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    Forming method and apparatus for amorphous carbon films
    2.
    发明公开
    Forming method and apparatus for amorphous carbon films 有权
    Bildungsverfahren und -vorrichtungfüramorphe Kohleschichten

    公开(公告)号：EP2703521A1

    公开(公告)日：2014-03-05

    申请号：EP13194778.0

    申请日：2004-02-12

    申请人： JTEKT CORPORATION

    发明人： Ando, Junji ,  Sakai, Naoyuki ,  Saito, Toshiyuki ,  Nakanishi, Kazuyuki ,  Mori, Hiroyuki ,  Tachikawa, Hideo ,  Itou, Kyouji ,  Fujioka, Mikio ,  Funaki, Yoshiyuki

    IPC分类号： C23C16/26 ,  C23C16/509 ,  C23C16/458 ,  C23C16/503 ,  C23C16/52 ,  H01J37/00 ,  C23C16/27 ,  F16D13/64 ,  C23C16/455

    CPC分类号： C23C16/4583 ,  C23C16/272 ,  C23C16/277 ,  C23C16/45563 ,  C23C16/45578 ,  C23C16/4587 ,  C23C16/509 ,  C23C16/52 ,  F16D13/64 ,  F16D2250/0046 ,  H01J37/3244 ,  H01J37/32779

    摘要： An amorphous carbon film forming apparatus according to the present invention is provided with a film forming furnace; plural workpiece fixtures (23) for supporting plural plate-like workpieces (22) that take a disk shape or a ring shape in a state that the same are piled up vertically in parallel, the plural workpiece fixtures (23) being arranged within the film forming furnace at a regular angular interval on a circle and being connected to a negative electrode; nozzles (31, 32) provided for supplying a processing gas and including at least one nozzle (31) arranged at a center of the circle on which the plural workpiece fixtures (23) are arranged and plural nozzles (32) arranged at a regular angular interval on another circle which surrounds the workpieces fixtures (23) radially outside thereof; and a plasma power supply connected to at least the workpiece fixtures (23). The workpiece fixtures (23) are of a type that fixes two adjoining plate-like workpieces (22) in touch at their inner and/or outer portions with a cylindrical fixture (232).

    摘要翻译： 根据本发明的无定形碳膜形成装置设置有成膜炉; 多个工件固定装置（23），用于支撑在垂直方向平行堆叠的状态下呈圆盘状或环状的多个板状工件（22），多个工件夹具（23）配置在膜 在圆周上以规则的角度间隔形成炉并连接到负极; 设置用于供给处理气体的喷嘴（31,32），并且包括布置在其上布置有多个工件固定件（23）的圆的中心的至少一个喷嘴（31），并且多个喷嘴（32）以规则角度 围绕其径向外侧的工件固定装置（23）的另一个圆周上的间隔; 以及连接到至少工件夹具（23）的等离子体电源。 工件夹具（23）是一种类型，它们在其内部和/或外部部分处与圆柱形夹具（232）在接触地固定两个邻接的板状工件（22）。