Apparatus for producing superconducting oxide film by MOCVD process
    2.
    发明公开
    Apparatus for producing superconducting oxide film by MOCVD process 失效
    Vorrichtung zur Herstellung von supraleitenden Oxydschichten durch MOCVD-Verfahren。

    公开(公告)号:EP0506012A1

    公开(公告)日:1992-09-30

    申请号:EP92105135.5

    申请日:1992-03-25

    IPC分类号: C23C16/52 H01L39/24

    摘要: An apparatus for producing a superconducting oxide film with stable properties by a chemical vapor phase growth process, suitable for mass production, is provided with a gas analyzer comprising a differential pressure meter (38) between a raw material gas collector tube (35) provided in a transfer line (8) for leading a raw material gas to a film forming chamber and a bypass line (37), a dilution gas line (49) interlocked with the differential pressure meter (38) and for leading a dilution gas to the raw material gas collector tube (35), a gas separation column (42) branched from the bypass line, a gas detector (31) connected to the gas separation column (42), flow rate controllers (50) for carrier gases (43) and (44) and a thermostat (13) for heating all the lines. Amounts of raw materials gases can be readily measured and controlled and thus superconducting oxide films of stable properties in a constant metal composition ratio can be continuously produced, and thus the present apparatus is suitable for mass production of tape form, superconducting materials.

    摘要翻译: 本发明提供一种气体分析装置,其特征在于,包括在位于所述原料气体收集管(35)之间的差压计(38)的气体分析装置 用于将原料气体引导到成膜室和旁通管线(37)的输送管线(8),与差压计(38)互锁的稀释气体管线(49),并将稀释气体引导到原料 原料气体收集管(35),从旁路管路分支的气体分离塔(42),连接到气体分离塔(42)的气体检测器(31),用于载气(43)的流量控制器(50) (44)和用于加热所有管线的恒温器(13)。 可以容易地测量和控制原料气体的量,因此可以连续生产具有恒定金属组成比的稳定性能的超导氧化物膜,因此本发明的装置适用于大规模生产带状超导材料。

    Thallium group superconducting wire
    3.
    发明公开
    Thallium group superconducting wire 失效
    Supraleitender Draht der Thallium-Gruppe

    公开(公告)号:EP0718897A1

    公开(公告)日:1996-06-26

    申请号:EP95119551.0

    申请日:1995-12-12

    IPC分类号: H01L39/14 H01L39/24

    摘要: In order to provide a crystal oriented high quality thallium group superconducting wire having a high critical current density, a thallium group superconducting film (2) is formed on an oxide single crystal fiber (1) having plane facets (3) and a polygonal cross section in the thallium group superconducting wire, wherein the c-axis of the thallium group superconducting film (2) is oriented perpendicularily, and a- and b-axis are oriented in parallel to the longitudinal direction of the above fiber (1),respectively, and resulting to obtain a high quality thallium group superconducting wire with Jc of 10⁵A/cm² or more at 77K.

    摘要翻译: 为了提供具有高临界电流密度的晶体取向的高质量铊组超导线,在具有平面(3)和多边形横截面的氧化物单晶纤维(1)上形成铊基超导膜(2) 在铊族超导线中,其中铊族超导膜(2)的c轴垂直取向,并且a轴和b轴分别与上述纤维(1)的纵向平行取向, 从而得到77K的Jc为10 5 A / cm 2以上的高品质铊族超导线。

    Method and apparatus for monitoring oxide superconducting film
    4.
    发明公开
    Method and apparatus for monitoring oxide superconducting film 失效
    Verfahren und Apparat zurÜberwachungoxidisch supraleitender Schichten。

    公开(公告)号:EP0545302A1

    公开(公告)日:1993-06-09

    申请号:EP92120284.2

    申请日:1992-11-27

    IPC分类号: H01L39/24 F02M67/12 F02M51/06

    CPC分类号: H01L39/2422

    摘要: In formation of an oxide superconducting film on various substrates by chemical vapor deposition (CVD), a film-growing process is monitored in situ by irradiating the growing oxide superconducting thin film surface on a substrate (5) alternately with s-polarized laser beam (28) and p-polarized laser beam (28) at the Brewster angle of the substrate (5) or film to measure the intensity of reflected laser beams. Thickness, growth rate and flatness or smoothness of a growing film can be monitored on the basis of measured intensity, whereby a flat and smooth, and uniform oxide superconducting thin film can be formed effectively with respect to the operation and economy.

    摘要翻译: 在通过化学气相沉积(CVD)在各种衬底上形成氧化物超导膜时,通过与s偏振激光束交替地照射衬底(5)上生长的氧化物超导薄膜表面来现场监测膜生长过程 28)和p偏振激光束(28)以基板(5)或膜的布鲁斯特角测量反射激光束的强度。 可以基于测量的强度来监测生长膜的厚度,生长速率和平坦度或平滑度,由此可以有效地形成平坦且平滑且均匀的氧化物超导薄膜。

    Method of preparing metal oxide crystal
    10.
    发明公开
    Method of preparing metal oxide crystal 失效
    Verfahren zur Herstellung eines Metalloxid-Kristalls。

    公开(公告)号:EP0624664A3

    公开(公告)日:1995-11-15

    申请号:EP94303318.3

    申请日:1994-05-09

    IPC分类号: C30B29/22

    摘要: A method of preparing a crystal of a Y-series 123 metal oxide is disclosed, in which a substrate is immersed in a liquid phase which comprises components constituting the metal oxide. The liquid phase contains a solid phase located at a position different from the position at which the substrate contacts the liquid phase. The solid phase provides the liquid phase with solutes which constitute the Y-series 123 metal oxide so that the solutes are transported to the position at which the substrate and the liquid phase contact, thereby permitting the Y-series 123 metal oxide to grow on the substrate as primary crystals.

    摘要翻译: 公开了一种制备Y系123金属氧化物的晶体的方法,其中将基片浸入包括构成金属氧化物的组分的液相中。 液相包含位于不同于基板与液相接触的位置的位置的固相。 固相为构成Y系123金属氧化物的溶质提供液相,使得溶质被输送到基板和液相接触的位置,从而允许Y系列123金属氧化物在 底物作为主晶体。