ION SOURCE
    1.
    发明公开
    ION SOURCE 审中-公开
    离子源

    公开(公告)号:EP2739764A2

    公开(公告)日:2014-06-11

    申请号:EP12819519.5

    申请日:2012-08-03

    IPC分类号: C23C14/48 C23C14/00 H01J1/88

    摘要: The invention provides an ion source comprising first and second cathode pole pieces spaced apart from one another to form a cavity therebetween, an edge of the first cathode pole piece being spaced apart from an edge of the second cathode pole piece to define an elongate cathode gap between the respective edges of the pole pieces, the elongate cathode gap having a longitudinal axis; at least one magnet arranged for magnetising the first and second cathode pole pieces with opposite magnetic polarities; an elongate anode located in the cavity, the anode being spaced apart from the first and second cathode pole pieces and having a longitudinal axis, the longitudinal axis of the elongate anode and the longitudinal axis of the elongate cathode gap substantially coplanar; a first electrical connection which extends from outside the cavity to the anode; and a gas feed conduit which extends from outside the cavity to inside the cavity for introducing a gas into the cavity.

    ZINC OXIDE NANOSTRUCTURES AND SENSORS USING ZINC OXIDE NANOSTRUCTURES
    2.
    发明公开
    ZINC OXIDE NANOSTRUCTURES AND SENSORS USING ZINC OXIDE NANOSTRUCTURES 审中-公开
    氧化锌纳米结构和传感器的氧化锌纳米结构

    公开(公告)号:EP2419372A1

    公开(公告)日:2012-02-22

    申请号:EP10764715.8

    申请日:2010-04-14

    摘要: A method for preparing zinc oxide nanostructures using arc discharge is disclosed. The method comprises the provision of an anode and a cathode in an arc discharge chamber. Current is supplied to the anode and the cathode to establish an arc discharge between the cathode and the anode to vaporise the anode and produce zinc oxide nanostructures. Contemplated is the use of the zinc oxide nanostructures to produce components that have applications in, for example, optoelectronics, energy storage devices, field emission devices, and sensors such as UV photosensors, gas sensors and humidity sensors. Disclosed is a gas sensor and method for its production, where said method comprises the provision of a sensor substrate comprising a conducting thin film at least partially covering at least two regions on at least one surface of a sensor substrate material to define a gap in the conducting thin film, the application of a mixture of zinc oxide nanostructures and a non-ionic polymer to at least a portion of the gap in the conducting thin film to thereby bridge the gap. Optionally contemplated is a step of annealing the mixture of zinc oxide nanostructures and non-ionic polymer applied to said sensor substrate to produce the sensor component.

    摘要翻译: 公开了一种使用电弧放电制备氧化锌纳米结构的方法。 该方法包括在电弧放电室中提供阳极和阴极。 电流被提供给阳极和阴极,以在阴极和阳极之间建立电弧放电以使阳极汽化并产生氧化锌纳米结构。 考虑使用氧化锌纳米结构来制造在例如光电子学,能量存储装置,场致发射装置以及诸如UV光电传感器,气体传感器和湿度传感器等传感器中的应用的组件。 公开了一种气体传感器及其制造方法,其中所述方法包括提供传感器基板,该传感器基板包括至少部分覆盖传感器基板材料的至少一个表面上的至少两个区域的导电薄膜,以在所述传感器基板材料的至少一个表面上限定间隙 导电薄膜,将氧化锌纳米结构和非离子聚合物的混合物施加到导电薄膜的至少一部分间隙中,从而桥接间隙。 任选地考虑的是对施加到所述传感器基底的氧化锌纳米结构和非离子聚合物的混合物进行退火以产生传感器部件的步骤。