公开(公告)号：EP1121580B1

公开(公告)日：2006-03-29

申请号：EP99947552.8

申请日：1999-10-12

Applicant: Horiba Jobin Yvon S.A.S.

Inventor： DREVILLON, Bernard ,  DA SILVA, Edouard ,  BENFERHAT, Ramdane

IPC: G01N21/21 ,  G01N21/65 ,  G01N21/47

CPC classification number: G01N21/65 ,  G01N21/211 ,  G01N2021/656

Abstract: The invention concerns an apparatus for optically characterising a thin-layer material by backscattering Raman spectometry comprising a frame, a monochromatic excitation laser source (21), optical means (23, 24) directing a light flux emitted by the source towards the material to be characterised, provided with means (22) homogenising the distribution of energy per surface unit, over a minimum surface of some tens of square micrometers, and means for collecting (24) and selecting (27, 28) the light diffused by Raman effect. The apparatus further comprises reflectometric measuring means (3-14) integral with the Raman measuring means, including reflectometric excitation means (3-9) directed on the same sample zone as the Raman excitation means.

公开(公告)号：EP1520158B1

公开(公告)日：2008-11-26

申请号：EP03761649.7

申请日：2003-06-26

Applicant: Horiba Jobin Yvon S.A.S.

Inventor： NGUYEN, Quy, Dao ,  DA SILVA, Edouard

IPC: G01J3/44

CPC classification number: G01J3/04 ,  G01J3/02 ,  G01J3/021 ,  G01J3/44

Abstract: The invention concerns a Raman spectrometry apparatus comprising an excitation source (14), excitation optical means (16) directing an excitation beam (15) derived from said source on the sample (17), means for collecting (18) energy diffused by the sample (17) including an entrance slit (19) for the diffusion, a spectral dispersion system (20), means for selecting Raman effect energy (23), a sensor (22), optical means (21) for sensing energy directing the collected and selected Raman effect energy towards the sensor (22). The invention is characterized in that the excitation optical means (16) cause the excitation beam (14) to be dispersed by the dispersion system (20), said excitation optical means (16) comprising an entrance slit (24) and an exit slit formed by the diffusion entrance slit (19) and selecting the excitation wavelength.

公开(公告)号：EP1368622A1

公开(公告)日：2003-12-10

申请号：EP02718233.6

申请日：2002-03-01

Applicant: Jobin Yvon S.A.S.

Inventor： DA SILVA, Edouard

IPC: G01J3/06 ,  H04J14/02 ,  G02B26/08

CPC classification number: G01J3/02 ,  G01J3/021 ,  G01J3/06 ,  G01J3/32 ,  G01J3/36 ,  G02B26/0833

Abstract: The invention relates to a spectrometer (1) comprising an element for dispersing a light beam formed by a set of spectral components, said dispersing element spatially dispersing the spectral components in the form of a spatially-distributed dispersion spectrum (6), and at least one photonic detector (5, 52) comprising at least one detection element (51) which is disposed at one point of said dispersion. According to the invention, a matrix optics electro-micromechanical device (3) is disposed between the dispersing element and the detector in the dispersion spectrum, said electro-micromechanical device comprising a matrix of optical components. Each of said optical components can reflect one part of the dispersion spectrum in at least two directions according to a control signal so that at least one subset of the spectrum can be selected for said detection element. A method and an application of the spectrometer are claimed.

公开(公告)号：EP1520158A1

公开(公告)日：2005-04-06

申请号：EP03761649.7

申请日：2003-06-26

Applicant: Horiba Jobin Yvon S.A.S.

Inventor： NGUYEN, Quy, Dao ,  DA SILVA, Edouard

IPC: G01J3/44

CPC classification number: G01J3/04 ,  G01J3/02 ,  G01J3/021 ,  G01J3/44

Abstract: The invention concerns a Raman spectrometry apparatus comprising an excitation source (14), excitation optical means (16) directing an excitation beam (15) derived from said source on the sample (17), means for collecting (18) energy diffused by the sample (17) including an entrance slit (19) for the diffusion, a spectral dispersion system (20), means for selecting Raman effect energy (23), a sensor (22), optical means (21) for sensing energy directing the collected and selected Raman effect energy towards the sensor (22). The invention is characterized in that the excitation optical means (16) cause the excitation beam (14) to be dispersed by the dispersion system (20), said excitation optical means (16) comprising an entrance slit (24) and an exit slit formed by the diffusion entrance slit (19) and selecting the excitation wavelength.

公开(公告)号：EP1368622B1

公开(公告)日：2004-10-27

申请号：EP02718233.6

申请日：2002-03-01

Applicant: Jobin Yvon S.A.S.

Inventor： DA SILVA, Edouard

IPC: G01J3/06 ,  H04J14/02 ,  G02B26/08

CPC classification number: G01J3/02 ,  G01J3/021 ,  G01J3/06 ,  G01J3/32 ,  G01J3/36 ,  G02B26/0833

Abstract: The invention relates to a spectrometer (1) comprising an element for dispersing a light beam formed by a set of spectral components, said dispersing element spatially dispersing the spectral components in the form of a spatially-distributed dispersion spectrum (6), and at least one photonic detector (5, 52) comprising at least one detection element (51) which is disposed at one point of said dispersion. According to the invention, a matrix optics electro-micromechanical device (3) is disposed between the dispersing element and the detector in the dispersion spectrum, said electro-micromechanical device comprising a matrix of optical components. Each of said optical components can reflect one part of the dispersion spectrum in at least two directions according to a control signal so that at least one subset of the spectrum can be selected for said detection element. A method and an application of the spectrometer are claimed.