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1.发明授权Method and apparatus for making a micro device 失效Verfahren und Apparat zur Herstellung einer Mikroanordnung
公开(公告)号：EP0880077B1
公开(公告)日：2005-01-05
申请号：EP98303499.2
申请日：1998-05-05
CPC分类号： G03F9/00 , C23C14/042
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公开(公告)号：EP1050766A2
公开(公告)日：2000-11-08
申请号：EP00303459.2
申请日：2000-04-25
发明人： Aksyuk, Vladimir A. , Barber, Bradley Paul , Bishop, David J. , Gammel, Peter L. , Giles, C. Randy
IPC分类号： G02B6/35
CPC分类号： G02B6/3518 , G02B6/352 , G02B6/3548 , G02B6/357 , G02B6/3584 , G02B26/0841
摘要： An article (400) for directing optical signals among optical waveguides (410, 412, 414) is disclosed. The article comprises a plurality of mirror elements (452) that are mechanically and electrically interconnected to form a reflective surface. The reflective surface is deformable upon application of a voltage. Optical signals delivered from a source waveguide (414) may be directed to different destination waveguides (410, 412) as the reflective surface is deformed. The plurality of minor elements is actuated by a single actuator (406).
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公开(公告)号：EP0902538A2
公开(公告)日：1999-03-17
申请号：EP98307019.4
申请日：1998-09-01
IPC分类号： H03K17/968
CPC分类号： G02B6/3568 , G02B6/122 , G02B6/3514 , G02B6/353 , G02B6/3552 , G02B6/357 , G02B6/3584 , G02B2006/12104
摘要： An article comprising a light-actuated photonic switch is disclosed. The light-actuated photonic switch advantageously includes a photogenerator that powers a micro-electromechanical systems (MEMS) switch having very low voltage requirements. The MEMS switch is operable to move a reflector into or out of a path of an optical signal travelling between two waveguides. Since the MEMS switch has such low voltage requirements, a long wave photogenerator, which generates relatively low voltages, can be used. As long wavelength light experiences relatively little attenuation in optical fiber, active lightwave circuits incorporating the present light-actuated photonic switch can have very long fiber runs to remote nodes.
摘要翻译： 公开了一种包括光致动光开关的物品。 光致动光开关有利地包括为具有非常低电压要求的微机电系统（MEMS）开关供电的光生成器。 MEMS开关可操作以将反射器移入或移出在两个波导之间传播的光信号的路径。 由于MEMS开关具有如此低的电压要求，因此可以使用产生相对较低电压的长波光发生器。 由于长波长的光在光纤中经受的衰减相对较小，因此包含本光驱动光开关的有源光波电路可以具有非常长的光纤到达远端节点。
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公开(公告)号：EP0880077A2
公开(公告)日：1998-11-25
申请号：EP98303499.2
申请日：1998-05-05
IPC分类号： G03F9/00
CPC分类号： G03F9/00 , C23C14/042
摘要： A hinged mask and a method for its use in manufacturing MEMS device are disclosed. According to the invention, the hinged mask and a portion of the MEMS device are formed at the same time on a support. Openings are formed in the mask, the openings defining a pattern that is transferable in the form of a patterned layer. After release of the MEMS device, the hinged mask is rotated out-of-plane about 180° to lie on top of the MEMS device. The hinged mask is used as a micro-sized shadow mask to deposit a patterned film of arbitrary composition on the MEMS device. Since the hinged plate is formed by the original lithography, it is aligned to the MEMS device with a high degree of accuracy.
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5.发明公开Article comprising a deformable segmented mirror 有权Vorrichtung mit einem deformierbaren segmentierten Spiegel
公开(公告)号：EP1050766A3
公开(公告)日：2003-12-03
申请号：EP00303459.2
申请日：2000-04-25
发明人： Aksyuk, Vladimir A. , Barber, Bradley Paul , Bishop, David J. , Gammel, Peter L. , Giles, C. Randy
CPC分类号： G02B6/3518 , G02B6/352 , G02B6/3548 , G02B6/357 , G02B6/3584 , G02B26/0841
摘要： An article (400) for directing optical signals among optical waveguides (410, 412, 414) is disclosed. The article comprises a plurality of mirror elements (452) that are mechanically and electrically interconnected to form a reflective surface. The reflective surface is deformable upon application of a voltage. Optical signals delivered from a source waveguide (414) may be directed to different destination waveguides (410, 412) as the reflective surface is deformed. The plurality of minor elements is actuated by a single actuator (406).
摘要翻译： 公开了一种用于在光波导（410,412,414）中引导光信号的物品（400）。 所述制品包括机械和电互连以形成反射表面的多个镜元件（452）。 反射表面在施加电压时可变形。 当反射表面变形时，从源极波导（414）传送的光信号可被引导到不同的目的波导（410,412）。 多个次要元件由单个致动器（406）致动。
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公开(公告)号：EP0902538A3
公开(公告)日：1999-12-22
申请号：EP98307019.4
申请日：1998-09-01
IPC分类号： H03K17/968
CPC分类号： G02B6/3568 , G02B6/122 , G02B6/3514 , G02B6/353 , G02B6/3552 , G02B6/357 , G02B6/3584 , G02B2006/12104
摘要： An article comprising a light-actuated photonic switch is disclosed. The light-actuated photonic switch advantageously includes a photogenerator that powers a micro-electromechanical systems (MEMS) switch having very low voltage requirements. The MEMS switch is operable to move a reflector into or out of a path of an optical signal travelling between two waveguides. Since the MEMS switch has such low voltage requirements, a long wave photogenerator, which generates relatively low voltages, can be used. As long wavelength light experiences relatively little attenuation in optical fiber, active lightwave circuits incorporating the present light-actuated photonic switch can have very long fiber runs to remote nodes.
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公开(公告)号：EP1050766B1
公开(公告)日：2006-05-31
申请号：EP00303459.2
申请日：2000-04-25
发明人： Aksyuk, Vladimir A. , Barber, Bradley Paul , Bishop, David J. , Gammel, Peter L. , Giles, C. Randy
CPC分类号： G02B6/3518 , G02B6/352 , G02B6/3548 , G02B6/357 , G02B6/3584 , G02B26/0841
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公开(公告)号：EP0880077A3
公开(公告)日：2003-05-14
申请号：EP98303499.2
申请日：1998-05-05
CPC分类号： G03F9/00 , C23C14/042
摘要： A hinged mask and a method for its use in manufacturing MEMS device are disclosed. According to the invention, the hinged mask and a portion of the MEMS device are formed at the same time on a support. Openings are formed in the mask, the openings defining a pattern that is transferable in the form of a patterned layer. After release of the MEMS device, the hinged mask is rotated out-of-plane about 180° to lie on top of the MEMS device. The hinged mask is used as a micro-sized shadow mask to deposit a patterned film of arbitrary composition on the MEMS device. Since the hinged plate is formed by the original lithography, it is aligned to the MEMS device with a high degree of accuracy.
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