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    MEMS GYROSCOPE HAVING 2-DEGREE-OF-FREEDOM SENSING MODE
    4.
    发明公开
    MEMS GYROSCOPE HAVING 2-DEGREE-OF-FREEDOM SENSING MODE 审中-公开
    MEMS陀螺仪具有2自由度的感应模式

    公开(公告)号：EP3296691A1

    公开(公告)日：2018-03-21

    申请号：EP16792949.6

    申请日：2016-05-10

    Applicant: Shin Sung C&T Co., Ltd.

    Inventor： SONG, Ci Moo ,  YOUN, Keun Jung ,  KANG, Jeong Sik ,  KIM, Yong Kook ,  HAN, Seung Ho ,  SONG, Hyun Ju

    IPC: G01C19/5712 ,  B81B7/02

    CPC classification number: G01C19/5712 ,  B81B3/0062 ,  B81B7/02 ,  B81B2201/0242 ,  B81B2203/0163 ,  G01C19/5719 ,  G01C19/5747

    Abstract: Provided is an MEMS gyroscope, which is resistant against external environmental changes such as a microfabrication process error, a vacuum package process error and a temperature change. The MEMS gyroscope comprises: a frame arranged parallel to a bottom wafer substrate; a sensor mass body excited at one degree of freedom in an excitation mode, and of which the displacement is sensed at two degrees of freedom by Cori-olis force in a sensing mode when an external an-gular velocity is inputted into the frame; and at least two sensing electrodes for sensing the dis-placement of the sensor mass body, the displace-ment being sensed at the two degrees of freedom, wherein the sensor mass body comprises an inner mass body and an outer mass body encompassing the inner mass body, the outer mass body and the frame are connected by a first support spring, and the outer mass body and the inner mass body are connected by a second support spring.

    Abstract translation: 本发明提供一种能够抵抗微加工工艺误差，真空封装工艺误差和温度变化等外部环境变化的MEMS陀螺仪。 MEMS陀螺仪包括：平行于底部晶圆衬底布置的框架; 在激励模式下以一个自由度激励的传感器质量体，并且当外部转动速度输入到所述框架中时，在感测模式下通过科里奥利力以两个自由度感测所述位移; 以及至少两个感测电极，用于感测所述传感器质量体的位移，所述位移在所述两个自由度处被感测，其中所述传感器质量体包括内部质量体和包围所述内部质量体的外部质量体， 所述外部质量体和所述框架通过第一支撑弹簧连接，并且所述外部质量体和所述内部质量体通过第二支撑弹簧连接。

    IMPROVED GYROSCOPE STRUCTURE AND GYROSCOPE DEVICE
    5.
    发明授权
    IMPROVED GYROSCOPE STRUCTURE AND GYROSCOPE DEVICE 有权
    改进的陀螺仪结构和陀螺仪装置

    公开(公告)号：EP3140614B1

    公开(公告)日：2018-03-14

    申请号：EP15721872.8

    申请日：2015-05-06

    Applicant: Murata Manufacturing Co., Ltd.

    Inventor： BLOMQVIST, Anssi

    IPC: G01C19/5762 ,  G01C19/5747

    CPC classification number: G01C19/5762 ,  B81B2201/0242 ,  B81B2201/033 ,  G01C19/5712 ,  G01C19/5747

    Abstract: A microelectromechanical gyroscope structure for detecting angular motion about an axis of angular motion. A drive element is suspended for one-dimensional motion in a direction of a drive axis, and a sense body carries one or more sense rotor electrodes and is coupled to the drive element with a first directional spring structure that forces the sense body to move with the drive element and has a preferred direction of motion in a direction of a sense axis. The drive element includes an actuation body and a drive frame wherein the first spring structure couples the sense body directionally to the drive frame, and a second directional spring structure that couples the drive frame to the actuation body and has a preferred direction of motion in the direction of the sense axis.

    CAPTEUR COMPRENANT DES MASSES MOBILES ET DES MOYENS DE DÉTECTION DES MOUVEMENTS RELATIFS DES MASSES
    6.
    发明公开
    CAPTEUR COMPRENANT DES MASSES MOBILES ET DES MOYENS DE DÉTECTION DES MOUVEMENTS RELATIFS DES MASSES 审中-公开
    传感器MIT BEWEGLICHEN MASSEN MASSEN MITTEL ZUM ERFASSEN VON RELATIVBEWEGUNGEN DER MASSEN

    公开(公告)号：EP3071933A1

    公开(公告)日：2016-09-28

    申请号：EP14802026.6

    申请日：2014-11-20

    Applicant: Safran Electronics & Defense

    Inventor： JEANROY, Alain ,  ONFROY, Philippe

    IPC: G01C19/574 ,  B81B3/00 ,  G01P15/097

    CPC classification number: G01C19/574 ,  B81B3/0021 ,  B81B3/007 ,  B81B2201/0242 ,  B81B2201/0271 ,  B81B2203/0109 ,  B81B2203/04 ,  B81C1/00658 ,  G01P15/097 ,  G01P2015/084

    Abstract: The invention relates to a MEMS inertial sensor, including a frame to which at least a first seismic body and a second seismic body are connected by resilient means such as to be movable in a suspension plane, transducers to keep the seismic bodies vibrating and determine a movement of the seismic bodies in the suspension plane, and a control unit connected to the transducers by electrical conduction means. The transducers comprise at least one electrode rigidly connected to the first seismic body and one electrode rigidly connected to the second seismic body, the two electrodes being arranged such as to allow direct measurement of the relative movement of the seismic bodies relative to one another in the suspension plane.

    Abstract translation: 一种MEMS型惯性传感器，包括至少具有第一地震体的支撑结构和通过弹性装置连接到其上的第二地震体，以便能够在悬架平面中移动，用于将地震体保持在振动中并用于确定振动的运动 悬架平面中的地震体，以及通过电导体装置连接到换能器的控制单元。 所述换能器包括固定到所述第一地震体的至少一个电极和固定到所述第二地震体的至少一个电极，所述两个电极被布置成使所述地震体相对于所述悬架平面中的相对运动被直接测量 。

    Improved gyroscope structure and gyroscope
    7.
    发明公开
    Improved gyroscope structure and gyroscope 有权
    VERBESSERTE GYROSKOPSTRUKTUR UND GYROSKOP

    公开(公告)号：EP3044542A1

    公开(公告)日：2016-07-20

    申请号：EP14776735.4

    申请日：2014-09-10

    Applicant: Murata Manufacturing Co., Ltd.

    Inventor： BLOMQVIST, Anssi ,  RUOHIO, Jaakko

    IPC: G01C19/5712

    CPC classification number: B81B7/0058 ,  B81B2201/0242 ,  G01C19/5712

    Abstract: A microelectromechanical gyroscope that comprises two seismic masses suspended to form a plane of masses. The seismic masses are excited into rotary oscillation about a common primary axis that is in the plane of masses. Detected angular motion causes a rotary oscillation of the first seismic mass about a first detection axis, and of the second seismic mass about a second detection axis. The detection axes are perpendicular to the plane of masses and separated by a non-zero distance.

    Abstract translation: 一种微机电陀螺仪，其包括两个悬挂以形成质量平面的地震块。 围绕质量平面的公共主轴，地震质量被激发成旋转振荡。 检测到的角运动导致围绕第一检测轴线的第一地震质量块的旋转振荡，以及围绕第二检测轴线的第二地震质量块的旋转振荡。 检测轴垂直于质量平面，并与非零距离隔开。

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