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    A METHOD OF MANUFACTURE OF MICRO COMPONENTS, AND COMPONENTS FORMED BY SUCH A PROCESS
    1.
    发明公开
    A METHOD OF MANUFACTURE OF MICRO COMPONENTS, AND COMPONENTS FORMED BY SUCH A PROCESS 审中-公开
    用于生产微型元件，并通过这种方法生产的部件

    公开(公告)号：EP3134916A1

    公开(公告)日：2017-03-01

    申请号：EP15782575.3

    申请日：2015-04-22

    申请人： Master Dynamic Limited

    发明人： WANG, Yingnan ,  HUANG, Jianxing

    IPC分类号： H01L21/308 ,  B81C1/00

    CPC分类号： B28D5/04 ,  B81C1/00626 ,  B81C2201/0132 ,  C09K13/08 ,  G03F7/405

    摘要： A method of forming a multi-level component having a first surface portion a first level and a second surface portion of a second level different to the level of the first level, said method including the steps of forming at least one arrangement of micro trenches or an arrangement of micro pillars having a micro trench therebetween in a predetermined arrangement in a mask material by one or more lithography processes, wherein one or more of said micro trenches have a first aspect ratio and one or more of said micro trenches have a second aspect ratio different from said first aspect ratio; applying one or more etching processes to a surface of a component upon which said mask is applied, wherein the component is etched by an aspect ratio dependent etch (ARDE) process so as to form an arrangement of micro trenches and micro pillars between adjacent micro trenches; wherein one or more micro trenches corresponding to the micro trenches of the first aspect ratio is etched a first level from said surface of the component, and wherein one or more micro trenches corresponding to the micro trenches of the second aspect ratio is etched at a second level from said surface of the component and at different level to said fist level; and (iii) removing said arrangement of micro pillars from said component by a removal process; wherein upon removal of said micro pillars a first surface portion is formed at said first level and a second surface portion is formed at said second level, wherein the second surface portion is at a different level to that of the of the first surface portion.

    摘要翻译： 形成多级组件的方法包括：通过光刻工艺形成在掩模材料以预定排列微沟槽中的至少一个装置的步骤。 另一个步骤包括将一个或多个蚀刻工艺，以在其上掩模施加部件的表面。 所述微沟槽具有第一或第二不同的纵横比。 在所述施加步骤中，部件是通过在纵横比相关刻蚀（ARDE）工艺来蚀刻，从而形成微沟槽和相邻的微沟槽之间的微柱的布置。 另一个步骤包括通过去除工艺除去从组件微柱的布置。 因此，存在雅丁对上述方法与在第一级和与第一电平不同的电平进一步的另外的部分的第一部分的多级组件。

    METHOD OF FORMING A MARKING ON AN ARTICLE, AND AN ARTICLE HAVING A MARK THEREON
    4.
    发明授权
    METHOD OF FORMING A MARKING ON AN ARTICLE, AND AN ARTICLE HAVING A MARK THEREON 有权

    公开(公告)号：EP3187343B1

    公开(公告)日：2018-12-12

    申请号：EP16207371.2

    申请日：2016-12-29

    申请人： Master Dynamic Limited

    发明人： WANG, Yingnan ,  KONG, Ching Tom ,  MIAO, Zhuonan

    IPC分类号： B44B5/02 ,  B44C1/24 ,  B22D23/00 ,  B21C51/00 ,  A44C27/00 ,  B22D19/00 ,  B22C9/22

    CPC分类号： A44C27/00 ,  B21C51/005 ,  B22C9/22 ,  B22D19/00 ,  B22D23/00 ,  B44B5/026 ,  G02B5/1852 ,  G02B5/1861

    摘要： A mold for imparting a marking including a requisite optical element having two and a half dimensions (2.5D) to the outer surface of an article formed from a ductile material, said mold comprising a marking surface for imparting the mark to an outer surface of the article by way of localized plastic deformation of the material from which the article is formed upon the mold and the article being urged against each other, said marking surface including a micro-structure formed by an arrangement of a plurality of micro meter sized recessed or protruded entities. The entities are arranged in a predetermined arrangement in relation to each other and said entities being arranged as a micro-structure having two and a half dimensions (2.5D), wherein said entities are arranged in an inverse arrangement in respect of the requisite optical element to be formed on the surface of an article, and said entities are arranged so as to provide one or more recesses extending in a direction of from said marking surface into the mold. The one more recesses are sized and shaped such that upon the mold being urged against the article, the optical element is imparted to the article upon deformation of the ductile material so as to conform with the surfaces of the plurality of micro meter sized recessed or protruded entities and wherein ductile material is plastically deformed and urged into said one or more recesses and conforms with the recesses, wherein deformation and flow of the ductile material into the recesses reduces lateral stresses imparted to the mold adjacent the recesses, and ductile urged into the recesses forms a portion of the material from deformation of the ductile material being imparted to the entities optical element having two and a half dimensions (2.5D).

    METHOD OF MARKING A SOLID STATE MATERIAL, AND SOLID STATE MATERIALS MARKED ACCORDING TO SUCH A METHOD
    6.
    发明公开
    METHOD OF MARKING A SOLID STATE MATERIAL, AND SOLID STATE MATERIALS MARKED ACCORDING TO SUCH A METHOD 审中-公开
    程序对固体材料的标记和在这样一个过程注明固体材料

    公开(公告)号：EP3131724A1

    公开(公告)日：2017-02-22

    申请号：EP15779777.0

    申请日：2015-04-16

    申请人： Master Dynamic Limited

    发明人： WANG, Yingnan ,  KONG, Ching Tom

    IPC分类号： B28D5/00 ,  B44B7/00 ,  B44C1/00 ,  B81C1/00 ,  B82B3/00 ,  G03F7/00

    CPC分类号： B44C1/227 ,  B28D5/00 ,  G03F7/00 ,  G03F7/0002 ,  H01J37/321 ,  H01J37/32192 ,  H01J2237/334

    摘要： A method of forming a non-optically detectable identifiable mark at an outer surface of an article formed from a solid state material, said method including the steps of forming a plurality of recesses within a predetermined region of a photoresist 5 applied to an outer surface of an article formed from a solid state material, wherein said plurality of recesses is formed by two-photon absorption lithography and wherein said one or more recesses extend at least partially through the photoresist and from an outer surface of the photoresist and towards said outer surface of the article 10 formed from a solid state material; and applying an etching process such that at least a portion of the outer surface of said article is exposed and etched so as to form a plurality of etched portions extending into said article from the outer surface of the article and corresponding to said plurality of recesses; wherein said predetermined region of said photoresist defines an identifiable mark to be applied to the outer 15 surface of said article; wherein said plurality of etched portions forms the nonoptically identifiable mark on the outer surface of said article; and wherein the maximum width of the etched portions of is less than 200 nm such that the identifiable mark is non-optically detectable in the visible light spectrum.

    摘要翻译： 在从固态材料形成的制品的外表面上形成非光学可检测的识别标记的方法，所述的方法包括在的外表面适用于光致抗蚀剂的预定区域内形成的凹部中的多个步骤 物品从固态材料形成，worin凹部，所述多个被双光子吸收的光刻技术形成和worin所述一个或多个凹部通过光致抗蚀剂，并从在所述光致抗蚀剂的外表面和朝向的所述外表面至少部分地延伸 形成了从固态材料制品; 和施加到蚀刻工艺搜索做至少所述物品的外表面的一部分被暴露，从而被蚀刻，以形成从所述制品的外表面延伸到所述制品和对应于凹部的所述多个蚀刻部分的多元性; 说的光致抗蚀剂worin所述预定区域定义检测识别标记将被施加到所述制品的外表面; 蚀刻部分的worin所述多个形成所述制品的外表面上的非光学识别标记; 和worin的小于200nm的蚀刻部分的最大宽度被检查做的识别标记是在可见光光谱的非光学方法检测。

    METHOD OF FORMING A MARKING ON AN ARTICLE, AND AN ARTICLE HAVING A MARK THEREON
    8.
    发明公开
    METHOD OF FORMING A MARKING ON AN ARTICLE, AND AN ARTICLE HAVING A MARK THEREON 审中-公开
    在物品上形成标记的方法和具有标记的物品

    公开(公告)号：EP3187343A1

    公开(公告)日：2017-07-05

    申请号：EP16207371.2

    申请日：2016-12-29

    申请人： Master Dynamic Limited

    发明人： WANG, Yingnan ,  KONG, Ching Tom ,  MIAO, Zhuonan

    IPC分类号： B44B5/02 ,  B44C1/24

    CPC分类号： A44C27/00 ,  B21C51/005 ,  B22C9/22 ,  B22D19/00 ,  B22D23/00 ,  B44B5/026 ,  G02B5/1852 ,  G02B5/1861

    摘要： A mold for imparting a marking including a requisite optical element having two and a half dimensions (2.5D) to the outer surface of an article formed from a ductile material, said mold comprising a marking surface for imparting the mark to an outer surface of the article by way of localized plastic deformation of the material from which the article is formed upon the mold and the article being urged against each other, said marking surface including a micro-structure formed by an arrangement of a plurality of micro meter sized recessed or protruded entities. The entities are arranged in a predetermined arrangement in relation to each other and said entities being arranged as a micro-structure having two and a half dimensions (2.5D), wherein said entities are arranged in an inverse arrangement in respect of the requisite optical element to be formed on the surface of an article, and said entities are arranged so as to provide one or more recesses extending in a direction of from said marking surface into the mold. The one more recesses are sized and shaped such that upon the mold being urged against the article, the optical element is imparted to the article upon deformation of the ductile material so as to conform with the surfaces of the plurality of micro meter sized recessed or protruded entities and wherein ductile material is plastically deformed and urged into said one or more recesses and conforms with the recesses, wherein deformation and flow of the ductile material into the recesses reduces lateral stresses imparted to the mold adjacent the recesses, and ductile urged into the recesses forms a portion of the material from deformation of the ductile material being imparted to the entities optical element having two and a half dimensions (2.5D).

    摘要翻译： 一种用于将包括具有二维（2.5D）的必要光学元件的标记赋予由延性材料形成的制品的外表面的模具，所述模具包括标记表面，用于将标记赋予 通过在模具上形成物品的材料的局部塑性变形以及物品彼此抵靠的方式对物品进行局部塑性变形，所述标记表面包括通过多个微米尺寸的凹入或凸出的布置形成的微结构 实体。 所述实体相对于彼此以预定布置进行布置，并且所述实体被布置为具有二维和二分之一维（2.5D）的微结构，其中所述实体以相对于所需光学元件 以形成在物品的表面上，并且所述实体被布置成提供一个或多个凹槽，所述凹槽在从所述标记表面的方向上延伸到模具中。 所述一个或多个凹部的尺寸和形状使得当模具被推靠在物品上时，在延性材料变形时将光学元件赋予物品，以便与多个微米尺寸的凹入或凸出的表面一致 实体，并且其中延性材料塑性变形并被推入所述一个或多个凹槽并与凹槽相符，其中延性材料进入凹槽中的变形和流动降低了施加到邻近凹槽的模具的横向应力，并且延性被推入凹槽 由于被赋予具有二维（2.5D）的实体光学元件的延性材料的变形而形成材料的一部分。