公开(公告)号：EP1375463A1

公开(公告)日：2004-01-02

申请号：EP02713248.9

申请日：2002-03-29

申请人： Kansai Research Institute, Inc.

发明人： HANABATA, Makoto, c/o Kansai Research Inst. Inc. ,  SATO, Masahiro, c/o Kansai Research Institute Inc. ,  KATAYAMA, Junko, c/o Kansai Research Institute Inc ,  KITAJIMA, Satsuki, c/o Kansai Research Inst. Inc. ,  NIWA, Atsushi, c/o Kansai Research Institute, Inc.

IPC分类号： C07C43/205 ,  C07C69/96 ,  C07C43/225 ,  C07C69/92 ,  C07C69/773 ,  C07C43/215 ,  C07C69/618 ,  C07C69/65 ,  C07C69/734 ,  C07C69/82 ,  C07C69/76 ,  C07C69/94 ,  C07C235/56 ,  C07C271/58 ,  C07C317/22 ,  C07F7/08 ,  G03F7/004 ,  C08K5/00 ,  C08L101/00 ,  H01L21/30

CPC分类号： C07C317/22 ,  C07C43/303 ,  C07C43/313 ,  C07C43/315 ,  C07C69/92 ,  C07C69/96 ,  C07C271/58 ,  C07C2601/14 ,  C07C2603/18 ,  G03F7/0045 ,  G03F7/0392 ,  Y02P20/55 ,  Y10S430/114

摘要： A photoactive compound is used in combination with a photosensitizer, represented by the following formula (1):

        A-[(J) m -(X-Pro)] n      (1)

   wherein A represents a hydrophobic unit comprising at least one kind of hydrophobic groups selected from a hydrocarbon group and a heterocyclic group, J represents a connecting group, X-Pro represents a hydrophilic group protected by a protective group Pro which is removable by light exposure, m represents 0 or 1, and n represents an integer of not less than 1.
The protective group Pro may be removable by light exposure in association with the photosensitizer (especially, a photo acid generator), or may be a hydrophobic protective group. The hydrophilic group may be a hydroxyl group or a carboxyl group. The photoactive compound has high sensitivity to a light source of short wavelength beams, for resist application, therefore, the photoactive compound is advantageously used for forming a pattern with high resolution.