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公开(公告)号：EP0930165A4
公开(公告)日：2001-02-14
申请号：EP98912786
申请日：1998-04-14
发明人： KANNO ISAKU , FUJII SATORU , TAKAYAMA RYOICHI , KAMADA TAKESHI
CPC分类号： B41J2/1623 , B41J2/14233 , B41J2/161 , B41J2/1629 , B41J2/1632 , B41J2/1642 , B41J2/1643 , B41J2/1645 , B41J2/1646 , B41J2002/1425 , B41J2002/14258 , B41J2002/14379 , B41J2202/03
摘要： An ink-jet head which is used in an ink-jet recorder and has outlets provided at high density. The head comprises ink outlets, a pressure chamber communicating with the ink outlets, and a piezoelectric vibrating section which includes a piezoelectric film containing Pb, Ti and Zr and electrodes provided on both sides of the piezoelectric film, and is installed in a part of the pressure chamber. The piezoelectric film consists of a 1st layer and a 2nd layer which have the Perovskite structures respectively and are in contact with each other. The 1st layer does not contain Zr or contains Zr with a content less than the content of Zr in the 2nd layer.
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2.发明公开PIEZOELECTRIC THIN FILM DEVICE, INKJET RECORDING HEAD USING THE DEVICE AND MANUFACTURING METHODS OF THE DEVICE AND THE HEAD 审中-公开PIEZOELEKTRISCHESDÜNNSCHICHTELEMENT，TINTENSTRAHLDRUCKKOPF SOWIE HERSTELLUNGSVERFAHREN
公开(公告)号：EP1089360A4
公开(公告)日：2002-05-29
申请号：EP00915356
申请日：2000-04-05
发明人： FUJII SATORU , KANNO ISAKU , TAKAYAMA RYOICHI , WATANABE OSAMU , TOMITA KENJI , TAKAO SHIGEYUKI
CPC分类号： B41J2/1629 , B41J2/14233 , B41J2/161 , B41J2/1623 , B41J2/1645 , B41J2/1646 , B41J2002/1425 , H01L41/0973 , H01L41/1876 , H01L41/313 , H01L41/316
摘要： When a piezoelectric thin film device (D), composed of a piezoelectric thin film (1), 1st and 2nd electrode films (2 and 3) formed on both the surfaces in the thickness direction of the piezoelectric thin film (1) and a support film (5) supporting the piezoelectric thin film (1), is manufactured by forming the respective films (1, 2, 3 and 5) on a film forming substrate (11) and then removing the film forming substrate (11) by etching, and even if the support film (5) is made of resin, etc. and an adhesion force between the support film and other films is relatively low, damages to a piezoelectric thin film (1) by an etchant can be securely prevented. For that purpose, the 1st electrode film (2), in contact with the film forming substrate (11), is formed so as to have its whole circumferential edge protrude sidewise beyond the side surface of the piezoelectric thin film (1) for tight adhering to the support film (5).
摘要翻译： 通过形成每个膜1,2制造压电薄膜元件D，其中分别在其厚度方向的相对表面上形成有第一和第二电极膜2和3的压电薄膜1由保持膜5保持 ，3和5在成膜基板11上，并通过蚀刻去除成膜基板11。 即使当保持膜5由诸如树脂的材料制成并且因此相对于其它膜显示相对较差的粘附性时，由于与膜接触的第一电极膜2，保护了压电薄膜1免受蚀刻剂的损伤 形成基板11形成为使得第一电极膜2的周边部分的整个周边横向延伸超过压电薄膜1的侧表面并且紧密地附着到保持膜5。
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公开(公告)号：EP1005986A4
公开(公告)日：2001-10-17
申请号：EP99957038
申请日：1999-06-16
发明人： MIKI KATSUMASA , NAKATANI MASAYA , KANNO ISAKU , TAKAYAMA RYOICHI , NOMURA KOJI
CPC分类号： B41J2/1623 , B41J2/14233 , B41J2/161 , B41J2/1628 , B41J2/1631 , B41J2/1632 , B41J2/1646 , B41J2002/14387
摘要： A fluid jetting device and its production process used in ink-jet for realizing high-density nozzle arrangement and high efficiency production process. A through hole (15) is made in a glass substrate (18) by sandblasting. The glass substrate (18) is directly joined to a second silicon substrate (19). An orifice (14) is made in the joined substrates (18, 19). A first silicon substrate (17) is etched so as to form a pressure chamber (12), a passage (13), and a fluid supply port (16), and is joined directly to the glass substrate (18). A piezoelectric thin film (11) having an elastic body (20) is joined directly above the pressure chamber (12).
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公开(公告)号：EP1311006A4
公开(公告)日：2007-07-25
申请号：EP01953307
申请日：2001-07-23
发明人： KANNO ISAKU , HARA SHINTAROU , NAKANO TAKANORI
IPC分类号： H01L41/187 , H01L41/22 , H01L41/24 , H01L41/316 , H01L41/08
CPC分类号： H01L41/1876 , H01L41/0973 , H01L41/316
摘要： To provide a piezoelectric thin film having an improved and stable characteristic by controlling stress applied during forming a piezoelectric thin film and providing the piezoelectric thin film having a perovskite structure. A thin film piezoelectric element in which a lower electrode is formed on a substrate, a piezoelectric thin film containing lead is formed on the lower electrode, and an upper electrode is further placed on the piezoelectric thin film, characterized in that the piezoelectric thin film is a dielectric with the perovskite structure having lead, zirconium, and titanium as the main ingredients, and is in a composition region in which, in the composition of the whole piezoelectric thin film, the Zr/(Zr + Ti) ratio is not less than 0.53, and has a crystal structure of the tetragonal system in which a c axis is longer than an a axis.
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5.发明公开HEAD SUPPORT MECHANISM, INFORMATION RECORDING / REPRODUCING APPARATUS, AND METHOD OF MANUFACTURING HEAD SUPPORT MECHANISM 审中-公开磁头悬浮液中，信息记录和再现装置，以及一种用于制造磁头用悬浮装置的一种方法
公开(公告)号：EP1152401A4
公开(公告)日：2003-01-15
申请号：EP99943376
申请日：1999-09-16
发明人： YOKOYAMA KAZUO , YAMAMOTO SHINICHI , IRIE YOUSUKE , KUWAJIMA HIDEKI , SAKAMOTO KENICHI , MATSUOKA KAORU , KANNO ISAKU , FUJII SATORU
CPC分类号： G11B5/4853 , G11B5/484 , G11B5/5552
摘要： A head support mechanism includes a head and a slider for holding the head, and main drive means tracks the head. The head support mechanism further includes an auxiliary drive means composed of thin film, whose flexure can move the head finely.
摘要翻译： 一种头支撑机构包括头部和用于承载头的滑块，所述头被引起主驱动装置来跟踪，worin：该头支撑机构还包括驱动子装置包括一薄膜并引起头有一个微 -movement; 和驱动子装置使所述头通过利用薄膜的挠性变形到具有微运动。
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