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1.发明公开METAL GATE INTEGRATION STRUCTURE AND METHOD INCLUDING METAL FUSE, ANTI-FUSE AND/OR RESISTOR 审中-公开集成结构和金属栅极程序，金属保护，防FUSE和/或电阻
公开(公告)号：EP2286444A4
公开(公告)日：2012-11-21
申请号：EP09747138
申请日：2009-04-28
Applicant: IBM
Inventor： ESHUN EBENEZER E , HE ZHONG-XIANG , RASSEL ROBERT M , COOLBAUGH DOUGLAS , GEBRESELASIE EPHREM G , WANG PING-CHUAN , KIM DEOK-KEE , KOTHANDARAMAN CHANDRASEKHARAN , ROBSON NORMAN W , MOY DAN , SAFRAN JOHN M , STEIN KENNETH J , HO HERBERT L , YAN HONGWEN
IPC: H01L23/525 , H01L27/06
CPC classification number: H01L27/0629 , H01L23/5252 , H01L2924/0002 , H01L2924/00
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