公开(公告)号：EP3894961A1

公开(公告)日：2021-10-20

申请号：EP19832544.1

申请日：2019-12-11

申请人： Laser Imaging Systems GmbH

发明人： RÜCKER, Steffen ,  KLOWSKY, Uwe

IPC分类号： G03F7/20 ,  G03F9/00 ,  B23K26/08 ,  C23C16/04 ,  C23C16/48

公开(公告)号：EP1110437A1

公开(公告)日：2001-06-27

申请号：EP99915645.8

申请日：1999-03-15

申请人： Laser Imaging Systems GmbH & Co. KG.

发明人： RETSCHKE, Wolfgang ,  SENF, Wolfgang ,  RÜCKER, Steffen ,  KLOWSKY, Uwe ,  BATTIG, Udo ,  BAUMANN, Ulrich

IPC分类号： H05K3/12 ,  H04N1/192 ,  H04N1/10

CPC分类号： H04N1/192 ,  G03F7/203 ,  G03F7/2053 ,  G03F9/00 ,  H04N1/1008 ,  H04N1/1135 ,  H04N2201/0471 ,  H04N2201/04718 ,  H04N2201/04732 ,  H04N2201/04737 ,  H05K3/0082

摘要： A method of scanning for writing a pattern on a surface, comprising: providing a scanning beam comprised of a plurality of independently addressable sub-beams; scanning the surface with said scanning beam a plurality of times, said sub-beams scanning the surface side-by-side in the cross-scan direction, each said sub-beam being modulated to reflect information to be written; and overlapping the beams such that all written areas of the surface are written on during at least two scans.

摘要翻译： 一种扫描在表面上写入图案的方法，包括：提供由多个可独立寻址的子光束组成的扫描光束; 多个扫描光束扫描表面，所述子光束在横扫扫描方向上并排扫描表面，每个所述子光束被调制以反映待写入的信息; 并且在至少两次扫描期间使光束重叠，使得表面的所有写入区域被写入。

公开(公告)号：EP1110437B1

公开(公告)日：2005-02-09

申请号：EP99915645.8

申请日：1999-03-15

申请人： Laser Imaging Systems GmbH & Co. KG.

发明人： RETSCHKE, Wolfgang ,  SENF, Wolfgang ,  RÜCKER, Steffen ,  KLOWSKY, Uwe ,  BATTIG, Udo ,  BAUMANN, Ulrich

IPC分类号： H05K3/12 ,  H04N1/192 ,  H04N1/10

CPC分类号： H04N1/192 ,  G03F7/203 ,  G03F7/2053 ,  G03F9/00 ,  H04N1/1008 ,  H04N1/1135 ,  H04N2201/0471 ,  H04N2201/04718 ,  H04N2201/04732 ,  H04N2201/04737 ,  H05K3/0082

摘要： A method of scanning for writing a pattern on a surface, comprising: providing a scanning beam comprised of a plurality of independently addressable sub-beams; scanning the surface with said scanning beam a plurality of times, said sub-beams scanning the surface side-by-side in the cross-scan direction, each said sub-beam being modulated to reflect information to be written; and overlapping the beams such that all written areas of the surface are written on during at least two scans.

公开(公告)号：EP4045446A1

公开(公告)日：2022-08-24

申请号：EP20799983.0

申请日：2020-10-12

申请人： Laser Imaging Systems GmbH

发明人： VOGT, Peter ,  STROBEL, Toni ,  PAGEL, René ,  KLOWSKY, Uwe ,  RÜCKER, Steffen ,  KÖNIG, Christian ,  WITTER, Marcus

IPC分类号： B65H23/04 ,  B23K26/082 ,  B23K26/08 ,  B65H23/182 ,  B65H23/188 ,  B65H23/195 ,  G03F7/20 ,  H05K3/00

公开(公告)号：EP3443415A1

公开(公告)日：2019-02-20

申请号：EP17721517.5

申请日：2017-03-30

申请人： Laser Imaging Systems GmbH

发明人： SCHOLZ-GÖRLACH, Urban ,  KLOWSKY, Uwe ,  FLEMMING, Günter

IPC分类号： G03B27/60 ,  H01L21/683 ,  B23K37/04 ,  B25B11/00 ,  G03F7/20 ,  B41F15/20