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公开(公告)号：EP2235743A4
公开(公告)日：2013-03-20
申请号：EP09704665
申请日：2009-01-15
Applicant: IBM
Inventor： DALTON TIMOTHY , DORIS BRUCE B , KIM HO-CHEOL , RADENS CARL
IPC: H01L21/033 , B81C1/00
CPC classification number: H01L21/0337 , B81C1/00031 , B81C2201/0149 , B82Y10/00 , B82Y30/00 , H01L21/0338 , Y10T428/24612
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