公开(公告)号：EP3049194A1

公开(公告)日：2016-08-03

申请号：EP14766694.5

申请日：2014-09-15

申请人： Koninklijke Philips N.V.

发明人： DIRKSEN, Peter ,  MULDER, Marcel ,  LEEUWESTEIN, Adriaan

IPC分类号： B06B1/02

CPC分类号： B06B1/0292 ,  B81B3/0021 ,  B81B2203/0127 ,  B81B2203/0315 ,  B81C1/00158 ,  B81C2201/0109 ,  B81C2201/013 ,  H02N1/006

摘要： Disclosed is a method of manufacturing a capacitive micro-machined ultrasonic transducer (CMUT) device comprising a first electrode (112) on a substrate (110) and a second electrode (122) embedded in an electrically insulating membrane, the first electrode and the membrane being separated by a cavity (130) formed by the removal of a sacrificial material (116) in between the first electrode and the membrane, the method comprising forming a membrane portion (22) on the second electrode and a further membrane portion (24) extending from the membrane portion towards the substrate alongside the sacrificial material, wherein the respective thicknesses the membrane portion and the further membrane portion exceed the thickness of the sacrificial material prior to forming said cavity. A CMUT device manufactured in accordance with this method and an apparatus comprising such a CMUT device are also disclosed.

公开(公告)号：EP2696994A2

公开(公告)日：2014-02-19

申请号：EP12718383.8

申请日：2012-04-06

申请人： Koninklijke Philips N.V.

发明人： DIRKSEN, Peter ,  LEEUWESTEIN, Adriaan

IPC分类号： B06B1/02

CPC分类号： B06B1/02 ,  B06B1/0292 ,  B81B3/0081 ,  Y10T29/49005

摘要： CMUT devices are used in many applications e.g. for ultrasound imaging and pressure measurement. These devices operate by sensing a change in capacitance caused by deflection of a membrane (32) comprising one of a pair of electrodes in the device by ultrasound exposure of or pressure applied on, the membrane. The CMUT device may be susceptible to the effects of changing temperature.

摘要翻译： CMUT设备用于许多应用，例如 用于超声成像和压力测量。 这些装置通过感测通过膜上的超声暴露或压力施加在装置中的一对电极中的一个的膜（32）的偏转引起的电容变化来进行操作。 CMUT设备可能会受到温度变化的影响。

公开(公告)号：EP2771132B1

公开(公告)日：2018-08-29

申请号：EP12810422.1

申请日：2012-10-26

申请人： Koninklijke Philips N.V.

发明人： DIRKSEN, Peter ,  DEKKER, Ronald ,  HENNEKEN, Vincent Adrianus ,  LEEUWESTEIN, Adriaan ,  MARCELIS, Bout ,  FRASER, John Douglas

IPC分类号： B06B1/02

CPC分类号： G01H9/008 ,  B06B1/0292 ,  Y10T29/49005

摘要： The present invention relates to a pre-collapsed capacitive micro-machined transducer cell (10) comprising a substrate (12), and a membrane (14) disposed above a total membrane area (Atotal), wherein a cavity (20) is formed between the membrane (14) and the substrate (12), the membrane comprising a hole (15) and an edge portion (14a) surrounding the hole (15). The cell (10) further comprises a stress layer (17) on the membrane (14), the stress layer (17) having a predetermined stress value with respect to the membrane (14), the stress layer (17) being adapted to provide a bending moment on the membrane (14) in a direction towards the substrate (12) such that the edge portion (14a) of the membrane (14) is collapsed to the substrate (12). The present invention further relates to a method of manufacturing such pre-collapsed capacitive micro-machined transducer cell (10).

公开(公告)号：EP2771132A2

公开(公告)日：2014-09-03

申请号：EP12810422.1

申请日：2012-10-26

申请人： Koninklijke Philips N.V.

发明人： DIRKSEN, Peter ,  DEKKER, Ronald ,  HENNEKEN, Vincent Adrianus ,  LEEUWESTEIN, Adriaan ,  MARCELIS, Bout ,  FRASER, John Douglas

IPC分类号： B06B1/02

CPC分类号： G01H9/008 ,  B06B1/0292 ,  Y10T29/49005

摘要： The present invention relates to a pre-collapsed capacitive micro-machined transducer cell (10) comprising a substrate (12), and a membrane (14) disposed above a total membrane area (Atotal), wherein a cavity (20) is formed between the membrane (14) and the substrate (12), the membrane comprising a hole (15) and an edge portion (14a) surrounding the hole (15). The cell (10) further comprises a stress layer (17) on the membrane (14), the stress layer (17) having a predetermined stress value with respect to the membrane (14), the stress layer (17) being adapted to provide a bending moment on the membrane (14) in a direction towards the substrate (12) such that the edge portion (14a) of the membrane (14) is collapsed to the substrate (12). The present invention further relates to a method of manufacturing such pre-collapsed capacitive micro-machined transducer cell (10).

摘要翻译： 本发明涉及一种包括基底（12）的预折叠电容微加工换能器单元（10），以及设置在总膜面积（Atotal）之上的隔膜（14），其中在 所述膜（14）和所述基板（12），所述膜包括孔（15）和围绕所述孔（15）的边缘部分（14a）。 电池（10）还包括膜（14）上的应力层（17），应力层（17）相对于膜（14）具有预定的应力值，应力层（17）适于提供 在所述膜（14）上朝向所述基板（12）的方向上的弯曲力矩使得所述膜（14）的边缘部分（14a）折叠到所述基板（12）。 本发明还涉及一种制造这种预塌缩的电容微加工的换能器单元（10）的方法。