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公开(公告)号：EP1544902A1
公开(公告)日：2005-06-22
申请号：EP03808884.5
申请日：2003-09-11
发明人： OHMI, Tadahiro , SHIRAI, Yasuyuki , FUJITA, Takumi c/o PRE-TECH CO., LTD. , MINAMI, Yukio c/o Fujikin Incorporated , IKEDA, Nobukazu c/o Fujikin Incorporated , MORIMOTO, Akihiro c/o Fujikin Incorporated , KAWADA, Koji c/o Fujikin Incorporated
IPC分类号： H01L21/304
CPC分类号： H01L21/67034 , H01L21/02052
摘要： A rotary silicon wafer cleaning apparatus capable of enhancing the stability of silicon wafer through perfecting of the hydrogen termination for silicon wafer having undergone cleaning operation with the use of chemicals and pure water. The rotary silicon wafer cleaning apparatus comprises a silicon wafer drying equipment, the silicon wafer drying equipment composed of a mixed gas heating unit for heating a mixed gas consisting of a hydrogen gas, the hydrogen gas containing gaseous hydrogen in an amount of 0.05 vol.% or more, and an inert gas and a hydrogen radical generating unit provided with a platinum coating film capable of forming hydrogen radicals at portion in contact with the heated mixed gas, wherein a mixed gas containing hydrogen radicals generated by the hydrogen radical generating unit is jetted on a rotating silicon wafer after cleaning operation so that the drying and hydrogen termination treatment of the external surface of silicon wafer are simultaneously carried out.
摘要翻译： 一种旋转硅晶片清洁装置，其能够通过使用化学品和纯水完成已进行清洁操作的硅晶片的氢终端，从而提高硅晶片的稳定性。 旋转硅晶片清洁装置包括硅晶片干燥设备，硅晶片干燥设备由用于加热由氢气组成的混合气体的混合气体加热单元，含有0.05体积％的气态氢气的氢气， 以上的惰性气体和氢游离基发生单元，其具有能够与加热的混合气体接触的部分形成氢自由基的铂涂膜，其中喷射含有由氢自由基产生单元产生的氢自由基的混合气体 在清洁操作之后的旋转硅晶片上，从而同时进行硅晶片的外表面的干燥和氢终止处理。
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公开(公告)号：EP1486714B1
公开(公告)日：2008-08-27
申请号：EP02705285.1
申请日：2002-03-18
发明人： OHMI, Tadahiro , YAMAJI, Michio Fujikin Incorporated , NOJIMA, Shinya Fujikin Incorporated , KATSUMI, Yukito Fujikin Incorporated , SHINOHARA, Tsutomu Fujikin Incorporated
CPC分类号： F16J15/02 , F16J15/062 , F16J15/104 , F16L19/00 , F16L19/0212 , F16L19/0218 , F16L25/0018 , F16L27/082 , F16L27/0828 , Y10S277/925 , Y10S285/917
摘要： At the abutting end faces of coupling members (1, 2), annular recesses (3, 4) having annular protrusions (5, 6) on the bottom face are provided while surrounding fluid channels (1a, 2a). A gasket (10) comprises a seal part (11) interposed between the protrusions (5, 6) of the coupling members (1, 2) while having an outside diameter smaller than the diameter of the annular recesses (3, 4), and a guide part (12) disposed on the outside of the seal part (11) while having an outside diameter being fitted in the annular recesses (3, 4). When the coupling members (1, 2) are fastened properly, the end faces thereof abut each other. An annular groove (14) is made in the outer circumference of the seal part (11) and a snap ring (13) fitted in the annular groove (14) couples the seal part (11) and the guide part (12).
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3.发明授权
公开(公告)号：EP1126347B1
公开(公告)日：2007-09-12
申请号：EP00948265.4
申请日：2000-07-27
发明人： OHMI, Tadahiro , IIDA, Seiichi , KAGATSUME, Satoshi, Tokyo Electron Yamanashi Ltd. , HIROSE, Jun, Tokyo Electron Yamanashi Ltd. , FUKASAWA, Kazuo, Tokyo Electron Yamanashi Ltd. , KOIZUMI, Hiroshi, Tokyo Electron Yamanashi Ltd. , NAGAOKA, Hideki, Tokyo Electron Yamanashi Ltd. , UNO, Tomio, Fujikin Incorporated , NISHINO, Kouji, Fujikin Incorporated , IKEDA, Nobukazu, Fujikin Incorporated , DOHI, Ryousuke, Fujikin Incorporated , IDETA, Eiji, Fujikin Incorporated
CPC分类号： G05B23/0235 , G05B23/0256 , G05D7/0635 , Y10T137/0396 , Y10T137/7759 , Y10T137/7761 , Y10T137/8326
摘要： A method for detecting abnormal flow rate by easily detecting an obstruction of an orifice while a fluid pressure flow rate controller using an orifice is controlling the flow rate. The method uses a flow rate controller (FCS) so as to calculate the flow rate Qc on the downstream side when the upstream-side pressure P1 is maintained at a value about twice or more the downstream-side pressure P2 from Qc=KP1 (K: constant) and to control the operation of a control valve (CV) according to a signal Qy representing the difference between the calculated flow rate Qc and a preset flow rate Qs. A testing circuit or flow rate setting circuit provided separately outputs a testing signal ΔQs having a testing amplitude V0 to the control valve (CV). The pressure amplitude V of a pressure variation ΔP1 of the upstream-side pressure P1 occurring in response to the opening/closing of the control valve (CV) is measured. When the pressure amplitude V decreases below a limit amplitude Vt, the obstruction of the orifice is announced, thus implementing the method. If the testing signal ΔQs is superimposed on a steady-state preset flow rate signal Qs0 and outputted together from the testing circuit or the flow rate setting circuit to the control valve (CV), an abnormal flow rate can be detected while controlling the flow rate by using the steady-state preset flow rate signal Qs0.
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公开(公告)号：EP1707858A1
公开(公告)日：2006-10-04
申请号：EP05703504.0
申请日：2005-01-13
发明人： OHMI, Tadahiro , MINAMI, Yukio , TUBOTA, Kenji , SHINOHARA, Tsutomu , YAMAJI, Michio , IKEDA, Nobukazu , MORIMOTO, Akihiro , KAWADA, Koji , NARIAI, Toshiro
IPC分类号： F16K51/00
CPC分类号： F16K51/02 , Y10T137/6606 , Y10T137/7043 , Y10T137/7062
摘要： Summary
The present invention provides a vacuum thermal insulating valve that may be used at high temperature in gas supply systems or gas exhaust systems, and also may be made substantially small and compact in size owing to its excellent thermal insulating performance.
With a vacuum thermal insulating valve comprising a valve equipped with a valve body and an actuator, and a vacuum thermal insulating box that houses the valve, the afore-mentioned vacuum thermal insulating box S is formed by a square-shaped lower vacuum jacket S 5 having a cylinder-shaped vacuum thermal insulating pipe receiving part J on a side and with its upper face made open, and the square-shaped upper vacuum jackets S 4 , which is hermetically fitted to the lower vacuum jacket S 5 and with its lower face made open.摘要翻译： 发明内容本发明提供一种真空热绝缘阀，其可以在气体供应系统或排气系统中在高温下使用，并且由于其优异的绝热性能，其尺寸可以做得基本上小而紧凑。 上述真空保温箱S由具有配备有阀体和致动器的阀以及容纳该阀的真空保温箱的真空保温箱S由方形的下部真空保护套S5形成， 一侧为圆柱形的真空保温管接收部分J，其上表面敞开;以及方形的上部真空套S4，其密封地装配在下部真空套S5上并且其下表面敞开。
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公开(公告)号：EP1300619B1
公开(公告)日：2006-08-02
申请号：EP00935552.0
申请日：2000-06-05
发明人： OHMI, Tadahiro , NISHINO, Kouji Fujikin Incorporated , IKEDA, Nobukazu Fujikin Incorporated , YAMAJI, Michio Fujikin Incorporated , DOHI, Ryousuke Fujikin Incorporated , IDETA, Eiji Fujikin Incorporated , HIROSE, Takashi Fujikin Incorporated
IPC分类号： F16K47/08
CPC分类号： F16K25/005 , F16K7/14 , F16K7/16 , F16K27/00 , H04W4/90 , H04W48/12 , H04W74/006 , H04W74/0833 , H04W76/50
摘要： It is an object of the present invention to provide at low costs a valve with an integral orifice for use in a gas feeding equipment provided with a pressure-type flow volume control device to be employed for manufacturing of semi-conductors and chemical goods. The valve with an integral orifice has the excellent flow rate control characteristics by improving the processing accuracy of the orifice and preventing the distortion of the orifice at the time of assembling. To realize the objects of the present invention, the main part of the valve with an integral orifice comprises a valve main body made of heat-resisting materials having a gas inflow passage in communication with a valve chamber with an upper open end and a gas outflow passage, a synthetic resin made valve seat body formed in the valve chamber and having a gas outflow passage in communication with the gas outflow passage of the aforementioned valve main body and a valve seat, an orifice disc made of heat-resisting materials removably installed in the gas outflow passage of the valve seat body, and an orifice formed in the orifice disc to reduce the gas outflow passage of the valve seat body; wherein the orifice is formed in the stainless steel made orifice disc in advance and the metal made orifice disc with the orifice formed by a separate processing and the synthetic resin made valve seat body are removably assembled, wherein the orifice disc and the synthetic resin made valve seat body are fixed airtight to the valve main body by pressing the valve seat body via the metal inner disc.
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公开(公告)号：EP1486714A1
公开(公告)日：2004-12-15
申请号：EP02705285.1
申请日：2002-03-18
发明人： OHMI, Tadahiro , YAMAJI, Michio Fujikin Incorporated , NOJIMA, Shinya Fujikin Incorporated , KATSUMI, Yukito Fujikin Incorporated , SHINOHARA, Tsutomu Fujikin Incorporated
CPC分类号： F16J15/02 , F16J15/062 , F16J15/104 , F16L19/00 , F16L19/0212 , F16L19/0218 , F16L25/0018 , F16L27/082 , F16L27/0828 , Y10S277/925 , Y10S285/917
摘要： Two coupling member 1, 2 are provided in respective butting end faces thereof with annular recessed portions 3, 4 surrounding respective fluid channels 1a, 2a thereof and having annular projections 5, 6 each formed in a bottom face of the recessed portion. A gasket 10 comprises a sealing portion 11 having an outside diameter smaller than the diameter of the recessed portions 3, 4 and positioned between the projections 5, 6 of the coupling members 1, 2, and a guide 12 having an outside diameter permitting the guide to be fitted into the recessed portions 3, 4 and positioned externally of the sealing portion 11. The butting end faces of the coupling members 1, 2 are movable into contact with each other when the coupling is tightened up properly. The sealing portion 11 has an annular groove 14 formed in an outer periphery thereof, and the sealing portion 11 and the guide 12 are connected together by a snap ring 13 fitted in the annular groove 14.
摘要翻译： 两个联接构件1,2在其各个对接端面上设置有围绕其各自的流体通道1a，2a的环形凹部3,4，并且具有形成在凹部的底面中的环形突起5,6。 垫圈10包括具有小于凹部3,4的直径的外径的密封部分11并且位于联接构件1,2的突起5,6之间，并且具有允许引导件的外径的引导件12 装配到凹部3,4中并且位于密封部分11的外部。当联接器适当地紧固时，联接构件1,2的对接端面可以彼此接触。 密封部分11具有形成在其外周中的环形槽14，并且密封部分11和引导件12通过装配在环形槽14中的卡环13连接在一起。
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7.发明公开
公开(公告)号：EP1126347A1
公开(公告)日：2001-08-22
申请号：EP00948265.4
申请日：2000-07-27
发明人： OHMI, Tadahiro , IIDA, Seiichi , KAGATSUME, Satoshi, Tokyo Electron Yamanashi Ltd. , HIROSE, Jun, Tokyo Electron Yamanashi Ltd. , FUKASAWA, Kazuo, Tokyo Electron Yamanashi Ltd. , KOIZUMI, Hiroshi, Tokyo Electron Yamanashi Ltd. , NAGAOKA, Hideki, Tokyo Electron Yamanashi Ltd. , UNO, Tomio, Fujikin Incorporated , NISHINO, Kouji, Fujikin Incorporated , IKEDA, Nobukazu, Fujikin Incorporated , DOHI, Ryousuke, Fujikin Incorporated , IDETA, Eiji, Fujikin Incorporated
CPC分类号： G05B23/0235 , G05B23/0256 , G05D7/0635 , Y10T137/0396 , Y10T137/7759 , Y10T137/7761 , Y10T137/8326
摘要： A method checks the flow rate for abnormalities while controlling the flow rate of fluid in a pressure-type flow controller FCS using an orifice - the pressure-type flow controller wherein with the upstream pressure P 1 maintained about two or more times higher than the downstream pressure P 2 , the downstream flow rate Q C is calculated by the equation Q C = KP 1 (K: constant) and wherein the control valve CV is controlled on the basis of the difference signal Q Y between the calculated flow rate Q C and the set flow rate Q S . The method comprises, outputting a testing signal ΔQs having a testing amplitude Vo from a testing circuit provided separately or a flow rate setting circuit to the control valve CV, measuring the pressure amplitude V of the variable pressure ΔP1 of the pressure P1 on the upstream side of the orifice that arises in response to actuation of the control valve CV and setting off an alarm for the clogging of the orifice when the pressure amplitude V is smaller than a limit amplitude Vt. If the testing signal ΔQs is superimposed on a steady-state set flow rate signal Qso and outputted to control the valve CV from the testing circuit or the flow rate setting circuit, the flow rate can be checked for abnormalities while controlling the flow rate by the steady-state set flow rate signal Qso.
摘要翻译： 一种方法，检查异常的流速，同时控制在使用于节流孔的压力式流量控制装置FCS的流体的流量 - 压力式流量控制装置worin与上游压力P1保持为下游压力高大约两倍或更多倍 和worin控制阀CV为计算流量QC与设定流量QS之差信号QY的基础上进行控制：P2，下游流量QC由等式QC = KP1（常数K）计算得出。 该方法包括，输出开始一测试信号DELTA Qs的具有从测试电路分开设置的测试振幅VO或流量设定电路向控制阀CV，测量在可变压力DELTA P1的压力P1的压力振幅V 节流孔的上游侧确实产生于响应于控制阀CV的致动和用于节流孔堵塞报警掀起当压力振幅V小于极限振幅Vt的小。 如果测试信号DELTA Qs被叠加在稳态流量设定信号QSO和输出，以控制从所述测试电路或流量设定电路的阀CV，流速可以检查异常，同时控制由流量 稳态设定流量信号QSO。
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8.发明公开FLOW CONTROL METHOD FOR CLUSTERING FLUID AND FLOW CONTROL DEVICE FOR CLUSTERING FLUID 审中-公开流量控制方法FLUIDCLUSTERUNG和流量控制装置FLUIDCLUSTERUNG
公开(公告)号：EP1585002A1
公开(公告)日：2005-10-12
申请号：EP04702837.8
申请日：2004-01-16
发明人： OHMI, Tadahiro , SUGIYAMA, Kazuhiko , MIZUSAWA, Kenetu, c/o Tokyo Electron Ltd , TAKAHASHI, Eiji, c/o Tokyo Electron Ltd , UNO, Tomio, c/o Fujikin Incorporated , NISHINO, Kouji, c/o Fujikin Incorporated , DOHI, Ryousuke, c/o Fujikin Incorporated , IKEDA, Nobukazu, c/o Fujikin Incorporated , NAGASE, Masaaki, c/o Fujikin Incorporated
IPC分类号： G05D7/06
CPC分类号： H01L21/67023 , G05D7/0635 , Y10T137/6416 , Y10T137/6606 , Y10T137/7761
摘要： A high precision flow rate control of a clustering fluid such as the HF gas and the like to be supplied to a vacuum chamber and the like is made possible in the flow rate range of 3∼300SCCM using a pressure type flow rate control device.
Specifically, disclosed herein is a method of controlling the flow rate of the clustering fluid using a pressure type flow rate control device in which the flow rate Q of the gas passing through an orifice is computed as K=KP 1 (where K is a constant) with the gas being in a state where the ratio P 2 /P 1 between the gas pressure P 1 on the upstream side of the orifice and the gas pressure P 2 on the downstream side of the orifice is held at a value not higher than the critical pressure ratio of the gas wherein the association of molecules is dissociated either by heating the afore-mentioned pressure type flow rate control device to the temperature higher than 40°C, or by applying the diluting gas to the clustering fluid to make it lower than a partial pressure so that the clustering fluid is permitted to pass through the afore-mentioned orifice in a monomolecular state.-
9.发明公开METHOD FOR FORMING PLATINUM COATING CATALYST LAYER IN REACTION FURNACE FOR GENERATING WATER GAS 审中-公开一种用于生产涂层的铂催化剂层中的反应炉生产水煤气
公开(公告)号：EP1552885A1
公开(公告)日：2005-07-13
申请号：EP03754111.7
申请日：2003-10-14
发明人： OHMI, Tadahiro , IKEDA, Nobukazu, c/o Fujikin Incorporated , MORIMOTO, Akihiro, c/o Fujikin Incorporated , KITANO, Masafumi, c/o Fujikin Incorporated , MINAMI, Yukio, c/o Fujikin Incorporated , KAWADA, Koji, c/o Fujikin Incorporated
CPC分类号： B01J12/007 , B01J21/04 , B01J23/42 , B01J37/0225 , B01J37/0226 , B01J37/08 , C01B5/00
摘要： A barrier film which has uniform thickness and excellent adhesiveness to the base material and superbly functions to protect a platinum film can be formed on the inner wall surface of a moisture-generating reactor at ease and at a low cost.
The moisture-generating reactor in which hydrogen and oxygen are reacted to generate moisture without high temperature combustion is made of an alloy containing aluminum. A principally aluminum oxide (Al 2 O 3 )-composed barrier film is formed by applying an aluminum selective oxidation treatment on the inner wall surface of the moisture-generating reactor, and thereafter a platinum film is stacked on and stuck to the barrier film so that a platinum coating catalyst layer is formed.摘要翻译： 阻挡膜，其中有均匀的厚度和优异的粘合性的基体材料和优越的功能来保护的铂膜，可以安心湿气产生反应器的内壁表面和以低成本来形成。 在其中氢气和氧气的湿气产生反应器中反应以产生无高温燃烧的水分被由含有铝的合金制成。 甲原则上氧化铝（Al2O3）-composed屏障电影通过施加到铝选择性氧化处理的湿气产生反应器的内壁表面上形成，并且此后铂电影堆叠在和粘在阻挡膜-所以做了铂 催化剂涂层形成。
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10.发明公开MOISTURE GENERATING/SUPPLYING DEVICE AND MOISTURE GENERATING REACTOR 审中-公开FEUCHTIGKEITSGENERIERENDE / LIEFERNDE VORRICHTUNG UND FEUCHTIGKEITSERZEUGENDER REAKTOR
公开(公告)号：EP1138631A1
公开(公告)日：2001-10-04
申请号：EP00946457.9
申请日：2000-07-21
发明人： OHMI, Tadahiro , IKEDA, Nobukazu , MINAMI, Yukio , KAWADA, Kouji , KOMEHANA, Katunori , HONIDEN, Teruo , HIRAI, Touru , MORIMOTO, Akihiro , NARIAI, Toshirou , HIRAO, Keiji , TAGUCHI, Masaharu , NAKAMURA, Osamu
IPC分类号： C01B5/00
CPC分类号： B01J3/006 , B01J7/00 , B01J12/007 , C01B5/00
摘要： A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic reactor for generating moisture at a high level while supplying moisture gas from the reactor under reduced pressure. A heat dissipation reactor improvement substantially increases moisture generation without being an enlargement in size by efficient cooling of the reactor alumite-treated fins.
摘要翻译： 一种用于从氢气和氧气产生水蒸气并将高纯度水分提供给诸如半导体生产等过程的安全，减压装置。 该装置通过保持催化反应器的内部压力以在较低水平下产生水分而消除气体点燃的可能性，同时在减压下从反应器中提供湿气。 散热反应器的改进通过有效冷却反应器经氧化铝处理的翅片而大大地增加了水分产生而不会扩大尺寸。
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