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    OPTICAL IMAGE FORMATION USING A LIGHT VALVE ARRAY AND A LIGHT CONVERGING ARRAY
    2.
    发明公开
    OPTICAL IMAGE FORMATION USING A LIGHT VALVE ARRAY AND A LIGHT CONVERGING ARRAY 审中-公开
    光学成像使用光阀阵列和光会聚阵列

    公开(公告)号：EP1660943A2

    公开(公告)日：2006-05-31

    申请号：EP04744765.1

    申请日：2004-08-09

    申请人： Koninklijke Philips Electronics N.V.

    发明人： VAN DE RIJDT, Johannes, H., A. ,  TIMMERMANS, Roger

    IPC分类号： G03F7/20

    CPC分类号： G03F7/70283 ,  G03F7/70291

    摘要： A maskless lithography method and apparatus, whereby corresponding sets of light valves (7) and radiation-converging elements (17) are provided between a radiation source and a radiation-sensitive layer (3). Each converging element corresponds to a different one of the light valves (7) and serves to converge radiation from the corresponding light valve (7) in a spot area in the radiation-sensitive layer (3). Each light valve (7) can be switched between an on and off state in dependence upon the image to be written in the radiation-sensitive layer (3) by the light valve (7). The light converging elements (17) are provided in a single, unitary optical element, and arranged in a single row substantially equal to or greater than the width or length of the radiation-sensitive layer (3).

    COMPONENT PLACEMENT MACHINE
    3.
    发明公开
    COMPONENT PLACEMENT MACHINE 有权
    具有自动安装用于进行成分

    公开(公告)号：EP1059021A1

    公开(公告)日：2000-12-13

    申请号：EP99967975.6

    申请日：1999-12-17

    申请人： Koninklijke Philips Electronics N.V.

    发明人： VAN DE RIJDT, Johannes, H., A.

    IPC分类号： H05K13/00

    CPC分类号： H05K13/0413 ,  H05K13/0015 ,  Y10T29/53178 ,  Y10T29/53183 ,  Y10T29/53191 ,  Y10T29/53261

    摘要： In a component placement machine, a placement head (4) is driven by a linear motor (5). The stationary part (7) of the motor is attached to the machine frame (1) on which a PCB (8) is attached. The movable part (6) of the motor is connected to a slide (2) on which the placement head (4) is attached. During driving the placement head, reactive forces of the motor generate vibrations in the stationary part (7) of the motor and thus in the machine frame (20). This causes inaccuracies during the placement of components (9) on the PCB (8). To diminish this problem, the reactive forces are intercepted in a separate force frame (10) which is dynamically disconnected from the machine frame (1).

    METHOD OF FORMING OPTICAL IMAGES, APPARATUS FOR CARRYING OUT SAID METHOD AND PROCESS FOR MANUFACTURING A DEVICE USING SAID METHOD
    4.
    发明授权
    METHOD OF FORMING OPTICAL IMAGES, APPARATUS FOR CARRYING OUT SAID METHOD AND PROCESS FOR MANUFACTURING A DEVICE USING SAID METHOD 有权
    方法生产光学影像，装置具体实施方法和步骤的用于制造部件使用方法

    公开(公告)号：EP1660944B1

    公开(公告)日：2008-08-13

    申请号：EP04769800.6

    申请日：2004-08-10

    申请人： Koninklijke Philips Electronics N.V.

    发明人： VAN DE RIJDT, Johannes, H., A. ,  TIMMERMANS, Roger

    IPC分类号： G03F7/20 ,  G03F1/14

    CPC分类号： G03G15/04045 ,  G03F7/70258 ,  G03F7/70275 ,  G03F7/70291 ,  G03F7/70358 ,  G03G15/326 ,  G03G2215/0414

    摘要： An optical image is formed in a resist layer (5) by a number of sub­illuminations, in each of which an array of light valves (21-25) and a corresponding array (40) of light converging elements are used to form a pattern of spots in the resist layer according to a sub-image. Between the sub-illuminations, the resist layer (5) is displaced relative to the arrays (21-25, 40). The scale of the optical image in the resist layer (5) is measured and this scale is compared with the scale of the image required to be written. If there is a difference, the spacing between the light converging elements (43) is physically altered to adjust the substrate scale.

    摘要翻译： 的光学像在抗蚀剂层（5）通过在每个光阀（21 25）和光会聚元件的相应阵列（40）阵列的哪一个的数subilluminations形成用于形成点的图案 在抗蚀剂层雅丁到子照射之间的子图像，该抗蚀剂层（5）的相对位移到所述光学图像的在抗蚀剂层中的比例（5）测得的阵列（21 25 40）和该刻度 与需要被写入如果有差别的图像的规模相比，聚光元件（43）之间的间隔是物理改变来调整刻度基材。