摘要:
To provide a black synthetic quartz glass with a transparent layer, which has high emissivity in the far infrared region, has excellent light-shielding properties, maintains the same degree of purity as synthetic quartz glass in terms of metal impurities, has high-temperature viscosity characteristics comparable to natural quartz glass, can undergo high-temperature processing like welding, and does not release carbon from its surface; together with a method for the production thereof. A porous silica glass body containing hydroxyl groups is subjected to a gas phase reaction in a volatile organosilicon compound atmosphere at a temperature between 100°C and 1200°C and, following the reaction, evacuation is commenced and, on reaching a degree of vacuum exceeding 10 mmHg (1343 Pa), heatingis carried out at a temperature between 1200°C and 2000°C to produce a compact glass body.
摘要:
The present invention refers to a method and device for manufacturing silica glass in which a silica glass powder is dropped from a powder supply device above a rotating furnace and layered in a centre portion of a furnace bottom, and then heat-fused and expanded in an outer circumferential direction of the furnace to form an ingot, the drop position and a fusion position of the silica glass powder is dispersed in the bottom portion of the furnace. The drop position of the silica glass powder is displaced from the centre portion of the bottom portion of the furnace, and the silica glass powder is preferably dispersed in the bottom portion of the furnace by the rotational movement of one or both of the powder supply device and the bottom portion of the furnace. The method and device for manufacturing silica glass facilitate the simple manufacture of a highly pure, bubble-free large flat-plate silica glass ingot in a short time.
摘要:
An object of the present invention is to provide a quartz glass body, especially a quartz glass jig for plasma reaction in producing semiconductors having excellent resistance against plasma corrosion, particularly, excellent corrosion resistance against F-based gaseous plasma; and a method for producing the same. A body made of quartz glass containing a metallic element and having an improved resistance against plasma corrosion is provided that contains bubbles and crystalline phase at an amount expressed by projected area of less than 100 mm 2 per 100 cm 3 .
摘要:
Opaque silica glass having a density of 2.0 to 2.18 g/cm 3 , sodium and potassium elements concentrations in the silica glass of each 0.5 ppm or less and an OH group concentration of 30 ppm or less, and containing bubbles which are independent bubbles having the following physical values:
(1) a bubble diameter of 300 µm or less, and (2) a bubble density of 100,000 to 1,000,000 bubbles/cm 3 , and a production process for opaque silica glass, comprising: filling quartz raw material grain having a particle size of 10 to 350 µm in a heat resistant mold, heating it in a non-oxidizing atmosphere from a room temperature up to a temperature lower by 50 to 150°C than a temperature at which the above raw material grain is melted at a temperature-raising speed not exceeding 50°C/minute, then, slowly heating it up to a temperature higher by 10 to 80°C than the temperature at which the quartz raw material grain is melted at the speed of 10°C/minute or less, and cooling after maintaining at the above temperature.
摘要翻译:密度为2.0〜2.18g / cm 3的不透明二氧化硅玻璃,二氧化硅玻璃中的钠和钾元素浓度为0.5ppm以下,OH基浓度为30ppm以下,并且含有独立气泡的气泡 具有以下物理值:(1)气泡直径为300μm以下,(2)泡孔密度为100,000〜1,000,000个气泡/ cm 3,以及不透明石英玻璃的制造方法,其特征在于,包括: 在耐热模具中具有10〜350μm的粒径的原料颗粒,在非氧化性气氛中从室温加热到比上述原料的温度低50〜150℃的温度 材料颗粒以不超过50℃/分钟的升温速度熔化,然后缓慢加热至比石英原料颗粒熔化温度高10至80℃的温度,速度为 10℃/分钟以下,mai后冷却 在上述温度下保持。