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1.发明公开METHOD FOR FORMING SUSPENDED TRANSMISSION LINE STRUCTURES IN BACK END OF LINE PROCESSING 审中-公开方法悬空传输线结构在后卫线上END加工成型
公开(公告)号：EP1756862A4
公开(公告)日：2011-03-02
申请号：EP05741890
申请日：2005-04-28
Applicant: IBM
Inventor： CHINTHAKINDI ANIL K , GROVES ROBERT A , TRETIAKOV YOURI V , VAED KUNAL , VOLANT RICHARD P
IPC: H01L23/522 , H01L21/4763 , H01L21/768 , H01L23/532 , H01P11/00
CPC classification number: H01P11/003 , H01L21/7682 , H01L21/76838 , H01L23/5222 , H01L23/5225 , H01L23/53238 , H01L2223/6622 , H01L2223/6627 , H01L2924/0002 , H01L2924/1903 , H01L2924/3011 , H01L2924/00
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