之间。设置漏极电压调节电路12,13，调节两个场效应晶体管FET1至少一个的漏极电压 ，差分放大器电路1的正和负差分输入单独进入的FET 2 推杆。 因此可以使正负差分输入中的至少一个的增益调整。
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公开(公告)号：EP2781923A1
公开(公告)日：2014-09-24
申请号：EP12849932.4
申请日：2012-11-12
IPC分类号： G01P15/125 , G01P15/18 , H01L29/84
CPC分类号： G01P15/125 , G01P15/18 , G01P2015/084 , G01P2015/0871 , G01P2015/0882
摘要： The present invention provides an acceleration sensor in which rigidity of its movable electrode can be ensured despite a large number of through-holes formed in the movable electrode. The acceleration sensor has an SOI substrate (2) in which a silicon oxide layer (4) is formed on a silicon support layer (3) and an active silicon layer (5) is formed on the silicon oxide layer, wherein the active silicon layer of the SOI substrate has a movable electrode (11) supported by elastic beams and configured with a weight, and also has fixed electrodes (13a), (13xb), (14ya), (14yb) disposed in a fixed manner around the movable electrode to face the movable electrode, and wherein through-holes (16) penetrating in a Z-axis direction are formed over the entire surface on the inner side of an outer circumference to which the elastic beams (12) of the movable electrode are connected.
摘要翻译： 本发明提供了一种加速度传感器，其中尽管在可动电极中形成有大量的通孔，但其可动电极的刚性仍可被确保。 该加速度传感器具有SOI衬底（2），其中在硅支撑层（3）上形成氧化硅层（4），并且在该氧化硅层上形成有源硅层（5），其中该有源硅层 在SOI基板上具有由弹性梁支撑并由砝码构成的可动电极（11），在固定电极（13a），（13bb），（14ya），（14yb） 以与所述可动电极相对的方式配置，在所述可动电极的所述弹性梁（12）所连接的外周的内侧的整个面上形成贯通Z轴方向的贯通孔（16）。
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公开(公告)号：EP2781923B1
公开(公告)日：2016-05-11
申请号：EP12849932.4
申请日：2012-11-12
IPC分类号： G01P15/125 , G01P15/18 , H01L29/84 , G01P15/08
CPC分类号： G01P15/125 , G01P15/18 , G01P2015/084 , G01P2015/0871 , G01P2015/0882
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