公开(公告)号：EP1707858A1

公开(公告)日：2006-10-04

申请号：EP05703504.0

申请日：2005-01-13

申请人： FUJIKIN INCORPORATED ,  OHMI, Tadahiro

发明人： OHMI, Tadahiro ,  MINAMI, Yukio ,  TUBOTA, Kenji ,  SHINOHARA, Tsutomu ,  YAMAJI, Michio ,  IKEDA, Nobukazu ,  MORIMOTO, Akihiro ,  KAWADA, Koji ,  NARIAI, Toshiro

IPC分类号： F16K51/00

CPC分类号： F16K51/02 ,  Y10T137/6606 ,  Y10T137/7043 ,  Y10T137/7062

摘要： Summary
The present invention provides a vacuum thermal insulating valve that may be used at high temperature in gas supply systems or gas exhaust systems, and also may be made substantially small and compact in size owing to its excellent thermal insulating performance.
With a vacuum thermal insulating valve comprising a valve equipped with a valve body and an actuator, and a vacuum thermal insulating box that houses the valve, the afore-mentioned vacuum thermal insulating box S is formed by a square-shaped lower vacuum jacket S 5 having a cylinder-shaped vacuum thermal insulating pipe receiving part J on a side and with its upper face made open, and the square-shaped upper vacuum jackets S 4 , which is hermetically fitted to the lower vacuum jacket S 5 and with its lower face made open.

摘要翻译： 发明内容本发明提供一种真空热绝缘阀，其可以在气体供应系统或排气系统中在高温下使用，并且由于其优异的绝热性能，其尺寸可以做得基本上小而紧凑。 上述真空保温箱S由具有配备有阀体和致动器的阀以及容纳该阀的真空保温箱的真空保温箱S由方形的下部真空保护套S5形成， 一侧为圆柱形的真空保温管接收部分J，其上表面敞开;以及方形的上部真空套S4，其密封地装配在下部真空套S5上并且其下表面敞开。

公开(公告)号：EP1643218A1

公开(公告)日：2006-04-05

申请号：EP04746098.5

申请日：2004-06-18

申请人： FUJIKIN INCORPORATED ,  OHMI, Tadahiro

发明人： OHMI, Tadahiro ,  SUGIYAMA, Kazuhiko ,  UNO, Tomio ,  IKEDA, Nobukazu ,  NISHINO, Kouji ,  NAKAMURA, Osamu ,  DOHI, Ryousuke ,  MATSUMOTO, Atsushi

IPC分类号： G01F1/42 ,  G01F1/50 ,  G01F7/00

CPC分类号： G01F1/50 ,  G01F1/42 ,  G05D7/0635

摘要： A cost reduction can be achieved by making a differential pressure type flowmeter simple in structure, and highly accurate flow rate measurements can be attained over the wide flow rate range of 100%-1 % with errors E of less than 1 (%SP) both in real time and in a state of inline.
To achieve the ends, a differential pressure type flowmeter comprises an orifice, a detector to detect a fluid pressure P 1 on the upstream side of an orifice, a detector to detect a fluid pressure P 2 on the downstream side of an orifice, a detector to detect a fluid temperature T on the upstream side of an orifice, and a control computation circuit to compute a fluid's flow rate Q passing through an orifice by using the pressure P 1 , pressure P 2 and temperature T detected with the aforementioned detectors, and the aforementioned fluid's flow rate Q is computed with the equation Q=C1 · P1/√T· ((P 2 /P 1 ) m - (P 2 /P 1 ) n ) ½ (where C 1 is a proportional constant, and m and n are constants).

摘要翻译： 通过使差压式流量计结构简单，可以实现成本降低，并且可以在100％-1％的宽流量范围内实现高精度的流量测量，误差E小于1（％SP） 在实时和处于内联状态。 为了达到目的，差压式流量计包括孔口，用于检测孔口上游侧的流体压力P 1的检测器，检测孔口下游侧的流体压力P 2的检测器，检测器 以检测孔口上游侧的流体温度T;以及控制运算电路，通过使用利用上述检测器检测出的压力P 1，压力P 2和温度T来计算通过孔口的流体流量Q，以及 上述流体的流量Q用等式Q = C1·P1 /šT·（（P 2 / P 1）m - （P 2 / P 1）n）1/2来计算，其中C 1是比例常数，m 和n是常数）。

公开(公告)号：EP1138631A1

公开(公告)日：2001-10-04

申请号：EP00946457.9

申请日：2000-07-21

申请人： Fujikin Incorporated ,  Ohmi, Tadahiro

发明人： OHMI, Tadahiro ,  IKEDA, Nobukazu ,  MINAMI, Yukio ,  KAWADA, Kouji ,  KOMEHANA, Katunori ,  HONIDEN, Teruo ,  HIRAI, Touru ,  MORIMOTO, Akihiro ,  NARIAI, Toshirou ,  HIRAO, Keiji ,  TAGUCHI, Masaharu ,  NAKAMURA, Osamu

IPC分类号： C01B5/00

CPC分类号： B01J3/006 ,  B01J7/00 ,  B01J12/007 ,  C01B5/00

摘要： A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic reactor for generating moisture at a high level while supplying moisture gas from the reactor under reduced pressure. A heat dissipation reactor improvement substantially increases moisture generation without being an enlargement in size by efficient cooling of the reactor alumite-treated fins.

摘要翻译： 一种用于从氢气和氧气产生水蒸气并将高纯度水分提供给诸如半导体生产等过程的安全，减压装置。 该装置通过保持催化反应器的内部压力以在较低水平下产生水分而消除气体点燃的可能性，同时在减压下从反应器中提供湿气。 散热反应器的改进通过有效冷却反应器经氧化铝处理的翅片而大大地增加了水分产生而不会扩大尺寸。

公开(公告)号：EP1707857A1

公开(公告)日：2006-10-04

申请号：EP05703503.2

申请日：2005-01-13

申请人： FUJIKIN INCORPORATED ,  OHMI, Tadahiro

发明人： OHMI, Tadahiro ,  NISHINO, Kouji ,  NAGASE, Masaaki ,  DOHI, Ryousuke ,  IKEDA, Nobukazu ,  NISHIMURA, Ryutaro

IPC分类号： F16K47/00

CPC分类号： F16K47/02 ,  Y10T137/0324 ,  Y10T137/0396 ,  Y10T137/7761 ,  Y10T137/7762 ,  Y10T137/7842 ,  Y10T137/86389 ,  Y10T137/86397 ,  Y10T137/86461

摘要： It is so made that a fluid passage can be abruptly opened with a very simple device and operations and also in a short period of time without causing a water hammer.
The water hammerless opening device comprises an actuator operating type valve installed on the fluid passage, an electro-pneumatic conversion device to supply the 2-step actuator operating pressure Pa to the afore-mentioned actuator operating type valve, a vibration sensor removably fixed to the pipe passage on the upstream side of the actuator operating type valve, and a tuning box to which the vibration detecting signal Pr detected by the vibration sensor is inputted, through which the control signal Sc to control the step operating pressure Ps' of the afore-mentioned 2-step actuator operating pressure Pa is outputted to the electro-pneumatic conversion device, and with which the 2-step actuator operating pressure Pa of the step operating pressure Ps', which makes the vibration detecting signal Pr nearly zero, is outputted from the electro-pneumatic conversion by adjusting the control signal Sc.

摘要翻译： 就这样制成没有流体通道可以突然在很短的时间周期非常简单的装置和操作，从而被打开，而不会引起水击。 安装在流体通路的致动器操作型阀的无水击打开装置包括，向电 - 气变换装置供给的2步进致动器动作压力Pa到前述致动器动作式阀，振动传感器可移除地固定到所述 在致动器操作式阀的上游侧管路，和调谐框进行由振动传感器检测到的振动检测信号Pr被输入时，通过该控制信号Sc来控制afore-的步骤操作压力Ps' 提到的两步致动器动作压力Pa的输出到电 - 气变换装置，以及与该两步骤致动器动作压力的步骤操作压力Ps'，这使得振动检测信号Pr大致为零的Pa时，在从输出 通过调整控制信号Sc的电 - 气动转换。

公开(公告)号：EP1267156A1

公开(公告)日：2002-12-18

申请号：EP00931706.6

申请日：2000-06-05

申请人： Fujikin Incorporated ,  Ohmi, Tadahiro

发明人： KAWADA, Kouji ,  IKEDA, Nobukazu ,  MORIMOTO, Akihiro ,  MINAMI, Yukio ,  KOMEHANA, Katunori ,  HONIDEN, Teruo

IPC分类号： G01N25/32

CPC分类号： G01N25/32 ,  G01N33/0013

摘要： A gas detection sensor of simplified construction that permits precise measurement of the concentration of flammable gas in the detection gas or subject gas and the concentration of oxygen gas in the detection gas containing flammable gases. The gas detection sensor according to the present invention in which the heating of the sensor by the contact catalytic reaction of flammable gas gives off the detection signal of the flammable gas, and which comprises a first detection sensor which includes a diaphragm having a platinum coat on the side with which the flowing detection gas comes in contact and a thermocouple having the one ends of two different kinds of metals placed close to each other and fixed on the reverse side of the diaphragm not coming in contact with the flowing detection gas and which is heated by the contact catalytic reaction of flammable gas, and a second detection sensor which includes a diaphragm having a surface coming in contact with the flowing detection gas and a thermocouple having the one ends of two different kinds of metals placed close to each other and fixed on the reverse side of the diaphragm not coming in contact with the flowing detection gas and which detects the temperature of the flowing detection gas.

摘要翻译： 一种简化结构的气体检测传感器，其允许精确测量检测气体或主体气体中的可燃气体的浓度以及含有易燃气体的检测气体中的氧气浓度。 根据本发明的气体检测传感器，其中通过易燃气体的接触催化反应对传感器进行加热，发出可燃气体的检测信号，其包括第一检测传感器，其包括具有铂涂层的隔膜 流动的检测气体接触的一侧和具有两个不同种类的金属的一端的热电偶彼此靠近放置并固定在不与流动的检测气体接触的隔膜的反面上， 通过可燃性气体的接触催化反应进行加热，以及第二检测传感器，其包括具有与流动检测气体接触的表面的隔膜和具有彼此靠近放置的两种不同种类金属的一端的热电偶，并且固定 在隔膜的相反侧不与流动的检测气体接触并检测流量的温度 g检测气体。

公开(公告)号：EP0922667B1

公开(公告)日：2004-08-25

申请号：EP98924654.1

申请日：1998-06-12

申请人： FUJIKIN Inc. ,  Ohmi, Tadahiro

发明人： OHMI, Tadahiro ,  MINAMI, Yukio ,  KAWADA, Koji ,  TANABE, Yoshikazu ,  IKEDA, Nobukazu ,  MORIMOTO, Akihiro

IPC分类号： C01B5/00

CPC分类号： C01B5/00

摘要： A method of generating water for use in semiconductor production which comprises feeding hydrogen and oxygen into a reactor body whose inner wall surface has a platinum coating to heighten the reactivity of the hydrogen and oxygen by the catalytic action of the platinum and instantaneously react the resultant hydrogen and oxygen with each other at a temperature lower than the ignition temperature of the hydrogen-containing mixed gas to thereby generate water without conducting high-temperature combustion, wherein the amount of unreacted hydrogen remaining in the generated water when the reactor for water generation is started and stopped is reduced to thereby enhance the safety of the apparatus for semiconductor production and prevent the inhibition of, e.g., silicon oxide film deposition by the water oxidation method. Specifically, in generating water by feeding hydrogen and oxygen into a reactor body whose inner wall surface has a platinum coating, the feeding of oxygen is initiated first and hydrogen feeding is initiated slightly thereafter. In stopping the water generation by stopping the feeding of hydrogen and oxygen into the reactor body, the feeding of hydrogen is stopped first and oxygen feeding is stopped slightly thereafter.

公开(公告)号：EP0878443A1

公开(公告)日：1998-11-18

申请号：EP97901265.5

申请日：1997-01-27

申请人： FUJIKIN Inc. ,  Hitachi, Ltd. ,  OHMI, Tadahiro

发明人： OHMI, Tadahiro ,  KAWADA, Koji ,  TANABE, Yoshikazu, Kabushiki-Kaisha Hitachi ,  NITTA, Takahisa, Kabushiki-Kaisha Hitachi ,  IKEDA, Nobukazu ,  MORIMOTO, Akihiro ,  HIRAO, Keiji ,  MOROKOSHI, Hiroshi ,  MINAMI, Yukio

IPC分类号： C01B5/00

CPC分类号： C01B5/00

摘要： The invention further reduces a size and cost of a reactor for generating water from oxygen and hydrogen, provides high-purity water in an amount necessary for practical use safely, stably and continuously, and allows a platinum-coated catalyst layer formed on an inner wall of a reactor body to maintain high catalytic activity over a long period of time. Specifically, the reactor comprises a body made of a heat-resistant material and having an inlet and an outlet for water/moisture gas, has a gas-diffusing member provided in an internal space of the body, and has a platinum coating on an internal wall surface of the body. Hydrogen and oxygen fed from the inlet is diffused by the gas-diffusing member and then comes into contact with the platinum coating to enhance reactivity, thereby producing water from hydrogen and oxygen. A temperature of the reactor for generating moisture, wherein hydrogen is reacted with oxygen at a high temperature to generate moisture, is held to be below an ignition temperature of hydrogen or a hydrogen-containing gas so that hydrogen is reacted with oxygen while preventing explosive combustion of hydrogen and oxygen. The platinum-coated catalyst layer on the internal wall of the reactor body is formed by treating the surface of the internal wall of the body, cleaning the treated surface, forming a barrier coating of a nonmetallic material of an oxide or nitride on the wall surface, and forming the platinum coating on the barrier coating.

摘要翻译： 本发明进一步减小了尺寸和用于产生由氧气和氢气水的反应器的成本，提供了高纯度的水到所需量实际使用安全，稳定地和连续地，并允许形成在到内壁上的镀铂催化剂层 反应器主体的在一段长时间内保持高的催化活性。 具体地，该反应器包括一个由耐热材料制成，并在入口和出口，用于水/水分气体具有主体，具有气体扩散构件在所述主体的内部空间中设置于，并且具有铂在内部涂覆上 主体的壁面上。 氢气和氧气从所述入口供给由气体扩散构件扩散，然后与铂涂层接触，以提高反应性，从而由氢气和氧气产生水。 该反应器用于产生湿气，worin氢的温度在高温下与氧反应生成的水分，被保持为低于氢或含氢气体，从而也氢进行反应与氧气的燃点温度，同时防止爆炸燃烧 的氢气和氧气。 在反应器主体的内壁涂覆铂的催化剂层通过处理所述体的内壁的表面上，清洗处理过的表面，在壁表面上形成的氧化物或氮化物的非金属材料构成的阻挡涂布形成 ，以及形成在该阻挡涂层的铂涂层。

公开(公告)号：EP1001326A1

公开(公告)日：2000-05-17

申请号：EP99922553.5

申请日：1999-05-27

申请人： Fujikin Inc. ,  TOKYO ELECTRON LIMITED ,  OHMI, Tadahiro

发明人： OHMI, Tadahiro ,  KAGATSUME, Satoshi ,  IKEDA, Nobukazu ,  NISHINO, Kouji ,  YOSHIKAWA, Kazuhiro ,  IDETA, Eiji ,  DOHI, Ryousuke ,  UNO, Tomio ,  YAMAJI, Michio

IPC分类号： G05D7/06

CPC分类号： G05D7/0635 ,  Y10T137/7759 ,  Y10T137/7761

摘要： An improved and reduced-size low-cost gas supply system equipped with a pressure-type flow control used as in semiconductor manufacturing facilities. Transient flow rate characteristics are improved to prevent the gas from overshooting when the gas supply is started, raising the flow rate control accuracy and reliability of facilities. That eliminates the quality ununiformity of products or semiconductors and raises the production efficiency.
To illustrate, the gas supply system equipped with a pressure-type flow control unit is so configured that with the pressure on the upstream side of the orifice held about twice or more higher than the downstream pressure, the gas flow rate is controlled to supply the gas to a gas-using process through an orifice-accompanying valve, the gas supply system comprising a control valve to receive gas from the gas supply source, an orifice-accompanying valve provided on the downstream side of the control valve, a pressure detector provided between the control valve and the orifice-accompanying valve, an orifice provided on the downstream side of the valve mechanism of the orifice-accompanying valve and a calculation control unit where on the basis of the pressure P1 detected by the pressure detector, the flow rate Qc is calculated with an equation Qc = KP1 (K: constant) and the difference between the flow-rate specifying signal Qs and the calculated flow rate Qc is then input as control signal Qy in the drive for the control valve, thereby regulating the opening of the control valve for adjusting the pressure P1 so that the flow rate of the gas to supply can be controlled.

摘要翻译： 一种改进且尺寸较小的低成本气体供应系统，配备有与半导体制造设备一样使用的压力型流量控制。 提高瞬态流量特性，防止气体开始时气体过冲，提高流量控制精度和设施可靠性。 这消除了产品或半导体的质量不均匀性并提高了生产效率。 为了说明，配置有压力型流量控制单元的气体供给系统被构造成使得在孔口的上游侧的压力保持为比下游压力高大约两倍或更多的气体，气体流量被控制以供应 气体通过孔口相关阀进入气体使用过程，所述气体供应系统包括用于接收来自气体供应源的气体的控制阀，设置在控制阀的下游侧的孔附件阀，设置有压力检测器 在控制阀和节流阀相关阀之间，设置在节流阀相关阀的阀机构的下游侧的孔口和计算控制单元，其中基于由压力检测器检测到的压力P1，流量 用公式Qc = KP1（K：常数）计算Qc，然后输入流量指定信号Qs和计算流量Qc之间的差作为控制符号 在控制阀的驱动中，由此调节用于调节压力P1的控制阀的打开，从而可以控制供给气体的流量。

公开(公告)号：EP1001326B1

公开(公告)日：2005-08-31

申请号：EP99922553.5

申请日：1999-05-27

申请人： FUJIKIN Inc. ,  TOKYO ELECTRON LIMITED ,  OHMI, Tadahiro

发明人： OHMI, Tadahiro ,  KAGATSUME, Satoshi ,  IKEDA, Nobukazu ,  NISHINO, Kouji ,  YOSHIKAWA, Kazuhiro ,  IDETA, Eiji ,  DOHI, Ryousuke ,  UNO, Tomio ,  YAMAJI, Michio

IPC分类号： G05D7/06

CPC分类号： G05D7/0635 ,  Y10T137/7759 ,  Y10T137/7761

摘要： A gas supply equipment comprising a gas control valve (2), an orifice accommodating valve (9) provided downstream of the control valve (2), a pressure detector (3) provided between the control valve (2) and the orifice accommodating valve (9), an orifice (5) provided downstream of the valve mechanism of the orifice accommodating (9) and an arithmetic and control unit which calculates a flow rate as Qc = KP1 (K; constant) from a detected pressure P1 by the pressure detector (3) and outputs to the drive unit of the control valve (2) the difference between a flow rate instruction signal Qs and a calculated flow rate Qc as a control signal Qy.

公开(公告)号：EP0922667A1

公开(公告)日：1999-06-16

申请号：EP98924654.1

申请日：1998-06-12

申请人： FUJIKIN Inc. ,  OHMI, Tadahiro

发明人： OHMI, Tadahiro ,  MINAMI, Yukio ,  KAWADA, Koji ,  TANABE, Yoshikazu ,  IKEDA, Nobukazu ,  MORIMOTO, Akihiro

IPC分类号： C01B5/00

CPC分类号： C01B5/00

摘要： Process for generating moisture for use in semiconductor manufacturing, the process comprising feeding hydrogen and oxygen into a reactor provided with a platinum-coated catalyst layer on an interior wall, thus enhancing the reactivity between hydrogen and oxygen by catalytic action and instantaneously reacting the reactivity-enhanced hydrogen and oxygen at a temperature below the ignition point to produce moisture without undergoing combustion at a high temperature, wherein the amount of unreacted hydrogen occurring in the generated moisture in starting up or terminating the moisture generating reaction is minimized and wherein undesired reactions such as undesired silicon oxide film coating are avoided. When the generation of moisture is started up by feeding hydrogen and oxygen into the reactor provided with a platinum-coated catalyst layer on the inside wall thereof, oxygen first starts to be fed and, some time after that, the supply of hydrogen is begun. In terminating the moisture generating operation by cutting off the supply of hydrogen and oxygen into the reactor, the feeding of hydrogen is first stopped and, some time after that, the supply of oxygen is shut off.

摘要翻译： 用于产生用于半导体制造中的湿气的方法，该方法包括将氢和氧进料到在内壁上设置有铂涂覆的催化剂层的反应器中，从而通过催化作用增强氢和氧之间的反应性，并使反应性 - 在低于点火点的温度下增强氢气和氧气，以产生水分，而不会在高温下经历燃烧，其中在产生水分的反应中启动或终止发生的水分中发生的未反应的氢气的量最小化，并且其中不期望的反应如 避免了不需要的氧化硅膜涂层。 当通过在其内壁上提供有铂包覆的催化剂层的反应器中加入氢气和氧气来启动水分的产生时，首先开始供给氧气，然后一段时间开始供应氢气。 在通过切断氢气和氧气进入反应器来终止湿气产生操作时，首先停止氢的供给，一段时间后，关闭氧气供应。