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    Charged particle source with integrated energy filter
    1.
    发明公开
    Charged particle source with integrated energy filter 审中-公开
    Quellefürgeladene Teilchen mit integriertem Energiefilter

    公开(公告)号：EP2128885A1

    公开(公告)日：2009-12-02

    申请号：EP08156906.3

    申请日：2008-05-26

    Applicant: FEI COMPANY

    Inventor： Henstra, Alexander

    IPC: H01J37/05 ,  H01J37/09 ,  H01J37/147 ,  H01J37/153 ,  H01J37/04

    CPC classification number: H01J37/05 ,  H01J3/027 ,  H01J3/04 ,  H01J37/063 ,  H01J2237/045 ,  H01J2237/057 ,  H01J2237/061 ,  H01J2237/08 ,  H01J2237/15 ,  H01J2237/1534

    Abstract: The invention describes a particle source in which energy selection occurs. The energy selection occurs by sending a beam of electrically charged particles 103 eccentrically through a lens 107. As a result of this, energy dispersion will occur in an image formed by the lens. By projecting this image onto a slit 109 in an energy selecting diaphragm 108, it is possible to allow only particles in a limited portion of the energy spectrum to pass. Consequently, the passed beam 113 will have a reduced energy spread. Deflection unit 112 deflects the beam to the optical axis 101. One can also elect to deflect a beam 105 going through the middle of the lens toward the optical axis and having, for example, greater current.
    The energy dispersed spot is imaged on the slit by a deflector 111. When positioning the energy dispersed spot on the slit, central beam 105 is deflected from the axis to such an extent that it is stopped by the energy selecting diaphragm. Hereby reflections and contamination resulting from this beam in the region after the diaphragm are avoided. Also electron-electron interaction resulting from the electrons from the central beam interacting with the energy filtered beam in the area of deflector 112 is avoided.

    Abstract translation: 本发明描述了发生能量选择的粒子源。 通过透过透镜107偏心地发送带电粒子103的束来进行能量选择。其结果是，由透镜形成的图像中会发生能量分散。 通过将该图像投影到能量选择膜108中的狭缝109上，可以仅允许能量谱的有限部分中的粒子通过。 因此，通过的梁113将具有减小的能量扩展。 偏转单元112将光束偏转到光轴101.还可以选择将穿过透镜中间的光束105偏转到光轴并具有例如更大的电流。 能量分散点通过偏转器111在狭缝上成像。当将能量分散点定位在狭缝上时，中心光束105从轴线偏转到由能量选择膜片停止的程度。 因此避免了在隔膜之后的区域中由该光束产生的反射和污染。 避免了在偏转器112的区域中与来自中心光束的电子与能量过滤光束相互作用的电子 - 电子相互作用。

    ION SOURCE
    6.
    发明公开
    ION SOURCE 审中-公开
    离子源

    公开(公告)号：EP2739764A2

    公开(公告)日：2014-06-11

    申请号：EP12819519.5

    申请日：2012-08-03

    Applicant: Institute Of Geological And Nuclear Sciences Limited

    Inventor： FUTTER, Richard John ,  MARKWITZ, Andreas

    IPC: C23C14/48 ,  C23C14/00 ,  H01J1/88

    CPC classification number: H01J37/08 ,  C23C14/046 ,  C23C14/48 ,  C23C14/562 ,  H01J3/04 ,  H01J27/14 ,  H01J37/3171 ,  H01J2237/002 ,  H01J2237/061

    Abstract: The invention provides an ion source comprising first and second cathode pole pieces spaced apart from one another to form a cavity therebetween, an edge of the first cathode pole piece being spaced apart from an edge of the second cathode pole piece to define an elongate cathode gap between the respective edges of the pole pieces, the elongate cathode gap having a longitudinal axis; at least one magnet arranged for magnetising the first and second cathode pole pieces with opposite magnetic polarities; an elongate anode located in the cavity, the anode being spaced apart from the first and second cathode pole pieces and having a longitudinal axis, the longitudinal axis of the elongate anode and the longitudinal axis of the elongate cathode gap substantially coplanar; a first electrical connection which extends from outside the cavity to the anode; and a gas feed conduit which extends from outside the cavity to inside the cavity for introducing a gas into the cavity.

    ION SOURCE WITH SUBSTANTIALLY PLANAR DESIGN
    7.
    发明公开
    ION SOURCE WITH SUBSTANTIALLY PLANAR DESIGN 有权
    基本上平面结构离子源

    公开(公告)号：EP1825491A2

    公开(公告)日：2007-08-29

    申请号：EP05818170.2

    申请日：2005-11-07

    Applicant: Guardian, Industries Corp.

    Inventor： LUTEN, Henry, A. ,  VEERSASAMY, Vijayen, S.

    IPC: H01J27/14

    CPC classification number: H01J37/08 ,  H01J3/04 ,  H01J27/143

    Abstract: In certain example embodiments of this invention, there is provide an ion source including an anode (25) and a cathode (5). In certain example embodiments, the cathode does not overhang over the anode, or vice versa. Since no, or fewer, areas of overhang are provided between the anode and cathode, there is less undesirable build-up on the anode and/or cathode during operation of the ion source so that the source can run more efficiently. Moreover, in certain example embodiments, an insulator (35) such as a ceramic or the like is provided between the anode and cathode.

    Teilchenquelle
    8.
    发明公开
    Teilchenquelle 审中-公开

    公开(公告)号：EP1258903A3

    公开(公告)日：2006-12-06

    申请号：EP01710048.8

    申请日：2001-09-15

    Applicant: Roentdek Handels GmbH

    Inventor： Spielberger, Lutz Dr. ,  Bräuning-Demian, Angela Dr. ,  Penache, Maria Christina ,  Schmidt-Böcking, Horts Dr. ,  Schösser, Sven ,  Jahnke, Till ,  Hohn, Oliver ,  Mergel, Volker Dr.

    IPC: H01J27/02

    CPC classification number: H01J49/10 ,  H01J3/04 ,  H01J27/022 ,  H01J37/08

    Abstract: Die Erfindung betrifft eine Teilchenquele, insbesondere eine Ionenquelle (99) für die Erzeugung angeregter Teilchen in gasförmigen Medien. Eine dielektrische, z.B. Kaptonfolie (11) ist beidseitig elektrisch leitfähig beschichtet (12, 13) und es wird zwischen den beiden Beschichtungen eine Spannung, vorzugsweise gepulst, angelegt. Durch die Spannung wird im Gasdurchfluss eine Gasentladung (14) gezündet. Durch eine Druckdifferenz zwischen den beiden Seiten (21, 22) der Folie expandiert das Gas von der Hochdruckseite auf die Niederdruckseite, vorzugsweise in einer Ultraschallexpansion (15), wodurch ein gerichteter kalter Strahl (32) aus angeregten Teilchen oder Ionen erzeugt wird.

    Abstract translation: 本发明涉及一种颗粒源，特别是用于在气体介质中产生激发颗粒的离子源。 电介质例如Kapton箔在两侧电导电涂覆，并且在两个涂层之间施加优选脉冲的电压。 气体通过气体通过电压点燃气体放电。 由于箔的两侧之间的压力差，气体从高压侧膨胀到低压侧，优选地在超声波膨胀中，由此产生被引导的冷激发的粒子或离子束。

    Teilchenquelle
    9.
    发明公开
    Teilchenquelle 审中-公开
    粒子

    公开(公告)号：EP1258903A2

    公开(公告)日：2002-11-20

    申请号：EP01710048.8

    申请日：2001-09-15

    Applicant: Roentdek Handels GmbH

    Inventor： Spielberger, Lutz Dr. ,  Bräuning-Demian, Angela Dr. ,  Penache, Maria Christina ,  Schmidt-Böcking, Horts Dr. ,  Schösser, Sven ,  Jahnke, Till ,  Hohn, Oliver ,  Mergel, Volker Dr.

    IPC: H01J27/02

    CPC classification number: H01J49/10 ,  H01J3/04 ,  H01J27/022 ,  H01J37/08

    Abstract: Die Erfindung betrifft eine Teilchenquele, insbesondere eine Ionenquelle (99) für die Erzeugung angeregter Teilchen in gasförmigen Medien. Eine dielektrische, z.B. Kaptonfolie (11) ist beidseitig elektrisch leitfähig beschichtet (12, 13) und es wird zwischen den beiden Beschichtungen eine Spannung, vorzugsweise gepulst, angelegt. Durch die Spannung wird im Gasdurchfluss eine Gasentladung (14) gezündet. Durch eine Druckdifferenz zwischen den beiden Seiten (21, 22) der Folie expandiert das Gas von der Hochdruckseite auf die Niederdruckseite, vorzugsweise in einer Ultraschallexpansion (15), wodurch ein gerichteter kalter Strahl (32) aus angeregten Teilchen oder Ionen erzeugt wird.

    Abstract translation: 本发明涉及一种Teilchenquele，特别是用于在气体介质的受激粒子的产生的离子源（99）。 一种电介质，例如 在两侧上的导电涂层（12，13）和卡普顿薄膜（11）是两个涂层，电压，优选的脉冲创建之间。 由电压，气体放电（14）在气流被点燃。 通过该膜的两个侧面（21,22）之间的压力差从高压侧到低压侧膨胀气体，优选在超声膨胀（15），由此从激发粒子或离子产生的定向冷射流（32）。

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