公开(公告)号：EP0080170B1

公开(公告)日：1986-03-19

申请号：EP82110653.1

申请日：1982-11-18

Applicant: Hitachi, Ltd.

Inventor： Noda, Tamotsu ,  Tamura, Hifumi ,  Okano, Hiroshi

IPC: H01J27/26

CPC classification number: H01J27/26

公开(公告)号：EP0279952B1

公开(公告)日：1991-09-18

申请号：EP87119307.4

申请日：1987-12-29

Applicant: HITACHI, LTD.

Inventor： Sakudo, Noriyuki ,  Tamura, Hifumi

IPC: H01J27/22 ,  H01J37/08 ,  H01J3/00

CPC classification number: H01J27/26 ,  H01J3/021

公开(公告)号：EP0202685A3

公开(公告)日：1989-01-18

申请号：EP86107046.4

申请日：1986-05-23

Applicant: HITACHI, LTD.

Inventor： Tamura, Hifumi ,  Ishitani, Tohru ,  Umemura, Kaoru ,  Kawanami, Yoshimi

IPC: H01J37/08 ,  H01J27/22

CPC classification number: H01J27/26 ,  H01J37/08

Abstract: A liquid metal ion source comprises an ion emitter tip (1), ion source material holder means (2) holding ion source material (5) for supplying liquid metal ion source material to said ion emitter tip (1 ion extracting means (4) for extracting ions from said ion emitter tip (1), when the voltage is applied between the ion extracting means (4) and the ion emitter tip (1), and pulsing means for pulsing the relative voltage applied between the ion extracting means (4) and the ion emitter tip (1). A DC voltage corresponding to the threshold voltage (V th ) for ion beam extraction is applied between the ion emitter tip (1) and the extracting electrode (4), what permits to extract an ion beam having a high current density by superposing a pulsed voltage on the DC voltage.

Abstract translation: 液体金属离子源包括离子发射器尖端（1），保持离子源材料（5）的离子源材料固定器装置（2），用于将液体金属离子源材料供应到所述离子发射器尖端（1离子提取装置（4） 当在离子提取装置（4）和离子发射器尖端（1）之间施加电压时，从所述离子发射器尖端（1）提取离子，以及用于脉冲施加在离子提取装置（4）之间的相对电压的脉冲装置， 和离子发射器尖端（1）之间，在离子发射器尖端（1）和提取电极（4）之间施加对应于用于离子束提取的阈值电压（Vth）的DC电压，其允许提取具有 通过将脉冲电压叠加在DC电压上而获得高电流密度。

公开(公告)号：EP0037455A2

公开(公告)日：1981-10-14

申请号：EP81100861.4

申请日：1981-02-06

Applicant: Hitachi, Ltd.

Inventor： Ishitani, Tohru ,  Todokoro, Hideo ,  Tamura, Hifumi

IPC: H01J27/26

CPC classification number: H01J27/26

Abstract: An EHD ion source according to this invention has an extractor (4) and a control electrode (11). The extractor (4) is disposed below a tip (2) and functions to apply an electric field to a substance (3) to-be-ionized wetting a pointed end of the tip (2), so as to derive ions from the pointed tip end. The control electrode (11) is disposed in the vicinity of the pointed end of the tip (2) and functions to apply an electric field to the substance (3) to-be-ionized in its molten state so as to supply the pointed tip end with the substance (3) to-be-ionized in a suitable amount.
As a result, a great ion current (5) which is substantially proportional to an extracting voltage (6) can be derived from the pointed tip end.

公开(公告)号：EP0003659A2

公开(公告)日：1979-08-22

申请号：EP79300163.7

申请日：1979-02-01

Applicant: Hitachi, Ltd.

Inventor： Tamura, Hifumi ,  Ishitani, Tohru

IPC: H01J37/00

CPC classification number: H01J37/252 ,  H01J37/295

Abstract: The present invention is an ion-electron analyzer consisting in effect of an ion microphobe analyzer and an electron diffractometer which are accommodated in a single housing (5). An electron probe and a negative ion beam are produced simultaneously from the same source (1) of charged particles, and simultaneously bombard the surface of a specimen (6). A mass-spectrograph (7, 8, 9) analyses the secondary ions produced, and a fluorescent screen (13. 14) forms a diffraction pattern from the reflected electrons. In this way one can avoid the disadvantages of the previous separate devices, namely that the specimen is partly destroyed by the ion bombardment so that electron diffraction analysis cannot be performed on the same spot on the specimen and that it is difficult and inconvenient to move the specimen from one device to another.

Abstract translation: 本发明是由离子微孔分析仪和电子衍射仪组成的离子电子分析仪，它们容纳在单个壳体（5）中。 从相同的带电粒子源（1）同时产生电子探针和负离子束，同时轰击样品（6）的表面。 质谱仪（7,8,9）分析所产生的二次离子，荧光屏（13,14）从反射电子形成衍射图。 以这种方式，可以避免先前分离的装置的缺点，即样品被离子轰击部分地破坏，使得电子衍射分析不能在样品上的同一点上进行，并且难以移动 样本从一个设备到另一个设备。

公开(公告)号：EP0091777B1

公开(公告)日：1989-01-11

申请号：EP83301924.3

申请日：1983-04-06

Applicant: Hitachi, Ltd.

Inventor： Ishitani, Tohru ,  Tamura, Hifumi ,  Shimase, Akira

IPC: H01J27/22

CPC classification number: H01J27/26

公开(公告)号：EP0179294A1

公开(公告)日：1986-04-30

申请号：EP85112117.8

申请日：1985-09-25

Applicant: HITACHI, LTD.

Inventor： Kawanami, Yoshimi ,  Ishitani, Tohru ,  Umemura, Kaoru ,  Tamura, Hifumi

IPC: H01J37/317 ,  H01J37/147

CPC classification number: H01J37/04 ,  H01J37/3007

Abstract: An ion microbeam apparatus is disclosed which comprises an ion source (1), a beam convergence system (3a, 3b, 5, 6a, 6b, 20) for accelerating, converging and deflecting the ions emitted from the ion source (1) and a sample table (4) supporting thereon a sample (4a). In order easily to change the diameter of the ion beam radiated to the sample (4a), a beam control unit (20) is disposed in the beam convergence system, the beam control unit (20) comprising beam diameter contraction beams (7), a pre-stage deflection plate (13a, 13b) disposed at a pre-stage of the beam diameter contraction means (7) and deflecting the ion beam so that it passes through a predetermined position of the beam diameter contraction means (7), and a post-stage deflection plate (14a, 14b) disposed at the post-stage of the beam diameter contraction means (7) and returns the ion beam, that has passed through the beam diameter contraction means (7), to the original beam optical axis (10).

Abstract translation: 公开了一种离子光束装置，其包括离子源（1），用于加速，会聚和偏转从离子源（1）发射的离子的束收敛系统（3a，3b，5，6a，6b，20） 样品台（4），其上支撑有样品（4a）。 为了容易地改变辐射到样品（4a）的离子束的直径，光束控制单元（20）设置在光束会聚系统中，光束控制单元（20）包括光束直径收缩光束（7） 设置在光束直径收缩装置（7）的前级的偏转板（13a，13b），并使离子束偏转，使其通过光束直径收缩装置（7）的预定位置;以及 设置在光束直径收缩装置（7）的后级处的后级偏转板（14a，14b），并将已经通过光束直径收缩装置（7）的离子束返回到原始光束光学 轴（10）。

公开(公告)号：EP0114496A3

公开(公告)日：1985-05-15

申请号：EP83307759

申请日：1983-12-20

Applicant: HITACHI, LTD.

Inventor： Ishitani, Tohru ,  Tamura, Hifumi ,  Umemura, Kaoru

IPC: H01J27/26

CPC classification number: H01J27/26

Abstract: A liquid metal ion source has a carrier strip 3 which melts and holds a substance 5 being ionized, a needle anode 1 located so that its pointed tip projects the ions of the molten substance supplied by the carrier strip, and a draw-out electrode 7 to apply a strong electric field between itself and the anode, thereby drawing out the ions from the pointed tip of the anode. The ion source has a thermal stress-absorbing element 10 installed between the needle anode and its support 2, or a plurality of such members between the carrier strip and its supports, to take up the thermal stresses that would result from the difference in thermal expansion coefficients between the needle anode and the carrier strip when both are secured to their supports, and which would damage the connected components.

Abstract translation: 液体金属离子源具有熔融并保持被离子化的物质5的载体带3，将针状阳极1定位为使其尖端突出由载体带供应的熔融物质的离子和引出电极7 在其自身和阳极之间施加强电场，从而从阳极的尖端引出离子。 离子源具有安装在针阳极及其支撑件2之间的热应力吸收元件10，或者载体带与其支撑件之间的多个这样的构件，以承受由热膨胀差引起的热应力 当两者都固定到其支撑件上时，针阳极和载体带之间的系数，并且将损坏连接的部件。

公开(公告)号：EP0114496A2

公开(公告)日：1984-08-01

申请号：EP83307759.7

申请日：1983-12-20

Applicant: HITACHI, LTD.

Inventor： Ishitani, Tohru ,  Tamura, Hifumi ,  Umemura, Kaoru

IPC: H01J27/26

CPC classification number: H01J27/26

Abstract: A liquid metal ion source has a carrier strip 3 which melts and holds a substance 5 being ionized, a needle anode 1 located so that its pointed tip projects the ions of the molten substance supplied by the carrier strip, and a draw-out electrode 7 to apply a strong electric field between itself and the anode, thereby drawing out the ions from the pointed tip of the anode. The ion source has a thermal stress-absorbing element 10 installed between the needle anode and its support 2, or a plurality of such members between the carrier strip and its supports, to take up the thermal stresses that would result from the difference in thermal expansion coefficients between the needle anode and the carrier strip when both are secured to their supports, and which would damage the connected components.

Abstract translation: 液体金属离子源具有熔融并保持被离子化的物质5的载体带3，将针状阳极1定位为使其尖端突出由载体带供应的熔融物质的离子和引出电极7 在其自身和阳极之间施加强电场，从而从阳极的尖端引出离子。 离子源具有安装在针阳极及其支撑件2之间的热应力吸收元件10，或者载体带与其支撑件之间的多个这样的构件，以承受由热膨胀差引起的热应力 当两者都固定到其支撑件上时，针阳极和载体带之间的系数，并且将损坏连接的部件。

公开(公告)号：EP0091777A2

公开(公告)日：1983-10-19

申请号：EP83301924.3

申请日：1983-04-06

Applicant: Hitachi, Ltd.

Inventor： Ishitani, Tohru ,  Tamura, Hifumi ,  Shimase, Akira

IPC: H01J27/22

CPC classification number: H01J27/26

Abstract: A liquid metal ion source according to the present invention has a needle electrode (1) whose fore end is disposed at a position speced from a reservoir (3') for holding a source material (2), and is provided with means (12,13,13') for freely varying the distance from the reservoir (3') to the fore end of the needle electrode (1). This distance can therefore be optimized to give more stable operation under a wider range of conditions.