公开(公告)号：EP1756862A4

公开(公告)日：2011-03-02

申请号：EP05741890

申请日：2005-04-28

Applicant: IBM

Inventor： CHINTHAKINDI ANIL K ,  GROVES ROBERT A ,  TRETIAKOV YOURI V ,  VAED KUNAL ,  VOLANT RICHARD P

IPC: H01L23/522 ,  H01L21/4763 ,  H01L21/768 ,  H01L23/532 ,  H01P11/00

CPC classification number: H01P11/003 ,  H01L21/7682 ,  H01L21/76838 ,  H01L23/5222 ,  H01L23/5225 ,  H01L23/53238 ,  H01L2223/6622 ,  H01L2223/6627 ,  H01L2924/0002 ,  H01L2924/1903 ,  H01L2924/3011 ,  H01L2924/00

公开(公告)号：EP1849167A4

公开(公告)日：2010-06-09

申请号：EP06720491

申请日：2006-02-08

Applicant: IBM

Inventor： CHINTHAKINDI ANIL K ,  ESHUN EBENEZER E

IPC: H01C1/012 ,  H01L21/02 ,  H01L23/522 ,  H01L27/06

CPC classification number: H01L28/24 ,  H01C7/006 ,  H01L23/5228 ,  H01L27/0629 ,  H01L27/0688 ,  H01L2924/0002 ,  H01L2924/00

公开(公告)号：EP1794778A4

公开(公告)日：2009-06-03

申请号：EP05779566

申请日：2005-08-04

Applicant: IBM

Inventor： CHINTHAKINDI ANIL K ,  COOLBAUGH DOUGLAS D ,  RAMACHANDRAN VIDHYA ,  RASSEL ROBERT M

IPC: H01L21/20

CPC classification number: H01L28/24 ,  H01L27/0629 ,  H01L29/7833

Abstract: A FEOL/MEOL metal resistor (32) that has tight sheet resistance tolerance (on the order of about 5% or less), high current density (on the order of about 0.5 mA/micron or greater), lower parasitics than diffused resistors and lower TCR than standard BEOL metal resistors as well as various methods of integrating such a metal resistor structure (32) into a CMOS technology are provided.