公开(公告)号：EP2806983A1

公开(公告)日：2014-12-03

申请号：EP13709546.9

申请日：2013-01-23

申请人： Koninklijke Philips N.V.

发明人： DIRKSEN, Peter ,  MAUCZOK, Ruediger ,  KARAKAYA, Koray ,  KLOOTWIJK, Johan Hendrik ,  MARCELIS, Bout ,  MULDER, Marcel

IPC分类号： B06B1/02

摘要： The present invention relates to a method of manufacturing a capacitive micro- machined transducer (100), in particular a CMUT, the method comprising depositing a first electrode layer (10) on a substrate (1), depositing a first dielectric film (20) on the first electrode layer (10), depositing a sacrificial layer (30) on the first dielectric film (20), the sacrificial layer (30) being removable for forming a cavity (35) of the transducer, depositing a second dielectric film (40) on the sacrificial layer (30), depositing a second electrode layer (50) on the second dielectric film (40), and patterning at least one of the deposited layers and films (10, 20, 30, 40, 50), wherein the depositing steps are performed by Atomic Layer Deposition. The present invention further relates to a capacitive micro-machined transducer (100), in particular a CMUT, manufactured by such method.

公开(公告)号：EP4147282A1

公开(公告)日：2023-03-15

申请号：EP21718918.2

申请日：2021-04-21

申请人： Koninklijke Philips N.V.

发明人： WEEKAMP, Johannes, Wilhelmus ,  HENNEKEN, Vincent, Adrianus ,  MULDER, Marcel ,  LOUWERSE, Marcus, Cornelis ,  VAN DER HORST, Arjen

IPC分类号： H01L41/047 ,  H01L41/113 ,  H01L41/29 ,  A61B5/00

公开(公告)号：EP3645087A1

公开(公告)日：2020-05-06

申请号：EP18733835.5

申请日：2018-06-20

申请人： Koninklijke Philips N.V.

发明人： HILBIG, Rainer ,  DE GRAAF, Pascal ,  MULDER, Marcel ,  KOERBER, Achim, Gerhard, Rolf

IPC分类号： A61M11/00 ,  A61M15/00 ,  A61M16/16 ,  A61M16/08

公开(公告)号：EP2806983B1

公开(公告)日：2020-04-01

申请号：EP13709546.9

申请日：2013-01-23

申请人： Koninklijke Philips N.V.

发明人： DIRKSEN, Peter ,  MAUCZOK, Ruediger ,  KARAKAYA, Koray ,  KLOOTWIJK, Johan Hendrik ,  MARCELIS, Bout ,  MULDER, Marcel

IPC分类号： B06B1/02 ,  H04R31/00 ,  H04R19/00

公开(公告)号：EP2750806B1

公开(公告)日：2019-05-08

申请号：EP12821050.7

申请日：2012-12-13

申请人： Koninklijke Philips N.V.

发明人： DEKKER, Ronald ,  MARCELIS, Bout ,  MULDER, Marcel ,  MAUCZOK, Ruediger

IPC分类号： B06B1/02

公开(公告)号：EP3049194A1

公开(公告)日：2016-08-03

申请号：EP14766694.5

申请日：2014-09-15

申请人： Koninklijke Philips N.V.

发明人： DIRKSEN, Peter ,  MULDER, Marcel ,  LEEUWESTEIN, Adriaan

IPC分类号： B06B1/02

CPC分类号： B06B1/0292 ,  B81B3/0021 ,  B81B2203/0127 ,  B81B2203/0315 ,  B81C1/00158 ,  B81C2201/0109 ,  B81C2201/013 ,  H02N1/006

摘要： Disclosed is a method of manufacturing a capacitive micro-machined ultrasonic transducer (CMUT) device comprising a first electrode (112) on a substrate (110) and a second electrode (122) embedded in an electrically insulating membrane, the first electrode and the membrane being separated by a cavity (130) formed by the removal of a sacrificial material (116) in between the first electrode and the membrane, the method comprising forming a membrane portion (22) on the second electrode and a further membrane portion (24) extending from the membrane portion towards the substrate alongside the sacrificial material, wherein the respective thicknesses the membrane portion and the further membrane portion exceed the thickness of the sacrificial material prior to forming said cavity. A CMUT device manufactured in accordance with this method and an apparatus comprising such a CMUT device are also disclosed.

公开(公告)号：EP2922707A2

公开(公告)日：2015-09-30

申请号：EP13792500.4

申请日：2013-11-06

申请人： Koninklijke Philips N.V.

发明人： KLOOTWIJK, Johan Hendrik ,  MULDER, Marcel ,  DE WILD, Nico Maris Adriaan ,  KARAKAYA, Koray ,  VAN DEN HEUVEL, Cornelius Antonius

IPC分类号： B60B1/02

CPC分类号： G10K11/18 ,  B06B1/0292 ,  C23C16/45525 ,  C23C16/56

摘要： The present invention relates to a method of manufacturing a capacitive micro- machined transducer (100), in particular a CMUT, the method comprising depositing a first electrode layer (10) on a substrate (1), depositing a first dielectric film (20) on the first electrode layer (10), depositing a sacrificial layer (30) on the first dielectric film (20), the sacrificial layer (30) being removable for forming a cavity (35) of the transducer, depositing a second dielectric film (40) on the sacrificial layer (30), depositing a second electrode layer (50) on the second dielectric film (40), and patterning at least one of the deposited layers and films (10, 20, 30, 40, 50), wherein the depositing steps are performed by Atomic Layer Deposition. The present invention further relates to a capacitive micro-machined transducer (100), in particular a CMUT, manufactured by such method.

公开(公告)号：EP3371588A1

公开(公告)日：2018-09-12

申请号：EP16791382.1

申请日：2016-11-03

申请人： Koninklijke Philips N.V.

发明人： CHEN, Shuang ,  KELLY, Declan, Patrick ,  RONDA, Cornelis, Reinder ,  DE GRAAF, Pascal ,  DE WILD, Nico, Maris, Adriaan ,  MULDER, Marcel ,  JACOBS, Jean-Paul

IPC分类号： G01N33/00

CPC分类号： G01N33/0022 ,  G01N33/0009

摘要： The invention describes a modular fluid sensing system comprising a fluid sensing terminal (150) and removable fluid channel units (101, 102, 103). The fluid channel units (101, 102, 103) comprise or can be combined with fluid treatment units as filters, sensors and seals. The fluid channel units (101, 102, 103) can be combined in accordance with the present needs of the user of the fluid sensing system. The invention therefore enables a reconfigurable channel system with reconfigurable measurement and treatment options within a fluid sensing system.

公开(公告)号：EP2909617A2

公开(公告)日：2015-08-26

申请号：EP13817722.5

申请日：2013-10-07

申请人： Koninklijke Philips N.V.

发明人： KLOOTWIJK, Johan, Hendrik ,  MULDER, Marcel

IPC分类号： G01N27/414 ,  G01N33/00

CPC分类号： G01N27/4146 ,  G01N33/0031 ,  H01L29/0673

摘要： Device (100) for detecting a concentration of a substance in a fluid sample, the device comprising: a substrate (102); an insulating layer (104) arranged on the substrate (102); a plurality of individually electrically addressable semiconducting nanowires (106, 108, 110) arranged on the insulating layer (104), each one of the plurality of nanowires being covered by an insulating material (202, 204, 206) and arranged for sensing of the substance through an electrical characteristic of the nanowire; and a sample compartment (118) for providing the fluid sample in contact with each of the plurality of nanowires; wherein for each of the plurality of nanowires (106, 108, 110), at least one of cross sectional dimension, insulator thickness and type of insulating material is selected such that each of the nanowires has a different detection range, and such that the dynamic range of the device is higher than the dynamic range of each of the individual nanowires.

公开(公告)号：EP2820672A2

公开(公告)日：2015-01-07

申请号：EP13716403.4

申请日：2013-02-20

申请人： Koninklijke Philips N.V.

发明人： DEKKER, Ronald ,  HENNEKEN, Vincent Adrianus ,  MULDER, Marcel

IPC分类号： H01L23/48 ,  H01L23/49 ,  H01L23/485 ,  H01L21/768 ,  A61B1/00 ,  A61B1/05 ,  H01L29/06

CPC分类号： H05K1/115 ,  A61B1/0008 ,  A61B1/051 ,  A61B8/12 ,  A61B18/1492 ,  A61B2018/00577 ,  A61B2018/00714 ,  A61B2018/00791 ,  A61N1/36135 ,  H01L21/76898 ,  H01L23/481 ,  H01L24/03 ,  H01L24/05 ,  H01L24/46 ,  H01L24/48 ,  H01L24/72 ,  H01L24/85 ,  H01L29/0657 ,  H01L2224/0401 ,  H01L2224/04042 ,  H01L2224/05166 ,  H01L2224/05555 ,  H01L2224/0557 ,  H01L2224/05624 ,  H01L2224/05644 ,  H01L2224/13101 ,  H01L2224/16145 ,  H01L2224/45565 ,  H01L2224/4824 ,  H01L2224/4847 ,  H01L2224/85205 ,  H01L2224/85365 ,  H01L2224/85801 ,  H01L2224/85815 ,  H01L2924/00014 ,  H01L2924/10155 ,  H01L2924/10253 ,  H01L2924/12042 ,  H01L2924/181 ,  H05K1/18 ,  H05K3/0094 ,  H05K3/32 ,  Y10T29/49169 ,  H01L2924/014 ,  H01L2224/45099 ,  H01L2224/45599 ,  H01L2924/00

摘要： The present invention relates to an electronic circuit arrangement (10) comprising: a substrate (12) having a first surface (12a) and a second surface (12b), an electronic circuit, an electrical connection part (16) for providing an electrical connection to the electronic circuit and being arranged on the first surface (12a), and at least one electrical wire (18). The electrical wire (18) comprises at least one conductive core (20) and an isolation (22) surrounding the conductive core (20). An end portion (18a) of the electrical wire (18) is an isolation-free portion for allowing access to the conductive core (20), wherein the end portion (18a) of the electrical wire (18) is connected to the electrical connection part (16). At least one through-hole (24) extending from the first surface (12a) to the second surface (12b) is provided in the substrate (12), wherein the electrical wire (18) is arranged through the through-hole (24).